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1. 发明专利

JPH11274281A Electrostatic chuck and manufacture thereof 失效
标题翻译：静电卡及其制造
公开(公告)号：JPH11274281A
公开(公告)日：1999-10-08
申请号：JP7978898
申请日：1998-03-26
申请人： Kobe Steel Ltd , Shinko Kobelco Tool Kk , 株式会社神戸製鋼所 , 神鋼コベルコツール株式会社
发明人： KANAMARU MORIYOSHI , SUGIYAMA NARIMASA
IPC分类号： B23Q3/15 , H01L21/68 , H01L21/683 , H02N13/00
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing an electrostatic chuck which is superior in flatness of a chucking face, can stably and accurately vacuum- chuck a semiconductor wafer, etc., and not contaminating the semiconductor wafer with particles, etc. SOLUTION: In a method of manufacturing an electrostatic chuck whereby another surface of an electrostatic chuck part C1 having a plain electrode 3 at least one surface of which is covered with an insulator 3 having a vacuum chucking face 5 at the surface is pressed and bonded through a bond layer 7 to a base board 6 of an apparatus, the electrostatic chuck part C1 is made such that both surfaces are previously machined to a specified thickness, the bond face of the base board 6 is machined into a slightly concave recessed shape and pressed and bonded to the base board 6 of the apparatus.
摘要翻译：要解决的问题：为了提供一种制造具有优良的卡盘平面度的静电卡盘的方法，能够稳定且精确地真空夹持半导体晶片等，并且不会使颗粒等污染半导体晶片。解决方案：在静电卡盘的制造方法中，将具有平面电极3的静电卡盘部C1的其表面的至少一面被表面上具有真空吸附面5的绝缘体3覆盖的另一表面压接并通过接合层7到设备的基板6，静电吸盘部分C1被制成使得两个表面预先被加工到一定厚度，基板6的接合面被加工成稍凹的凹形并被压制结合到设备的基板6上。

2. 发明专利

JPH10279349A ALUMINA CERAMIC EXCELLENT IN PLASMA RESISTANCE 失效
公开(公告)号：JPH10279349A
公开(公告)日：1998-10-20
申请号：JP2348998
申请日：1998-02-04
申请人： KOBE STEEL LTD , SHINKO KOBELCO TOOL KK
发明人： KANAMARU MORIYOSHI , NAGAHAMA MUTSUHISA , HISAMOTO ATSUSHI , NOZAWA TOSHIHISA , SUGIYAMA NARIMASA
IPC分类号： C04B35/10 , H01L21/203 , H01L21/205 , H01L21/302 , H01L21/3065 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To produce an alumina ceramic having an excellent plasma resistance in the production process of a semiconductor, a liq. crystal display, etc., by adopting general sintering method without adopting a special method such as single crystal pulling up method. SOLUTION: This alumina ceramics contains aluminum in a boundary layer containing a silica glass. The alumina ceramic is obtained by sintering an alumina ceramic material containing the silica glass in the boundary layer in nitrogen. In such a case, the aluminum and the nitrogen are incorporated in the boundary layer. Also an average grain size of the alumina crystal is kept to

3. 发明专利

JPH11246263A PRODUCTION OF ALUMINA CERAMICS EXCELLENT IN PLASMA RESISTANCE 失效
公开(公告)号：JPH11246263A
公开(公告)日：1999-09-14
申请号：JP5497698
申请日：1998-03-06
申请人： KOBE STEEL LTD , SHINKO KOBELCO TOOL KK
发明人： KANAMARU MORIYOSHI , HISAMOTO ATSUSHI , NAGAHAMA MUTSUHISA , SUGIYAMA NARIMASA
IPC分类号： C04B35/10
摘要： PROBLEM TO BE SOLVED: To produce alumina ceramics exhibiting superior plasma resistance in a process for producing a semiconductor, a liq. crystal display or the like by a general sintering method without adopting a special method such as a single crystal pulling method. SOLUTION: When alumina powder is compacted and sintered to produce alumina ceramics, sintering is carried out in a nitrogen-contg. inert atmosphere. The partial pressure of nitrogen in the inert atmosphere is desirably >=0.5 atm and the sintering temp. is preferably 1,400-1,900 deg.C.

4. 发明专利

JPH10261697A ELECTROSTATIC CHUCK 失效
公开(公告)号：JPH10261697A
公开(公告)日：1998-09-29
申请号：JP6630997
申请日：1997-03-19
申请人： KOBE STEEL LTD , SHINKO KOBELCO TOOL KK
发明人： IKEDA TSUGUMOTO , KANAMARU MORIYOSHI , HISAMOTO ATSUSHI , SUGIYAMA NARIMASA
IPC分类号： B23Q3/15 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To obtain an electrostatic chuck which is operable even in a high temperature region in which a stabilized attraction force can be ensured without possibility of heavy metal contamination by employing one side of a planar sintered ceramic as an adsorbing face and forming an insulation layer on the other side thereof by spraying an insulating material through an electrode. SOLUTION: Upper face side of a ceramic plate 5 serves as an adsorbing face 7, while an electrode 2 is provided on an opposite side and covered with an insulation layer 8 formed by spraying a material. The electrode 2 is provided with a part 3 for supplying power externally and a matter to be attracted, i.e., a semiconductor wafer 6, can be attracted onto the adsorbing face 7. In order to decrease the distance between the adsorbing face 7 and the electrode 2 while sustaining fluctuation, the ceramic plate 5 is machined to have a specified thickness and one side thereof is employed as an attraction face. Furthermore, after an electrode 2 is formed, it is covered with an insulating layer 8 formed by spraying.

5. 发明专利

JPH10144778A ELECTROSTATIC CHUCK 失效
公开(公告)号：JPH10144778A
公开(公告)日：1998-05-29
申请号：JP30218496
申请日：1996-11-13
申请人： KOBE STEEL LTD , SHINKO KOBELCO TOOL KK , APPLIED MATERIALS JAPAN
发明人： SUGIYAMA NARIMASA , NOZAWA TOSHIHISA , IKEDA TSUGUMOTO , HISAMOTO ATSUSHI , ONISHI TAKASHI , KANAMARU MORIYOSHI , KUMAGAI HIROMI , ARAI IZUMI
IPC分类号： B23Q3/15 , H01L21/68 , H01L21/683 , H02N13/00
摘要： PROBLEM TO BE SOLVED: To provide an electrostatic chuck which is stable in attraction and causes no damage to adhesive agent used for bonding a dielectric plate and a board together. SOLUTION: A disc-like dielectric plate 1 of insulating ceramics and a disc- like board 2 are jointed together, and an electrode 3 is formed between the dielectric plate 1 and the disc-like board 2 to form an electrostatic chuck, wherein one or more bent parts are provided to a joint boundary between the dielectric plate 1 and the board 2 at the peripheral part of the electrostatic chuck and a joint boundary between the opening edge of a gas inlet through-hole 7 provided to the dielectric plate 1 and the board 2, and the open ends S of the joint boundaries are so constituted as to get away from the suction surface 1a of the dielectric plate 1. By this setup, adhesive agent can be protected against damage, and the electrostatic chuck of this constitution is enhanced enough in attraction to a semiconductor wafer 6.

6. 发明专利

JPH09117838A ELECTROSTATIC CHUCK MADE FROM AL2O3 失效
公开(公告)号：JPH09117838A
公开(公告)日：1997-05-06
申请号：JP28093395
申请日：1995-10-27
申请人： SHINKO KOBELCO TOOL KK
发明人： KUDO TAKAHIRO , KANAMARU MORIYOSHI , SUGIYAMA NARIMASA , IKEDA TSUGUMOTO , HISAMOTO ATSUSHI , ONISHI TAKASHI , NOZAWA TOSHIHISA
IPC分类号： B23Q3/15 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a stable attracting force and to prevent the generation of contamination caused by a metallic element even when a remaining attracting force is small and contact is made with a semiconductor wafer by making at least an insulated layer of a highly pure Al2 O3 sintered compact. SOLUTION: A voltage is applied between a substrate 1 and a semiconductor wafer 3 by conducting electricity through an electrode taking-out part 1b to an internal electrode 2 and the semiconductor wafer 3 is attracted to an attracting surface 1a. For the substrate 1, an Al2 O3 sintered compact having purity of 99.9% or higher is used. In order to bury the internal electrode 2, first the Al2 O3 sintered compact is prepared by providing a substrate fist member II molded in a sheet shape as an insulated layer, then the internal electrode 2 is placed and by placing a substrate second member 12 having the electrode taking-out part 1b thereon, these are subjected together to sintering.

7. 发明专利

DE69418578D1 未知
公开(公告)号：DE69418578D1
公开(公告)日：1999-06-24
申请号：DE69418578
申请日：1994-12-20
申请人： KOBE STEEL LTD
发明人： TSUCHIDA TAKEHIRO , TATSUNO TSUNEO , KANAMARU MORIYOSHI
IPC分类号： B23B27/14 , B23P15/28 , C04B35/10 , C04B35/117 , C04B35/80
摘要： A mixed powder containing: 5-30 wt% of SiC whiskers; 3-30 wt% of a sintering auxiliary agent composed of one kind or more of oxides of Mg, Si, Ca, Ti, Zr, Cr, Ni, Y and rare earth elements; and an Al2O3 powder as a base material; or further containing 0.5-40 wt% of one kind or more of compounds composed of one kind or more of transient elements in the groups IVa, Va, and VIa of the periodic table and one kind or more of C, N and B, are compacted and subjected to pressureless-sintering in a nitrogen containing inert gas atmosphere at a temperature between 1500 and 1900 DEG C. With this method, the SiC Whiskers containing Al2O3 based ceramic material, which is densified and has a sufficient strength and toughness, can be formed in a complex shape and a large size.

8. 发明专利

DE60110197D1 未知
公开(公告)号：DE60110197D1
公开(公告)日：2005-05-25
申请号：DE60110197
申请日：2001-08-06
申请人： MATSUSHITA ELECTRIC WORKS LTD , KOBE STEEL LTD , NAKAMURA TAKASHI , KOKUBO TADASHI
发明人： NAWA MASAHIRO , MATSUSHITA TOMIHARU , KANAMARU MORIYOSHI , NAKAMURA TAKASHI
IPC分类号： A61B17/86 , A61F2/00 , A61F2/30 , A61F2/32 , A61F2/34 , A61F2/36 , A61L27/42 , A61L27/10
摘要： An artificial joint made from a zirconia-alumina composite ceramic and having the capability of providing a good joint motion for a long time period with a high degree of reliability is provided. This artificial joint is composed of a first bone member and a second bone member, which is slidably engaged to a part of the first bone member to form a joint portion. At least one of the first and second bone members is made from the zirconia-alumina composite ceramic comprising a matrix phase of zirconia grains and a second phase of alumina grains dispersed in the matrix phase. The zirconia grains contains ceria as a stabilizer in such an amount that the matrix phase is largely composed of tetragonal zirconia. In addition, this composite ceramic has an average grain size of 0.1 to 1 mu m, preferably 0.1 to 0.8 mu m, and particularly preferably 0.1 to 0.65 mu m.

9. 发明专利

DE69015509D1 未知
公开(公告)号：DE69015509D1
公开(公告)日：1995-02-09
申请号：DE69015509
申请日：1990-02-22
申请人： KOBE STEEL LTD
发明人： KANAMARU MORIYOSHI , TATSUNO TSUNEO , OHYAMA NOBORU
IPC分类号： C04B35/111 , C04B35/117 , C04B35/575 , C04B35/80 , C04B35/10 , B23B27/14
摘要： This invention relates to Al2O3 ceramic used for the manufacture of, for example, tools for machining difficult-cutting steel, said ceramic having a nanocomposite structure wherein the particles of a titanium compound having a mean particle diameter of 0.1 mu m or less are dispersed in the particles of Al2O3 having a mean particle diameter of 1 mu m or less and SiC whiskers a re homogeneously dispersed among the Al2O3 particles to increase the strengths and toughness. Said ceramic is produced by homogeneously dispersing SiC whiskers containing 0.3 to 1.5 % by weight of oxygen in a solvent, homogeneously mixing the dispersion with a powdery raw material for Al2O3 including a titanium compound, and molding and sintering the mixture.

10. 发明专利

DE60110197T2 未知
公开(公告)号：DE60110197T2
公开(公告)日：2006-03-09
申请号：DE60110197
申请日：2001-08-06
申请人： MATSUSHITA ELECTRIC WORKS LTD , KOBE STEEL LTD , NAKAMURA TAKASHI , KOKUBO TADASHI
发明人： NAWA MASAHIRO , MATSUSHITA TOMIHARU , KANAMARU MORIYOSHI , NAKAMURA TAKASHI
IPC分类号： A61B17/86 , A61F2/00 , A61F2/30 , A61F2/32 , A61F2/34 , A61F2/36 , A61L27/10 , A61L27/42
摘要： An artificial joint made from a zirconia-alumina composite ceramic and having the capability of providing a good joint motion for a long time period with a high degree of reliability is provided. This artificial joint is composed of a first bone member and a second bone member, which is slidably engaged to a part of the first bone member to form a joint portion. At least one of the first and second bone members is made from the zirconia-alumina composite ceramic comprising a matrix phase of zirconia grains and a second phase of alumina grains dispersed in the matrix phase. The zirconia grains contains ceria as a stabilizer in such an amount that the matrix phase is largely composed of tetragonal zirconia. In addition, this composite ceramic has an average grain size of 0.1 to 1 mu m, preferably 0.1 to 0.8 mu m, and particularly preferably 0.1 to 0.65 mu m.

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