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    • 4. 发明授权
    • Method of operating transistors and structures thereof for improved reliability and lifetime
    • 操作晶体管及其结构的方法,以提高可靠性和寿命
    • US08159814B2
    • 2012-04-17
    • US12355815
    • 2009-01-19
    • Ping-Chuan WangZhijian YangFernando J. GuarinJ. Edwin HostetterKai D Feng
    • Ping-Chuan WangZhijian YangFernando J. GuarinJ. Edwin HostetterKai D Feng
    • H01G7/02G01R31/04
    • H01L23/345H01L2924/0002H01L2924/00
    • Embodiments of the present invention provide a semiconductor device that includes a transistor device having a first, a second, and a third node; and an interconnect structure having at least one wire and the wire having a first and a second end with the first end of the wire being connected to one of the first, the second, and the third node of the transistor device. The wire is conductive and adapted to provide an operating current in a first direction during a normal operating mode, and adapted to provide a repairing current in a second direction opposite to the first direction during a repair mode of the semiconductor device. In one embodiment the transistor device is a bipolar transistor with the first, second, and third nodes being an emitter, a base, and a collector of the bipolar transistor. The wire is connected to one of the emitter and the collector. Method of operating the semiconductor device and current supplying circuit for the semiconductor device are also disclosed.
    • 本发明的实施例提供一种半导体器件,其包括具有第一,第二和第三节点的晶体管器件; 以及具有至少一根导线的互连结构,并且所述导线具有第一和第二端,所述导线的第一端连接到晶体管器件的第一,第二和第三节点之一。 导线是导电的并且适于在正常操作模式期间在第一方向上提供工作电流,并且适于在半导体器件的修复模式期间在与第一方向相反的第二方向上提供修复电流。 在一个实施例中,晶体管器件是双极晶体管,其中第一,第二和第三节点是双极晶体管的发射极,基极和集电极。 导线连接到发射极和集电极之一。 还公开了用于半导体器件的半导体器件和电流供应电路的操作方法。
    • 5. 发明授权
    • Method of and structure for recovering gain in a bipolar transistor
    • 双极晶体管中恢复增益的方法和结构
    • US07961032B1
    • 2011-06-14
    • US12627282
    • 2009-11-30
    • Zhijian YangPing-Chuan WangKai Di Feng
    • Zhijian YangPing-Chuan WangKai Di Feng
    • H03K17/60
    • H03F1/302
    • A method of recovering gain in a bipolar transistor includes: providing a bipolar transistor including an emitter, a collector, and a base disposed between junctions at the emitter and the collector; reverse biasing the junction disposed between the emitter and the base with an operational voltage and for an operational time period, so that a current gain β of the transistor is degraded; idling the transistor, and generating a repair current Ibr into the base, while forward biasing the junction disposed between the emitter and the base with a first repair voltage (VEBR), and while at least partly simultaneously reverse biasing the junction disposed between the collector and the base with a second repair voltage (VCBR), for a repair time period (TR), so that the gain is at least party recovered; wherein VEBR, VCBR and TR have the proportional relationship: TR ∝ (Δβ)2×exp [1/(Tam+Rth×le×VCER)], VCER=VBER+VCBR, and le=β×Ibr, β is the normal current gain of the transistor, Δβ is the target recovery gain of the transistor in percentage, Tam is the ambient temperature in degrees K, Ibr is the repair current to the base in μamps, Rth is the self-heating thermal resistance of the transistor in K/W, TR is in seconds. The invention further includes structures for implementing the method.
    • 一种在双极晶体管中恢复增益的方法,包括:提供一个包括发射极,集电极和设置在发射极和集电极之间的结之间的基极的双极晶体管; 使用工作电压和工作时间周期反向偏置设置在发射极和基极之间的结,使得电流增益&bgr; 的晶体管劣化; 使晶体管怠速,并产生修复电流Ibr到基极,同时以第一修复电压(VEBR)向前偏置设置在发射极和基极之间的结,并且至少部分地同时反向偏置设置在集电极和 具有第二修复电压(VCBR)的基座,用于修复时间段(TR),使得增益至少被回收; 其中VEBR,VCBR和TR具有比例关系:TRα(&Dgr;&bgr;)2×exp [1 /(Tam + Rth×le×VCER)],VCER = VBER + VCBR,和le =&bgr;×Ibr, &bgr 是晶体管的正常电流增益,&Dgr; 是晶体管的目标恢复增益百分比,谭是以K为单位的环境温度,Ibr是以μ为单位的基极修复电流,Rth是晶体管的自热热阻,K / W,TR在 秒。 本发明还包括用于实现该方法的结构。
    • 6. 发明申请
    • Test Structure for Determination of TSV Depth
    • 测定TSV深度的测试结构
    • US20110073858A1
    • 2011-03-31
    • US12566726
    • 2009-09-25
    • Hanyi DingKai D. FengPing-Chuan WangZhijian Yang
    • Hanyi DingKai D. FengPing-Chuan WangZhijian Yang
    • H01L23/48H01L21/66
    • H01L22/34H01L21/76898
    • A test structure for a through-silicon-via (TSV) in a semiconductor chip includes a first contact, the first contact being electrically connected to a first TSV; and a second contact, wherein the first contact, second contact, and the first TSV form a first channel, and a depth of the first TSV is determined based on a resistance of the first channel. A method of determining a depth of a through-silicon-via (TSV) in a semiconductor chip includes etching a first TSV into the semiconductor chip; forming a first channel, the first channel comprising the first TSV, a first contact electrically connected to the first TSV, and a second contact; connecting a current source to the second contact; determining a resistance across the first channel; and determining a depth of the first TSV based on the resistance of the first channel.
    • 半导体芯片中的贯穿硅通孔(TSV)的测试结构包括:第一触点,第一触点电连接到第一TSV; 以及第二触点,其中所述第一触点,所述第二触点和所述第一TSV形成第一通道,并且基于所述第一通道的电阻来确定所述第一TSV的深度。 确定半导体芯片中的硅通孔(TSV)的深度的方法包括将第一TSV蚀刻到半导体芯片中; 形成第一通道,所述第一通道包括第一TSV,电连接到第一TSV的第一触点和第二触点; 将电流源连接到第二触点; 确定跨越第一通道的电阻; 以及基于所述第一通道的电阻确定所述第一TSV的深度。
    • 10. 发明申请
    • METHODOLOGY FOR RECOVERY OF HOT CARRIER INDUCED DEGRADATION IN BIPOLAR DEVICES
    • 在双极器件中恢复热载体诱导降解的方法
    • US20070205434A1
    • 2007-09-06
    • US11744621
    • 2007-05-04
    • Fernando GuarinJ. HostetterStewart RauchPing-Chuan WangZhijian Yang
    • Fernando GuarinJ. HostetterStewart RauchPing-Chuan WangZhijian Yang
    • H01L29/70H01L21/8222
    • H01L29/7304H01L29/7378
    • A method for recovery of degradation caused by avalanche hot carriers is provided that includes subjecting an idle bipolar transistor exhibiting avalanche degradation to a thermal anneal step which increases temperature of the transistor thereby recovering the avalanche degradation of the bipolar transistor. In one embodiment, the annealing source is a self-heating structure that is a Si-containing resistor that is located side by side with an emitter of the bipolar transistor. During the recovering step, the bipolar transistor including the self-heating structure is placed in the idle mode (i.e., without bias) and a current from a separate circuit is flown through the self-heating structure. In another embodiment of the present, the annealing step is a result of providing a high forward current (around the peak fT current or greater) to the bipolar transistor while operating below the avalanche condition (VCB of less than 1 V). Under the above conditions, about 40% or greater of the degradation can be recovered. In yet another embodiment of the present invention, the thermal annealing step may include a rapid thermal anneal (RTA), a furnace anneal, a laser anneal or a spike anneal.
    • 提供了一种用于回收由雪崩热载体引起的降解的方法,其包括使表现出雪崩降解的空闲双极晶体管经历热退火步骤,所述热退火步骤增加了晶体管的温度,从而恢复了双极晶体管的雪崩劣化。 在一个实施例中,退火源是自发热结构,其是与双极晶体管的发射极并排放置的含Si电阻器。 在恢复步骤期间,包括自发热结构的双极晶体管被置于空闲模式(即,没有偏压),并且来自单独电路的电流流过自热结构。 在本发明的另一个实施例中,退火步骤是在双极晶体管的周围提供高正向电流(围绕峰值fT电流或更大)的结果,同时在低于雪崩条件(V CB)的情况下运行 超过1 V)。 在上述条件下,可以回收约40%以上的降解。 在本发明的又一实施例中,热退火步骤可以包括快速热退火(RTA),炉退火,激光退火或尖峰退火。