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    • 6. 发明授权
    • Photosensitive resin composition and semiconductor apparatus using it
    • 感光树脂组合物和使用它的半导体装置
    • US5385808A
    • 1995-01-31
    • US140893
    • 1993-10-25
    • Akira TokohNobuyuki SashidaEtsu TakeuchiTakashi Hirano
    • Akira TokohNobuyuki SashidaEtsu TakeuchiTakashi Hirano
    • C08F283/04C08G77/458C08L83/10G03F7/075G03C1/73
    • G03F7/0757C08F283/04C08G77/458C08L83/10
    • The present invention provides a photosensitive resin composition which comprises as essential components:(A) a polyamic acid having a recurring unit represented by the following formula [I]: ##STR1## wherein 0.5-50 mol % of R.sub.1 consists of a silicone diamine residue represented by the following formula [II]: ##STR2## wherein n represents an integer of 1-50, and the remainder of 50-99.5 mol % of R.sub.1 consists of an organic group selected from the group consisting of an aromatic group, an aliphatic group, an alicyclic group, and a heterocyclic group, and R.sub.2 consists of an organic group selected from the group consisting of an aromatic group, an aliphatic group, an alicyclic group, a heterocyclic group, and a silicone group, and m represents 1 or 2,(B) an amide compound having carbon-carbon double bond, and(C) a photosensitizer.The present invention further provides a semiconductor apparatus in which the above composition is used.
    • 本发明提供一种感光性树脂组合物,其含有作为必要成分的(A)具有下述式[I]表示的重复单元的聚酰胺酸:其中,0.5〜50摩尔%的R 1由 由下式[II]表示的硅氧烷二胺残基:其中n表示1-50的整数,其余的50-99.5摩尔%的R1由选自以下的有机基团组成: 芳香族基团,脂肪族基团,脂环族基和杂环基,R2由选自芳香族基团,脂肪族基团,脂环族基团,杂环基团和硅氧烷基团的有机基团组成 ,m表示1或2,(B)具有碳 - 碳双键的酰胺化合物,和(C)光敏剂。 本发明还提供一种使用上述组合物的半导体装置。