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    • 9. 发明授权
    • Nonvolatile semiconductor memory device and method of manufacturing the same
    • 非易失性半导体存储器件及其制造方法
    • US08546872B2
    • 2013-10-01
    • US13072366
    • 2011-03-25
    • Kiwamu SakumaAtsuhiro Kinoshita
    • Kiwamu SakumaAtsuhiro Kinoshita
    • H01L29/792
    • H01L29/792H01L27/11524H01L27/11551H01L29/7881
    • According to one embodiment, a memory device includes a semiconductor substrate, first, second, third and fourth fin-type stacked layer structures, each having memory strings stacked in a first direction perpendicular to a surface of the semiconductor substrate, and each extending to a second direction parallel to the surface of the semiconductor substrate, a first part connected to first ends in the second direction of the first and second fin-type stacked layer structures each other, a second part connected to first ends in the second direction of the third and fourth fin-type stacked layer structures each other, a third part connected to second ends in the second direction of the first and third fin-type stacked layer structures each other, and a fourth part connected to second ends in the second direction of the second and fourth fin-type stacked layer structures each other.
    • 根据一个实施例,存储器件包括半导体衬底,第一,第二,第三和第四鳍式堆叠层结构,每个具有堆叠在垂直于半导体衬底的表面的第一方向上的存储串,并且每个延伸到 第二方向平行于半导体衬底的表面,第一部分连接到第一和第二鳍式堆叠层的第二方向上的第一端彼此结合,第二部分连接到第三端的第二端 第四鳍状堆叠层结构,第三部分与第一和第三鳍状堆叠层的第二方向的第二端部连接,第四部分与第二鳍片状堆叠层的第二方向的第二端部连接, 第二和第四鳍式堆叠层结构。