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    • 4. 发明授权
    • Packaging micromechanical devices
    • 包装微机械装置
    • US06603182B1
    • 2003-08-05
    • US10097072
    • 2002-03-12
    • Yee Leng LowDavid Andrew Ramsey
    • Yee Leng LowDavid Andrew Ramsey
    • H01L310232
    • B81B7/0077H01L2224/48091H01L2224/48227H01L2924/09701H01L2924/10253H05K1/142H05K1/183H01L2924/00014H01L2924/00
    • The specification describes a packaging arrangement for micro-electromechanical systems (MEMS). The MEMS devices are mounted on a ceramic platform and are then packaged in a hybrid package. The hybrid package may be hermetically sealed. The hybrid package uses a ceramic insert as the primary MEMS device enclosure. The ceramic insert is mounted on a polymer printed wiring board, which provides both support and electrical interconnection for the ceramic insert. Optical access to the MEMS device is through a transparent window that may be hermetically sealed to the ceramic insert. The use of a ceramic primary enclosure for the MEMS device array substantially eliminates thermomechanical instabilities and provides thermomechanical and hermetic performance for the elements that require it. The main interconnection and routing function, implemented using standard epoxy printed circuit technology, yields high interconnection versatility and performance at low cost.
    • 本说明书描述了用于微机电系统(MEMS)的封装装置。 MEMS器件安装在陶瓷平台上,然后被封装在混合封装中。 混合包装可以密封。 混合封装使用陶瓷插件作为主要的MEMS器件外壳。 陶瓷插入件安装在聚合物印刷线路板上,其为陶瓷插入件提供支撑和电互连。 对MEMS器件的光学访问通过透明窗口,其可以与陶瓷插入件气密密封。 使用用于MEMS器件阵列的陶瓷初级外壳基本上消除了热机械不稳定性并且为需要元件提供热机械和密封性能。 使用标准环氧印刷电路技术实现的主要互连和布线功能以低成本产生高互连通用性和性能。