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1. 发明授权

US4890294A Plasma apparatus 失效
标题翻译：等离子体仪器
公开(公告)号：US4890294A
公开(公告)日：1989-12-26
申请号：US147726
申请日：1988-01-25
申请人： Junichi Nishimae , Kenji Yoshizawa , Masakazu Taki , Yoshihiro Ueda , Tadashi Yanagi , Akihiko Iwata
发明人： Junichi Nishimae , Kenji Yoshizawa , Masakazu Taki , Yoshihiro Ueda , Tadashi Yanagi , Akihiko Iwata
IPC分类号： H01J37/32 , H01S3/03 , H01S3/0975 , H05H1/46
CPC分类号： H01J37/32192 , H01J37/32339 , H01S3/0315 , H01S3/0975 , H05H1/46
摘要： The invention relates to a plasma apparatus where plasma is generated utilizing microwave discharge and laser excitation is performed and plasma processing is performed. More specifically, in a plasma apparatus where a microwave from a microwave oscillator is transmitted through a microwave transmission path to a microwave circuit, and plasma is generated by a microwave discharge within the microwave circuit, a plasma generating medium for generating the plasma is filled in a space formed between a conductor wall constituting a part of the microwave circuit and a dielectric installed opposite to the conductor wall, and the microwave circuit forms microwave mode having an electric field component orthogonal to the boundary between the dielectric and the plasma.
摘要翻译：本发明涉及一种使用微波放电产生等离子体并进行激光激发并进行等离子体处理的等离子体装置。更具体地，在微波振荡器的微波通过微波传输路径传输到微波电路的等离子体装置中，并且通过微波电路内的微波放电产生等离子体，用于产生等离子体的等离子体产生介质被填充在构成微波电路的一部分的导体壁与与导体壁相对设置的电介质之间形成的空间，微波电路形成具有与电介质和等离子体之间的边界正交的电场分量的微波模式。

2. 发明授权

US5144199A Microwave discharge light source device 失效
标题翻译：微波放电光源设备
公开(公告)号：US5144199A
公开(公告)日：1992-09-01
申请号：US637636
申请日：1991-01-04
申请人： Masakazu Taki , Kenji Yoshizawa , Junichi Nishimae
发明人： Masakazu Taki , Kenji Yoshizawa , Junichi Nishimae
IPC分类号： C23C16/48 , H01J65/04
CPC分类号： H01J65/044 , C23C16/482
摘要： A microwave discharge light source device in which one side of a discharge space in which a plasma emission takes place is defined by a transparent dielectric member. A transparent microwave reflecting member is disposed in a position such as to face the discharge space through the dielectric member. A microwave having an electric field component in the direction of thickness of the dielectric member is introduced into the dielectric member through the coupling at an end surface of the dielectric member so that a microwave electric field is formed in the discharge space, and so that the plasma emission medium emits light by electric discharge. The light thus emitted is extracted through the transparent microwave reflecting member.
摘要翻译：其中发生等离子体发射的放电空间的一侧由透明电介质构件限定的微波放电光源装置。透明微波反射部件设置在通过电介质部件与放电空间相对的位置。具有电介质部件厚度方向的电场成分的微波通过电介质部件的端面的耦合引入电介质部件，使得在放电空间内形成微波电场，等离子体发射介质通过放电发光。通过透明微波反射部件提取发出的光。

3. 发明授权

US5048048A Gas laser device 失效
标题翻译：气体激光装置
公开(公告)号：US5048048A
公开(公告)日：1991-09-10
申请号：US564517
申请日：1990-08-09
申请人： Junichi Nishimae , Kenji Yoshizawa , Masakazu Taki
发明人： Junichi Nishimae , Kenji Yoshizawa , Masakazu Taki
IPC分类号： H01S3/03 , H01S3/08 , H01S3/0975 , H01S3/23
CPC分类号： H01S3/03 , H01S3/0315 , H01S3/0975 , H01S3/08068 , H01S3/0818
摘要： A gas laser device comprises a discharge space in which a laser gas is excited by electric discharge, the discharge space being in the form of a slab whose section perpendicular to a laser optical axis has a longer side and a shorter side; and laser resonator mirrors disposed at both ends of the discharge space, respectively. The laser resonant mirrors constitute a negative branch unstable resonator in a first dimension of longer side of the discharge space section, and a laser beam is obtained at one end of the longer side of the discharge space section.

4. 发明授权

US5359177A Microwave plasma apparatus for generating a uniform plasma 失效
标题翻译：用于产生均匀等离子体的微波等离子体装置
公开(公告)号：US5359177A
公开(公告)日：1994-10-25
申请号：US778569
申请日：1991-10-17
申请人： Masakazu Taki , Kenji Yoshizawa , Junichi Nishimae , Keisuke Namba
发明人： Masakazu Taki , Kenji Yoshizawa , Junichi Nishimae , Keisuke Namba
IPC分类号： H01J37/32 , B23K9/00 , H05H1/46
CPC分类号： H01J37/32229 , H01J37/32192
摘要： A microwave plasma apparatus comprises a discharge chamber for generating a plasma. A dielectric plate is placed on a surface of the discharge chamber. A microwave circuit surrounds the longitudinal side surface of the dielectric plate and the microwave circuit is adapted to couple the signal propagating therein to the dielectric plate, whereby a microwave electric field is formed within the discharge chamber to generate a plasma therein. The microwave circuit may comprise a rectangular waveguide, and a part of a wall surface of the rectangular waveguide is utilized as a terminal portion.
摘要翻译：微波等离子体装置包括用于产生等离子体的放电室。电介质板放置在放电室的表面上。微波电路围绕电介质板的纵向侧表面，并且微波电路适于将在其中传播的信号耦合到电介质板，由此在放电室内形成微波电场以在其中产生等离子体。微波电路可以包括矩形波导，矩形波导的壁表面的一部分用作端子部分。

5. 发明授权

US4988922A Power supply for microwave discharge light source 失效
标题翻译：微波放电光源供电
公开(公告)号：US4988922A
公开(公告)日：1991-01-29
申请号：US329786
申请日：1989-03-17
申请人： Isao Shoda , Hitoshi Kodama , Kazuo Magome , Akihiko Iwata , Kenji Yoshizawa , Masakazu Taki
发明人： Isao Shoda , Hitoshi Kodama , Kazuo Magome , Akihiko Iwata , Kenji Yoshizawa , Masakazu Taki
IPC分类号： H01J65/04 , H05B41/24 , H05B41/282 , H05B41/392
CPC分类号： H01J65/044 , H05B41/24
摘要： A power supply circuit for a magnetron adapted to supply microwave energy to an electrodeless discharge bulb is disclosed. The circuit comprises a rectifier coupled across a commercial AC voltage source, a filter for smoothing the output of the rectifier, an inverter for converting the DC voltage supplied from the filter into a high frequency AC voltage, a step-up transformer for stepping up the high frequency AC voltage outputted from the inverter, and a rectifier which rectifies the high voltage AC output of the transformer into a unidirectional voltage which is supplied to the magnetron. The inverter switching is controlled by a pulse width modulation control circuit to maintain the magnetron output power at a predetermined level. According to one aspect, an inductance is provided in the circuit which supresses high frequency components in the currents flowing through the windings of the transformer; according to another aspect, the inverter switching frequency (expressed in kHz) is set at a value not less than 1500/D, wherein D represents the diameter of the electrodeless bulb expressed in millimeters; according to still another aspect, the peak to the mean value ratio of the magnetron current is limited under 3.75 inclusive.
摘要翻译： PCT No.PCT / JP88 / 00753 Sec。 371日期：1989年3月17日 102（e）日期1989年3月17日PCT Filed 1988年7月27日PCT公开号出版物WO89 / 01234 日期：1989年2月9日。公开了一种用于向无电极放电灯提供微波能量的磁控管的电源电路。该电路包括跨越商用交流电压源耦合的整流器，用于平滑整流器输出的滤波器，将从滤波器提供的直流电压转换成高频交流电压的逆变器，用于加速从逆变器输出的高频交流电压，以及将变压器的高压交流输出整流为提供给磁控管的单向电压的整流器。逆变器切换由脉宽调制控制电路控制，以将磁控管输出功率维持在预定水平。根据一个方面，在电路中提供电感，其抑制流过变压器绕组的电流中的高频分量; 根据另一方面，逆变器开关频率（以kHz表示）设定为不小于1500 / D的值，其中D表示以毫米表示的无电极灯泡的直径; 根据另一方面，磁控管电流的平均值比的峰值被限制在3.75以下。

6. 发明授权

US5115168A Power supply for microwave discharge light source 失效
标题翻译：用于微波放电光源的电源
公开(公告)号：US5115168A
公开(公告)日：1992-05-19
申请号：US616244
申请日：1990-11-20
申请人： Isao Shoda , Hitoshi Kodama , Kazuo Magome , Akihiko Iwata , Kenji Yoshizawa , Masakazu Taki
发明人： Isao Shoda , Hitoshi Kodama , Kazuo Magome , Akihiko Iwata , Kenji Yoshizawa , Masakazu Taki
IPC分类号： H01J65/04 , H05B41/24 , H05B41/282 , H05B41/392
CPC分类号： H01J65/044 , H05B41/24
摘要： A power supply circuit for a magnetron adapted to supply microwave energy to an electrodeless discharge bulb is disclosed. The circuit includes a rectifier coupled across a commerical AC voltage source, a filter for smoothing the output of the rectifier, an inverter for converting the DC voltage supplied from the filter into a high frequency AC voltage, a step-up transformer for stepping up the high frequency AC voltage outputted from the inverter, and a rectifier which rectifies the high voltage AC output of the transformer into a unidirectional voltage which is supplied to the magnetron. The inverter switching is controlled by a pulse width modulation control circuit to maintain the magnetron output power at a predetermined level. According to one aspect, an inductance is provided in the circuit which supresses high frquency components in the current flowing through the windings of the transformer; according to another aspect, the inverter switching frequency (expressed in kHz) is set at a value not less than 1500/D, wherein D represents the diameter of the electrodeless bulb expressed in millimeters; according to still another aspect, the peak to the mean value ratio of the magnetron current is limited under 3.75 inclusive.

7. 发明授权

US5479428A Laser apparatus 失效
标题翻译：激光设备
公开(公告)号：US5479428A
公开(公告)日：1995-12-26
申请号：US339234
申请日：1994-11-10
申请人： Masaki Kuzumoto , Yushi Takenaka , Junichi Nishimae , Kenji Yoshizawa , Takashi Yamamoto
发明人： Masaki Kuzumoto , Yushi Takenaka , Junichi Nishimae , Kenji Yoshizawa , Takashi Yamamoto
IPC分类号： H01S3/03 , H01S3/038 , H01S3/041 , H01S3/06 , H01S3/07 , H01S3/0975 , H01S3/16
CPC分类号： H01S3/0975 , H01S3/0315 , H01S3/041 , H01S3/0602 , H01S3/07 , H01S3/076
摘要： According to the present invention there is provided a laser apparatus capable of efficient oscillation with an excitation power source with comparatively low frequency, wherein discharge is obliquely generated within the rectangular section of a discharge space. There is also provided a laser apparatus with a pair of preliminary discharge excitation electrodes which can readily initiate discharge. There is further provided a laser apparatus capable of efficient oscillation with an excitation power source with comparatively low frequency, wherein provided is a pair of discharge excitation electrodes located in the major side direction of discharge space whose length is more than three times as long as that of minor side direction thereof. There is further provided a laser apparatus with a pair of discharge excitation electrodes whose dimension is smaller than that of a pair of dielectric plates, which apparatus can prevent undesirable discharge. There is also provided a laser apparatus with more than three discharge spaces at least one of which is given a lower electric field having the apparatus oscillate efficiently. There is further provided a laser apparatus with an improved oscillation efficiency wherein furnished are dielectric double pipes creating a substantially large discharge space.
摘要翻译：根据本发明，提供一种能够以较低频率的激励电源进行有效振荡的激光装置，其特征在于，在放电空间的矩形截面内倾斜地产生放电。还提供了具有一对可以容易地启动放电的初步放电激励电极的激光装置。另外，还提供一种能够以较低频率的激励电源进行有效振荡的激光装置，其特征在于，设置有放电空间的长边方向的长度大于所述放电空间长度的三倍以上的一对放电激励电极的小方向。还提供一种具有一对放电激励电极的激光装置，其尺寸小于一对电介质板的尺寸，该装置可以防止不期望的放电。还提供了具有三个以上放电空间的激光装置，其中至少一个放电空间被给予具有该装置有效振荡的较低电场。还提供了具有改善的振荡效率的激光装置，其中所述的激光装置被设置为产生基本上大的放电空间的电介质双管。

8. 发明授权

US5506858A Laser system with transverse mode selecting output coupler 失效
标题翻译：激光系统，横向选择输出耦合器
公开(公告)号：US5506858A
公开(公告)日：1996-04-09
申请号：US121347
申请日：1993-09-15
申请人： Yushi Takenaka , Masaki Kuzumoto , Kenji Yoshizawa , Takashi Yamamoto , Masato Matsubara , Junichi Nishimae , Koji Yasui , Akihiro Otani
发明人： Yushi Takenaka , Masaki Kuzumoto , Kenji Yoshizawa , Takashi Yamamoto , Masato Matsubara , Junichi Nishimae , Koji Yasui , Akihiro Otani
IPC分类号： B23K26/06 , H01S3/036 , H01S3/06 , H01S3/07 , H01S3/08 , H01S3/0975 , H01S3/098 , H01S3/13 , H01S3/23 , H01S3/139
CPC分类号： B23K26/0608 , B23K26/06 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0665 , B23K26/123 , H01S3/08059 , H01S3/036 , H01S3/076 , H01S3/08068 , H01S3/0975 , H01S3/2366
摘要： A laser system wherein, in order that a high-output and high-quality single mode of a cross sectional area larger than the beam diameter determined by the construction of a resonator can be obtained stably, although this has heretofore been impossible, there is used a coupling mirror provided with a partial reflection film and an antireflecting film, a laser beam mode is selected using the partial reflection film, a phase difference between laser beam portions caused by a difference in construction between the partial reflection film and the antireflecting film is compensated using a phase difference compensating apparatus, and there is formed an aperture whose diameter is set to a value of not larger than four times the diameter of the partial reflection film.
摘要翻译：一种激光系统，其中为了稳定地获得横截面积大于通过谐振器结构确定的光束直径的高输出和高质量的单一模式，尽管迄今为止已经不可能使用设置有部分反射膜和抗反射膜的耦合镜，使用部分反射膜选择激光束模式，补偿由部分反射膜和抗反射膜之间的结构差引起的激光束部分之间的相位差使用相位差补偿装置，形成直径设定为不大于部分反射膜直径的4倍的孔径。

9. 发明授权

US5392309A Laser apparatus includes an unstable resonator and a shading means 失效
标题翻译：激光装置包括不稳定谐振器和遮蔽装置
公开(公告)号：US5392309A
公开(公告)日：1995-02-21
申请号：US120754
申请日：1993-09-15
申请人： Junichi Nishimae , Kenji Yoshizawa , Kenji Kumamoto
发明人： Junichi Nishimae , Kenji Yoshizawa , Kenji Kumamoto
IPC分类号： H01S3/08
CPC分类号： H01S3/08081
摘要： A laser apparatus includes an unstable resonator having a total reflection mirror and a take-out mirror, and further includes shading means for shading a disturbed phase portion of a laser beam so as to derive exclusively a light having a uniform phase by shading the disturbed phase portion of the beam emitted from the resonator or the beam in the resonator.
摘要翻译：激光装置包括具有全反射镜和取出镜的不稳定谐振器，并且还包括用于遮蔽激光束的干涉相位部分的遮蔽装置，以便仅通过遮蔽干扰相位而导出具有均匀相位的光从谐振器或谐振器中的光束发射的光束的部分。

10. 发明授权

US5586139A Laser system 失效
标题翻译：激光系统
公开(公告)号：US5586139A
公开(公告)日：1996-12-17
申请号：US525198
申请日：1995-09-08
申请人： Yushi Takenaka , Masaki Kuzumoto , Kenji Yoshizawa , Takashi Yamamoto , Masato Matsubara , Junichi Nishimae , Koji Yasui , Akihiro Otani
发明人： Yushi Takenaka , Masaki Kuzumoto , Kenji Yoshizawa , Takashi Yamamoto , Masato Matsubara , Junichi Nishimae , Koji Yasui , Akihiro Otani
IPC分类号： B23K26/06 , H01S3/036 , H01S3/06 , H01S3/07 , H01S3/08 , H01S3/0975 , H01S3/098 , H01S3/13 , H01S3/23 , H01S3/139
CPC分类号： B23K26/0608 , B23K26/06 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0665 , B23K26/123 , H01S3/08059 , H01S3/036 , H01S3/076 , H01S3/08068 , H01S3/0975 , H01S3/2366
摘要： A laser system wherein, in order that a high-output and high-quality single mode of a cross sectional area larger than the beam diameter determined by the construction of a resonator can be obtained stably, although this has heretofore been impossible, there is used a coupling mirror provided with a partial reflection film and an antireflecting film, a laser beam mode is selected using the partial reflection film, a phase difference between laser beam portions caused by a difference in construction between the partial reflection film and the antireflecting film is compensated using a phase difference compensating means, and there is formed an aperture whose diameter is set to a value of not larger than four times the diameter of the partial reflection film.
摘要翻译：一种激光系统，其中为了稳定地获得横截面积大于通过谐振器结构确定的光束直径的高输出和高质量的单一模式，尽管迄今为止已经不可能使用设置有部分反射膜和抗反射膜的耦合镜，使用部分反射膜选择激光束模式，补偿由部分反射膜和抗反射膜之间的结构差引起的激光束部分之间的相位差使用相位差补偿装置，并且形成直径设定为不大于部分反射膜的直径的四倍的孔径。

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