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    • 1. 发明授权
    • Method for the realization of a crossbar array of crossed conductive or semi-conductive access lines
    • 用于实现交叉导电或半导电接入线的交叉开关阵列的方法
    • US08685819B2
    • 2014-04-01
    • US13154726
    • 2011-06-07
    • Julien BuckleyKarim AissouThierry BaronGabriel Molas
    • Julien BuckleyKarim AissouThierry BaronGabriel Molas
    • H01L21/8234
    • H01L21/0331H01L21/0337H01L27/101
    • A method for making a crossbar array of crossed conductive or semi-conductive access lines on a substrate, the crossbar array including on a crossbar array insulator, in a plane parallel to the substrate, a first level of lines including a plurality of first lines parallel with each other made of a conductive or semi-conductive material; on the first level of lines, a second level of lines including a plurality of second lines parallel with each other made of a conductive or semi-conductive material, the second lines being substantially perpendicular to the first lines. The method includes forming, on the substrate, a first cavity of substantially rectangular shape; forming a second cavity of substantially rectangular shape superimposed to the first cavity, the first and second cavities intersecting each other perpendicularly so as to form a resultant cavity.
    • 一种用于在衬底上制造交叉导电或半导电接入线的交叉开关阵列的方法,所述交叉开关阵列包括在与所述衬底平行的平面中的交叉开关阵列绝缘体上,所述第一电平线包括多条第一线平行 彼此由导电或半导体材料制成; 在第一级线上,包括由导电或半导电材料制成的彼此平行的多条第二线的第二级线,第二线基本上垂直于第一线。 该方法包括在基板上形成大致矩形形状的第一空腔; 形成叠加到第一腔体上的基本矩形形状的第二腔体,第一和第二腔体垂直相交,从而形成合成腔体。