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1. 发明授权

US07848076B2 Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing 有权
标题翻译：用于提供具有降低的等离子体穿透和电弧放电的静电卡盘的方法和装置
公开(公告)号：US07848076B2
公开(公告)日：2010-12-07
申请号：US11888311
申请日：2007-07-31
申请人： Kadthala Ramaya Narendranath , Dmitry Lubomirsky , Xinglong Chen , Sudhir Goodhalekar , Muhammad Rasheed , Tony Kaushal
发明人： Kadthala Ramaya Narendranath , Dmitry Lubomirsky , Xinglong Chen , Sudhir Goodhalekar , Muhammad Rasheed , Tony Kaushal
IPC分类号： H01L21/683
CPC分类号： H01L21/6831 , H01L21/6833 , Y10T279/23
摘要： A method and apparatus for providing a fluid distribution element for an electrostatic chuck that reduces plasma formation and arcing within heat transfer fluid passages. One embodiment comprises a plate and a dielectric component, where the dielectric component is inserted into the plate. The plate is adapted to be positioned within a channel to define a plenum, wherein the dielectric component provides at least a portion of a fluid passage coupled to the plenum. A porous dielectric layer, formed upon the dielectric component, provides at least another portion of a fluid passage coupled to the plenum. In other embodiments, the fluid distribution element comprises various arrangements of components to define a fluid passage that does not provide a line-of-sight path from the support surface for a substrate to a plenum.
摘要翻译：一种用于提供用于静电卡盘的流体分配元件的方法和装置，其减少了传热流体通道内的等离子体形成和电弧。一个实施例包括板和电介质部件，其中介电部件插入板中。板适于被定位在通道内以限定通风室，其中介电部件提供耦合到集气室的流体通道的至少一部分。形成在电介质部件上的多孔介电层提供至少另一部分与气室相连的流体通道。在其他实施例中，流体分配元件包括各种组件的布置，以限定流体通道，该流体通道不提供从用于基底的支撑表面到气室的视线路径。

2. 发明授权

US08108981B2 Method of making an electrostatic chuck with reduced plasma penetration and arcing 有权
标题翻译：制造具有降低的等离子体穿透和电弧放电的静电卡盘的方法
公开(公告)号：US08108981B2
公开(公告)日：2012-02-07
申请号：US11888327
申请日：2007-07-31
申请人： Dmitry Lubomirsky , Kadthala Ramaya Narendranath , Xinglong Chen , Sudhir Gondhalekar , Muhammad Rasheed , Tony Kaushal
发明人： Dmitry Lubomirsky , Kadthala Ramaya Narendranath , Xinglong Chen , Sudhir Gondhalekar , Muhammad Rasheed , Tony Kaushal
IPC分类号： B23P17/00
CPC分类号： H02N13/00 , H01L21/6833 , Y10T29/49117 , Y10T29/49885
摘要： A method of making an electrostatic chuck comprising positioning a plate into a channel in a body to form a plenum and inserting a dielectric component into an opening in the plate, where the dielectric component defines a portion of a passage from the plenum. Thereafter, depositing a dielectric layer covering at least a portion of the body and at least a portion of the plate to form a support surface. The dielectric layer is polished to a specified thickness. In one embodiment, the polishing process forms an opening through the dielectric layer to enable the dielectric component to define a passage between the support surface and the plenum. In another embodiment, at least a portion of the dielectric layer is porous proximate the dielectric component such that the porous dielectric layer and the dielectric component form a passage between the support surface and the plenum. In a further embodiment, a hole is formed through the dielectric layer and the hole in the dielectric layer and the dielectric component form a passage between the support surface and the plenum.
摘要翻译：一种制造静电卡盘的方法，包括将板定位在主体中的通道中以形成气室，并将电介质部件插入板中的开口中，其中介电部件限定了来自气室的通道的一部分。此后，沉积覆盖主体的至少一部分和板的至少一部分以形成支撑表面的电介质层。将电介质层抛光至规定的厚度。在一个实施例中，抛光工艺形成通过介电层的开口，以使得介质部件能够在支撑表面和集气室之间限定通道。在另一个实施例中，电介质层的至少一部分在绝缘元件附近是多孔的，使得多孔介电层和电介质元件在支撑表面和增压室之间形成通道。在另一实施例中，穿过电介质层形成孔，并且电介质层中的孔和电介质元件在支撑表面和气室之间形成通道。

3. 发明申请

US20090034148A1 Method of making an electrostatic chuck with reduced plasma penetration and arcing 有权
标题翻译：制造具有降低的等离子体穿透和电弧放电的静电卡盘的方法
公开(公告)号：US20090034148A1
公开(公告)日：2009-02-05
申请号：US11888327
申请日：2007-07-31
申请人： Dmitry Lubomirsky , Xinglong Chen , Sudhir Gondhalekar , Kadthala Ramaya Narendrnath , Muhammad Rasheed , Tony Kaushal
发明人： Dmitry Lubomirsky , Xinglong Chen , Sudhir Gondhalekar , Kadthala Ramaya Narendrnath , Muhammad Rasheed , Tony Kaushal
IPC分类号： H02N13/00
CPC分类号： H02N13/00 , H01L21/6833 , Y10T29/49117 , Y10T29/49885
摘要： A method of making an electrostatic chuck comprising positioning a plate into a channel in a body to form a plenum and inserting a dielectric component into an opening in the plate, where the dielectric component defines a portion of a passage from the plenum. Thereafter, depositing a dielectric layer covering at least a portion of the body and at least a portion of the plate to form a support surface. The dielectric layer is polished to a specified thickness. In one embodiment, the polishing process forms an opening through the dielectric layer to enable the dielectric component to define a passage between the support surface and the plenum. In another embodiment, at least a portion of the dielectric layer is porous proximate the dielectric component such that the porous dielectric layer and the dielectric component form a passage between the support surface and the plenum. In a further embodiment, a hole is formed through the dielectric layer and the hole in the dielectric layer and the dielectric component form a passage between the support surface and the plenum.
摘要翻译：一种制造静电卡盘的方法，包括将板定位在主体中的通道中以形成气室，并将电介质部件插入板中的开口中，其中介电部件限定了来自气室的通道的一部分。此后，沉积覆盖主体的至少一部分和板的至少一部分以形成支撑表面的电介质层。将电介质层抛光至规定的厚度。在一个实施例中，抛光工艺形成通过介电层的开口，以使得介质部件能够在支撑表面和集气室之间限定通道。在另一个实施例中，电介质层的至少一部分在绝缘元件附近是多孔的，使得多孔介电层和电介质元件在支撑表面和增压室之间形成通道。在另一实施例中，穿过电介质层形成孔，并且电介质层中的孔和电介质元件在支撑表面和气室之间形成通道。

4. 发明申请

US20090034147A1 Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing 有权
标题翻译：用于提供具有降低的等离子体穿透和电弧放电的静电卡盘的方法和装置
公开(公告)号：US20090034147A1
公开(公告)日：2009-02-05
申请号：US11888311
申请日：2007-07-31
申请人： Kadthala Ramaya Narendrnath , Xinglong Chen , Sudhir Gondhalekar , Dmitry Lubomirsky , Muhammad Rasheed , Tony Kaushal
发明人： Kadthala Ramaya Narendrnath , Xinglong Chen , Sudhir Gondhalekar , Dmitry Lubomirsky , Muhammad Rasheed , Tony Kaushal
IPC分类号： H01L21/683 , H01L21/67
CPC分类号： H01L21/6831 , H01L21/6833 , Y10T279/23
摘要： A method and apparatus for providing a fluid distribution element for an electrostatic chuck that reduces plasma formation and arcing within heat transfer fluid passages. One embodiment comprises a plate and a dielectric component, where the dielectric component is inserted into the plate. The plate is adapted to be positioned within a channel to define a plenum, wherein the dielectric component provides at least a portion of a fluid passage coupled to the plenum. A porous dielectric layer, formed upon the dielectric component, provides at least another portion of a fluid passage coupled to the plenum. In other embodiments, the fluid distribution element comprises various arrangements of components to define a fluid passage that does not provide a line-of-sight path from the support surface for a substrate to a plenum.
摘要翻译：一种用于提供用于静电卡盘的流体分配元件的方法和装置，其减少了传热流体通道内的等离子体形成和电弧。一个实施例包括板和电介质部件，其中介电部件插入板中。板适于被定位在通道内以限定通风室，其中介电部件提供耦合到集气室的流体通道的至少一部分。形成在电介质部件上的多孔介电层提供至少另一部分与气室相连的流体通道。在其他实施例中，流体分配元件包括各种组件的布置，以限定流体通道，该流体通道不提供从用于基底的支撑表面到气室的视线路径。

5. 发明授权

US09202736B2 Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing 有权
公开(公告)号：US09202736B2
公开(公告)日：2015-12-01
申请号：US11888341
申请日：2007-07-31
申请人： Kadthala Ramaya Narendrnath , Dmitry Lubomirsky , Xinglong Chen , Sudhir Gondhalekar , Muhammad Rasheed , Tony Kaushal
发明人： Kadthala Ramaya Narendrnath , Dmitry Lubomirsky , Xinglong Chen , Sudhir Gondhalekar , Muhammad Rasheed , Tony Kaushal
IPC分类号： B23P6/00 , H01L21/683 , H02N13/00
CPC分类号： H01L21/6833 , B23P6/00 , H02N13/00
摘要： A method for refurbishing at least a portion of an electrostatic chuck. The method comprises removing a first dielectric component from a fluid distribution element of the electrostatic chuck and replacing the first dielectric component with a second dielectric component.

6. 发明申请

US20090034149A1 Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing 有权
标题翻译：用于对具有降低的等离子体渗透和电弧放电的静电卡盘进行翻新的方法
公开(公告)号：US20090034149A1
公开(公告)日：2009-02-05
申请号：US11888341
申请日：2007-07-31
申请人： Dmitry Lubomirsky , Xinglong Chen , Sudhir Gondhalekar , Kadthala Ramaya Narendrnath , Muhammad Rasheed , Tony Kaushal
发明人： Dmitry Lubomirsky , Xinglong Chen , Sudhir Gondhalekar , Kadthala Ramaya Narendrnath , Muhammad Rasheed , Tony Kaushal
IPC分类号： H01L21/683
CPC分类号： H01L21/6833 , B23P6/00 , H02N13/00
摘要： A method for refurbishing at least a portion of an electrostatic chuck. The method comprises removing a first dielectric component from a fluid distribution element of the electrostatic chuck and replacing the first dielectric component with a second dielectric component.
摘要翻译：一种用于对至少一部分静电卡盘进行翻新的方法。该方法包括从静电卡盘的流体分配元件移除第一介质成分并用第二介电元件代替第一介电元件。

7. 发明授权

US07572647B2 Internal balanced coil for inductively coupled high density plasma processing chamber 有权
标题翻译：用于电感耦合高密度等离子体处理室的内部平衡线圈
公开(公告)号：US07572647B2
公开(公告)日：2009-08-11
申请号：US11670728
申请日：2007-02-02
申请人： Robert Chen , Canfeng Lai , Xinglong Chen , Weiyi Luo , Zhong Qiang Hua , Siqing Lu , Muhammad Rasheed , Qiwei Liang , Dmitry Lubomirsky , Ellie Y. Yieh
发明人： Robert Chen , Canfeng Lai , Xinglong Chen , Weiyi Luo , Zhong Qiang Hua , Siqing Lu , Muhammad Rasheed , Qiwei Liang , Dmitry Lubomirsky , Ellie Y. Yieh
IPC分类号： H01L21/00
CPC分类号： C23C16/507 , H01J37/321 , H01J37/32174 , H01L21/02164 , H01L21/02274 , H01L21/31604 , H01L21/31608
摘要： A coil is provided for use in a semiconductor processing system to generate a plasma with a magnetic field in a chamber. The coil comprises a first coil segment, a second coil segment and an internal balance capacitor. The first coils segment has a first end and a second end. The first end of the coil segment is adapted to connect to a power source. The second coil segment has a first and second end. The second end of the first coil segment is adapted to connect to an external balance capacitor. The internal balance capacitor is connected in series between the second end of the first coil segment and the first end of the second coil segment. The internal balance capacitor and the coil segments are adapted to provide a voltage peak along the first coil segment substantially aligned with a virtual ground along the second coil segment.
摘要翻译：提供一种用于半导体处理系统中的线圈以在腔室中产生具有磁场的等离子体。线圈包括第一线圈段，第二线圈段和内部平衡电容器。第一线圈段具有第一端和第二端。线圈段的第一端适于连接到电源。第二线圈段具有第一和第二端。第一线圈段的第二端适于连接到外部平衡电容器。内部平衡电容器串联连接在第一线圈段的第二端和第二线圈段的第一端之间。内部平衡电容器和线圈段适于沿着第一线圈段提供基本上与第二线圈段的虚拟接地对准的电压峰值。

8. 发明授权

US07789993B2 Internal balanced coil for inductively coupled high density plasma processing chamber 有权
标题翻译：用于电感耦合高密度等离子体处理室的内部平衡线圈
公开(公告)号：US07789993B2
公开(公告)日：2010-09-07
申请号：US11670662
申请日：2007-02-02
申请人： Robert Chen , Canfeng Lai , Xinglong Chen , Weiyi Luo , Zhong Qiang Hua , Siqing Lu , Muhammad Rasheed , Qiwei Liang , Dmitry Lubomirsky , Ellie Y. Yieh
发明人： Robert Chen , Canfeng Lai , Xinglong Chen , Weiyi Luo , Zhong Qiang Hua , Siqing Lu , Muhammad Rasheed , Qiwei Liang , Dmitry Lubomirsky , Ellie Y. Yieh
IPC分类号： C23C16/00 , H01L21/306
CPC分类号： H01J37/321
摘要： A coil is provided for use in a semiconductor processing system to generate a plasma with a magnetic field in a chamber. The coil comprises a first coil segment, a second coil segment and an internal balance capacitor. The first coils segment has a first end and a second end. The first end of the coil segment is adapted to connect to a power source. The second coil segment has a first and second end. The second end of the first coil segment is adapted to connect to an external balance capacitor. The internal balance capacitor is connected in series between the second end of the first coil segment and the first end of the second coil segment. The internal balance capacitor and the coil segments are adapted to provide a voltage peak along the first coil segment substantially aligned with a virtual ground along the second coil segment.
摘要翻译：提供一种用于半导体处理系统中的线圈以在腔室中产生具有磁场的等离子体。线圈包括第一线圈段，第二线圈段和内部平衡电容器。第一线圈段具有第一端和第二端。线圈段的第一端适于连接到电源。第二线圈段具有第一和第二端。第一线圈段的第二端适于连接到外部平衡电容器。内部平衡电容器串联连接在第一线圈段的第二端和第二线圈段的第一端之间。内部平衡电容器和线圈段适于沿着第一线圈段提供基本上与第二线圈段的虚拟接地对准的电压峰值。

9. 发明申请

US20080188090A1 INTERNAL BALANCED COIL FOR INDUCTIVELY COUPLED HIGH DENSITY PLASMA PROCESSING CHAMBER 审中-公开
公开(公告)号：US20080188090A1
公开(公告)日：2008-08-07
申请号：US11670701
申请日：2007-02-02
申请人： Robert Chen , Canfeng Lai , Xinglong Chen , Weiyi Luo , Zhong Qiang Hua , Siqing Lu , Muhammad Rasheed , Qiwei Liang , Dmitry Lubomirsky , Ellie Y. Yieh
发明人： Robert Chen , Canfeng Lai , Xinglong Chen , Weiyi Luo , Zhong Qiang Hua , Siqing Lu , Muhammad Rasheed , Qiwei Liang , Dmitry Lubomirsky , Ellie Y. Yieh
IPC分类号： H01L21/31 , C23C16/452
CPC分类号： C23C16/507 , H01J37/321
摘要： A coil is provided for use in a semiconductor processing system to generate a plasma with a magnetic field in a chamber. The coil comprises a first coil segment, a second coil segment and an internal balance capacitor. The first coils segment has a first end and a second end. The first end of the coil segment is adapted to connect to a power source. The second coil segment has a first and second end. The second end of the first coil segment is adapted to connect to an external balance capacitor. The internal balance capacitor is connected in series between the second end of the first coil segment and the first end of the second coil segment. The internal balance capacitor and the coil segments are adapted to provide a voltage peak along the first coil segment substantially aligned with a virtual ground along the second coil segment.

10. 发明申请

US20080188087A1 INTERNAL BALANCED COIL FOR INDUCTIVELY COUPLED HIGH DENSITY PLASMA PROCESSING CHAMBER 有权
公开(公告)号：US20080188087A1
公开(公告)日：2008-08-07
申请号：US11670728
申请日：2007-02-02
申请人： ROBERT CHEN , Canfeng Lai , Xinglong Chen , Weiyi Luo , Zhong Qiang Hua , Siqing Lu , Muhammad Rasheed , Qiwei Liang , Dmitry Lubomirsky , Ellie Y. Yieh
发明人： ROBERT CHEN , Canfeng Lai , Xinglong Chen , Weiyi Luo , Zhong Qiang Hua , Siqing Lu , Muhammad Rasheed , Qiwei Liang , Dmitry Lubomirsky , Ellie Y. Yieh
IPC分类号： H01L21/31 , H01L21/469
CPC分类号： C23C16/507 , H01J37/321 , H01J37/32174 , H01L21/02164 , H01L21/02274 , H01L21/31604 , H01L21/31608
摘要： A coil is provided for use in a semiconductor processing system to generate a plasma with a magnetic field in a chamber. The coil comprises a first coil segment, a second coil segment and an internal balance capacitor. The first coils segment has a first end and a second end. The first end of the coil segment is adapted to connect to a power source. The second coil segment has a first and second end. The second end of the first coil segment is adapted to connect to an external balance capacitor. The internal balance capacitor is connected in series between the second end of the first coil segment and the first end of the second coil segment. The internal balance capacitor and the coil segments are adapted to provide a voltage peak along the first coil segment substantially aligned with a virtual ground along the second coil segment.

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