会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Semiconductor integrated circuit device including a dielectric breakdown
prevention circuit
    • 包括绝缘击穿防止电路的半导体集成电路装置
    • US5268587A
    • 1993-12-07
    • US786750
    • 1991-11-01
    • Jun MurataHideyuki MiyazawaKyoichiro AsayamaAkihiro TambaSeigou YukutakeHiroyuki MiyazawaYutaka KobayashiTomoyuki Someya
    • Jun MurataHideyuki MiyazawaKyoichiro AsayamaAkihiro TambaSeigou YukutakeHiroyuki MiyazawaYutaka KobayashiTomoyuki Someya
    • H01L27/105H01L27/108H01L29/06H01L29/78
    • H01L27/10805H01L27/105
    • A semiconductor integrated circuit device includes a dielectric breakdown prevention circuit coupled to an external terminal for protecting an input stage circuit. The prevention circuit has bipolar transistors and complementary MISFETs including a first MISFET of a first conductivity type and a second MISFET of a second conductivity type. A first semiconductor region of the first conductivity type is formed by the same layer as a well region in which the second MISFET is formed. A second semiconductor region of the second conductivity type is formed in said first semiconductor region by the same layer as source and drain regions of the second MISFET. These first and second semiconductor regions form a first PN junction diode. The external terminal is electrically coupled to one end portion of said second semiconductor region. A high impurity conductivity type buried third semiconductor region underlies the said second semiconductor region, and is formed by the same layer as a region isolating the bipolar transistors. This third region is disposed at the bottom surface of said first semiconductor region. A fourth semiconductor region of the second conductivity type is also formed in said first semiconductor region by the same layer used for collector contact regions of the bipolar transistors, and is connected with another end portion of said second semiconductor region, in contact with the third semiconductor region. The fourth semiconductor region is coupled to the input stage circuit, and the third and fourth semiconductor regions form a second PN junction diode.
    • 半导体集成电路器件包括耦合到外部端子的绝缘击穿防止电路,用于保护输入级电路。 防止电路具有双极晶体管和互补MISFET,其包括第一导电类型的第一MISFET和第二导电类型的第二MISFET。 第一导电类型的第一半导体区域由与其中形成第二MISFET的阱区相同的层形成。 第二导电类型的第二半导体区域通过与第二MISFET的源极和漏极区域相同的层在所述第一半导体区域中形成。 这些第一和第二半导体区域形成第一PN结二极管。 外部端子电耦合到所述第二半导体区域的一个端部。 高杂质导电型掩埋的第三半导体区域位于所述第二半导体区域的下方,并且由与隔离双极晶体管的区域相同的层形成。 该第三区域设置在所述第一半导体区域的底表面。 第二导电类型的第四半导体区域也通过与用于双极晶体管的集电极接触区域的相同的层形成在所述第一半导体区域中,并且与所述第二半导体区域的与第三半导体接触的另一个端部连接 地区。 第四半导体区域耦合到输入级电路,并且第三和第四半导体区域形成第二PN结二极管。
    • 3. 发明授权
    • Manufacturing method of semiconductor device
    • 半导体器件的制造方法
    • US08445352B2
    • 2013-05-21
    • US12268538
    • 2008-11-11
    • Natsuki YokoyamaTomoyuki Someya
    • Natsuki YokoyamaTomoyuki Someya
    • H01L21/331
    • H01L21/02378H01L29/1608H01L29/41766H01L29/45H01L29/513H01L29/6606H01L29/66068H01L29/7813H01L29/7828H01L29/8611H01L29/872
    • A problem in the conventional technique is that metal contamination on a silicon carbide surface is not sufficiently removed in a manufacturing method of a semiconductor device using a monocrystalline silicon carbide substrate. Accordingly, there is a high possibility that the initial characteristics of a manufactured silicon carbide semiconductor device are deteriorated and the yield rate is decreased. Further, it is conceivable that the metal contamination has an adverse affect even on the long-term reliability of a semiconductor device. In a manufacturing method of a semiconductor device using a monocrystalline silicon carbide substrate, there is applied a metal contamination removal process, on a silicon carbide surface, including a step of oxidizing the silicon carbide surface and a step of removing a film primarily including silicon dioxide formed on the silicon carbide surface by the step.
    • 在常规技术中的问题在于,在使用单晶碳化硅基板的半导体器件的制造方法中,在碳化硅表面上的金属污染没有被充分地去除。 因此,制造的碳化硅半导体器件的初始特性可能会降低,成品率降低。 此外,可以想到,即使对于半导体器件的长期可靠性,金属污染也具有不利影响。 在使用单晶硅碳化物衬底的半导体器件的制造方法中,在碳化硅表面上应用金属污染去除工艺,包括氧化碳化硅表面的步骤和去除主要包括二氧化硅的膜的步骤 通过该步骤在碳化硅表面上形成。