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1. 发明授权

US06710352B2 Charged particle measuring apparatus 失效
标题翻译：带电粒子测量仪
公开(公告)号：US06710352B2
公开(公告)日：2004-03-23
申请号：US10330701
申请日：2002-12-27
申请人： Jun Kikuchi , Haruhisa Matsumoto , Hideki Koshiishi , Takashi Nozaki , Shigeru Takehisa
发明人： Jun Kikuchi , Haruhisa Matsumoto , Hideki Koshiishi , Takashi Nozaki , Shigeru Takehisa
IPC分类号： H01J37304
CPC分类号： G01T1/38 , G01T1/242 , G01T1/247
摘要： A charged particle measuring apparatus discriminates the types of charged particles accurately and the energy precisely, measures high-energy charged particles precisely, and detects a failure of the apparatus to continue measurement in a mode corresponding to the failure. Outputs from first and second detectors are used as first and second addresses, respectively. The second detector includes a plurality of detectors. The output from a third detector is used as information about whether or not certain charged particles penetrate the second detector. The loss energy characteristics of charged particles to be measured are expressed in the first and second addresses. The number of times the charged particles are measured for loss energy are counted with respect to the addresses. When the series of detectors constituting the first, second, and third detectors suffers a failure, a measurement mode excluding any failed detector is employed to continue measurement.
摘要翻译：带电粒子测量装置精确地识别带电粒子的类型并精确地识别能量，精确地测量高能量带电粒子，并且以对应于故障的模式检测装置继续测量的故障。来自第一和第二检测器的输出分别用作第一和第二地址。第二检测器包括多个检测器。使用来自第三检测器的输出作为关于某些带电粒子是否穿透第二检测器的信息。要测量的带电粒子的损耗能量特性在第一和第二地址中表示。相对于地址对带电粒子的损耗能量的测量次数进行计数。当构成第一，第二和第三检测器的一系列检测器发生故障时，采用不包括任何故障检测器的测量模式来继续测量。

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