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    • 9. 发明申请
    • SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • 半导体器件制造方法和基板处理装置
    • US20120073500A1
    • 2012-03-29
    • US13311760
    • 2011-12-06
    • Taketoshi SatoMasayuki Tsuneda
    • Taketoshi SatoMasayuki Tsuneda
    • H01L21/00C23C16/52C23C16/455
    • C23C16/34C23C16/45534C23C16/45546C23C16/45557C23C16/45561H01L21/28562H01L21/76843
    • Provided is a semiconductor device manufacturing method and a substrate processing apparatus. The method comprise: a first process of forming a film containing a predetermined element on a substrate by supplying a source gas containing the predetermined element to a substrate processing chamber in which the substrate is accommodated; a second process of removing the source gas remaining in the substrate processing chamber by supplying an inert gas to the substrate processing chamber; a third process of modifying the predetermined element-containing film formed in the first process by supplying a modification gas that reacts with the predetermined element to the substrate processing chamber; a fourth process of removing the modification gas remaining in the substrate processing chamber by supplying an inert gas to the substrate processing chamber; and a filling process of filling an inert gas in a gas tank connected to the substrate processing chamber.
    • 提供一种半导体器件制造方法和基板处理装置。 该方法包括:通过将含有预定元素的源气体供应到其中容纳基板的基板处理室来在基板上形成含有预定元素的膜的第一工艺; 通过向基板处理室供给惰性气体来除去残留在基板处理室中的原料气体的第二工序; 通过将与所述预定元素反应的改性气体供给到所述基板处理室来修饰在所述第一工序中形成的所述规定的含有成膜的膜的第三工序; 通过向所述基板处理室供给惰性气体来除去残留在所述基板处理室中的所述改性气体的第四工序; 以及在连接到基板处理室的气罐中填充惰性气体的填充过程。
    • 10. 发明授权
    • Semiconductor device manufacturing method and substrate processing apparatus
    • 半导体装置的制造方法和基板处理装置
    • US08093158B2
    • 2012-01-10
    • US12750105
    • 2010-03-30
    • Taketoshi SatoMasayuki Tsuneda
    • Taketoshi SatoMasayuki Tsuneda
    • H01L21/30
    • C23C16/34C23C16/45534C23C16/45546C23C16/45557C23C16/45561H01L21/28562H01L21/76843
    • Provided are a semiconductor device manufacturing method and a substrate processing apparatus. The method comprise: a first process of forming a film containing a predetermined element on a substrate by supplying a source gas containing the predetermined element to a substrate processing chamber in which the substrate is accommodated; a second process of removing the source gas remaining in the substrate processing chamber by supplying an inert gas to the substrate processing chamber; a third process of modifying the predetermined element-containing film formed in the first process by supplying a modification gas that reacts with the predetermined element to the substrate processing chamber; a fourth process of removing the modification gas remaining in the substrate processing chamber by supplying an inert gas to the substrate processing chamber; and a filling process of filling an inert gas in a gas tank connected to the substrate processing chamber.
    • 提供半导体器件制造方法和基板处理装置。 该方法包括:通过将含有预定元素的源气体供应到其中容纳基板的基板处理室来在基板上形成含有预定元素的膜的第一工艺; 通过向基板处理室供给惰性气体来除去残留在基板处理室中的原料气体的第二工序; 通过将与所述预定元素反应的改性气体供给到所述基板处理室来修饰在所述第一工序中形成的所述规定的含有成膜的膜的第三工序; 通过向所述基板处理室供给惰性气体来除去残留在所述基板处理室中的所述改性气体的第四工序; 以及在连接到基板处理室的气罐中填充惰性气体的填充过程。