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1. 发明授权

US08676375B2 Automated cassette-to-cassette substrate handling system 失效
标题翻译：自动盒式至纸盒基板处理系统
公开(公告)号：US08676375B2
公开(公告)日：2014-03-18
申请号：US13406076
申请日：2012-02-27
申请人： Joseph Arthur Kraus , Jeremy James Boyer , Joseph Mack , Michael DeChellis , Michael Koo
发明人： Joseph Arthur Kraus , Jeremy James Boyer , Joseph Mack , Michael DeChellis , Michael Koo
IPC分类号： G06F7/00 , B65H1/00 , G05B1/00
CPC分类号： H01L21/681 , H01L21/67259 , H01L21/67276 , H01L21/6838
摘要： An automated cassette-to-cassette substrate handling system includes a cassette storage module for storing a plurality of substrates in cassettes before and after processing. A substrate carrier storage module stores a plurality of substrate carriers. A substrate carrier loading/unloading module loads substrates from the cassette storage module onto the plurality of substrate carriers and unloads substrates from the plurality of substrate carriers to the cassette storage module. A transport mechanism transports the plurality of substrates between the cassette storage module and the plurality of substrate carriers and transports the plurality of substrate carriers between the substrate carrier loading/unloading module and a processing chamber. A vision system recognizes recesses in the plurality of substrate carriers corresponding to empty substrate positions in the substrate carrier. A processor receives data from the vision system and instructs the transport mechanism to transport substrates to positions on the substrate carrier in response to the received data.
摘要翻译：一种自动盒式磁带盒式基板处理系统，包括：盒式存储模块，用于在处理之前和之后将多个基板存储在盒中。衬底载体存储模块存储多个衬底载体。衬底载体装载/卸载模块将衬底从盒存储模块加载到多个衬底载体上，并将衬底从多个衬底载体卸载到盒存储模块。传送机构将多个基板传送到盒存储模块和多个基板载体之间，并将多个基板载体传送到基板载体装载/卸载模块和处理室之间。视觉系统识别对应于衬底载体中的空衬底位置的多个衬底载体中的凹部。处理器从视觉系统接收数据并且指示传送机构响应于所接收的数据将衬底传送到衬底载体上的位置。

2. 发明申请

US20130226335A1 Automated Cassette-To-Cassette Substrate Handling System 失效
标题翻译：自动盒式纸盒基板处理系统
公开(公告)号：US20130226335A1
公开(公告)日：2013-08-29
申请号：US13406076
申请日：2012-02-27
申请人： Joseph Arthur Kraus , Jeremy James Boyer , Michael DeChellis , Michael Koo
发明人： Joseph Arthur Kraus , Jeremy James Boyer , Michael DeChellis , Michael Koo
IPC分类号： H01L21/677 , G05D3/00
CPC分类号： H01L21/681 , H01L21/67259 , H01L21/67276 , H01L21/6838
摘要： An automated cassette-to-cassette substrate handling system includes a cassette storage module for storing a plurality of substrates in cassettes before and after processing. A substrate carrier storage module stores a plurality of substrate carriers. A substrate carrier loading/unloading module loads substrates from the cassette storage module onto the plurality of substrate carriers and unloads substrates from the plurality of substrate carriers to the cassette storage module. A transport mechanism transports the plurality of substrates between the cassette storage module and the plurality of substrate carriers and transports the plurality of substrate carriers between the substrate carrier loading/unloading module and a processing chamber. A vision system recognizes recesses in the plurality of substrate carriers corresponding to empty substrate positions in the substrate carrier. A processor receives data from the vision system and instructs the transport mechanism to transport substrates to positions on the substrate carrier in response to the received data.
摘要翻译：一种自动盒式磁带盒式基板处理系统，包括：盒式存储模块，用于在处理之前和之后将多个基板存储在盒中。衬底载体存储模块存储多个衬底载体。衬底载体装载/卸载模块将衬底从盒存储模块加载到多个衬底载体上，并将衬底从多个衬底载体卸载到盒存储模块。传送机构将多个基板传送到盒存储模块和多个基板载体之间，并将多个基板载体传送到基板载体装载/卸载模块和处理室之间。视觉系统识别对应于衬底载体中的空衬底位置的多个衬底载体中的凹部。处理器从视觉系统接收数据并且指示传送机构响应于所接收的数据将衬底传送到衬底载体上的位置。

3. 发明申请

US20070226973A1 Diffusion bonded fluid flow manifold with partially integrated inter-active component 失效
标题翻译：具有部分集成的相互作用部件的扩散粘合流体流动歧管
公开(公告)号：US20070226973A1
公开(公告)日：2007-10-04
申请号：US11788428
申请日：2007-04-19
申请人： Mark Crockett , John Lane , Michael DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe Mohammed
发明人： Mark Crockett , John Lane , Michael DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe Mohammed
IPC分类号： B23K20/00 , H01L21/00
CPC分类号： F16K27/003 , C22C19/055 , C22C19/07 , C22C38/001 , C22C38/02 , C22C38/04 , C22C38/44 , C22C38/58 , F15C5/00 , F16K99/0001 , Y10T29/41 , Y10T29/49144 , Y10T29/49405 , Y10T29/49425 , Y10T29/49906
摘要： A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The fluid delivery system includes an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.
摘要翻译：一种节省空间的集成流体输送系统，其特别适用于半导体加工设备中的气体分配。流体输送系统包括集成的流体流动网络结构，除了含有流体流动通道的分层基底之外，还可以包括各种流体处理和监测部件。分层基板是扩散接合的，并且根据设计和材料要求，各种流体处理和监测部件可以部分地集成或完全集成到基板中。

4. 发明申请

US20070113663A1 CAPACITANCE DUAL ELECTRODE PRESSURE SENSOR IN A DIFFUSION BONDED LAYERED SUBSTRATE 失效
标题翻译：电容式双电极压力传感器在扩散接合层状基板
公开(公告)号：US20070113663A1
公开(公告)日：2007-05-24
申请号：US11509507
申请日：2006-08-23
申请人： Mark Crockett , John Lane , Michael DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe Mohammed
发明人： Mark Crockett , John Lane , Michael DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe Mohammed
IPC分类号： G01L9/12
CPC分类号： F16K27/003 , C22C19/055 , C22C19/07 , C22C38/001 , C22C38/02 , C22C38/04 , C22C38/44 , C22C38/58 , F15C5/00 , F16K99/0001 , Y10T29/41 , Y10T29/49144 , Y10T29/49405 , Y10T29/49425 , Y10T29/49906
摘要： The disclosure pertains to a space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The present invention also pertains to an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.
摘要翻译：本公开涉及一种节省空间的集成流体输送系统，其特别适用于半导体加工设备中的气体分配。本发明还涉及一种集成流体流网络结构，除了包含流体流动通道的分层基板之外，还可以包括各种流体处理和监测部件。分层基板是扩散接合的，并且根据设计和材料要求，各种流体处理和监测部件可以部分地集成或完全集成到基板中。

5. 发明申请

US20070200082A1 Manufacture of an integrated fluid delivery system for semiconductor processing apparatus 失效
标题翻译：一种用于半导体处理装置的集成流体输送系统的制造
公开(公告)号：US20070200082A1
公开(公告)日：2007-08-30
申请号：US11788427
申请日：2007-04-20
申请人： Mark Crockett , John Lane , Michael DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe Mohammed
发明人： Mark Crockett , John Lane , Michael DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe Mohammed
IPC分类号： F16K21/00
CPC分类号： F16K27/003 , C22C19/055 , C22C19/07 , C22C38/001 , C22C38/02 , C22C38/04 , C22C38/44 , C22C38/58 , F15C5/00 , F16K99/0001 , Y10T29/41 , Y10T29/49144 , Y10T29/49405 , Y10T29/49425 , Y10T29/49906
摘要： The disclosure pertains to a space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The present invention also pertains to an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.
摘要翻译：本公开涉及一种节省空间的集成流体输送系统，其特别适用于半导体加工设备中的气体分配。本发明还涉及一种集成流体流网络结构，除了包含流体流动通道的分层基板之外，还可以包括各种流体处理和监测部件。分层基板是扩散接合的，并且根据设计和材料要求，各种流体处理和监测部件可以部分地集成或完全集成到基板中。

6. 发明申请

US20070051080A1 In-line filter in a diffusion bonded layered substrate 失效
标题翻译：扩散接合层叠基板中的在线滤波器
公开(公告)号：US20070051080A1
公开(公告)日：2007-03-08
申请号：US11542829
申请日：2006-10-03
申请人： Mark Crockett , John Lane , Michael DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe Mohammed
发明人： Mark Crockett , John Lane , Michael DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe Mohammed
IPC分类号： B01D50/00
CPC分类号： F16K27/003 , C22C19/055 , C22C19/07 , C22C38/001 , C22C38/02 , C22C38/04 , C22C38/44 , C22C38/58 , F15C5/00 , F16K99/0001 , Y10T29/41 , Y10T29/49144 , Y10T29/49405 , Y10T29/49425 , Y10T29/49906
摘要： A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The invention pertains to a diffusion bonded integrated fluid flow network architecture, which includes, in addition to a layered substrate containing fluid flow channels, an in-line filter and may include various fluid handling and monitoring components. The integrated fluid delivery system that is formed from a layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.
摘要翻译：一种节省空间的集成流体输送系统，其特别适用于半导体加工设备中的气体分配。本发明涉及一种扩散结合的集成流体流动网络结构，其包括除含有流体流动通道的层状基底之外的在线过滤器，并且可以包括各种流体处理和监测部件。由分层基板形成的集成流体输送系统是扩散接合的，并且根据设计和材料要求，各种流体处理和监测部件可以部分地集成或完全集成到基板中。

7. 发明申请

US20070062909A1 Method of improving corrosion resistance of stainless steel surfaces by a process of passivation 有权
标题翻译：通过钝化工艺提高不锈钢表面的耐腐蚀性的方法
公开(公告)号：US20070062909A1
公开(公告)日：2007-03-22
申请号：US11582748
申请日：2006-10-17
申请人： Mark Crockett , John Lane , Michael DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe Mohammed
发明人： Mark Crockett , John Lane , Michael DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe Mohammed
IPC分类号： C23G1/00 , B21D51/16 , C23F1/00 , C03C15/00 , B23H9/00
CPC分类号： F16K27/003 , C22C19/055 , C22C19/07 , C22C38/001 , C22C38/02 , C22C38/04 , C22C38/44 , C22C38/58 , F15C5/00 , F16K99/0001 , Y10T29/41 , Y10T29/49144 , Y10T29/49405 , Y10T29/49425 , Y10T29/49906
摘要： Described is a space-conserving integrated fluid delivery system particularly useful for gas distribution in semiconductor processing equipment. The system includes integrated fluid flow network architecture, and may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded. Subsequent to diffusion bonding, a stainless steel diffusion bonded part may advantageously be treated to enhance corrosion resistance using a series of steps designed to bring more chromium to the surface of the steel.
摘要翻译：描述了对于半导体加工设备中的气体分布特别有用的节省空间的集成流体输送系统。该系统包括集成流体流网络结构，并且除了包含流体流动通道的分层基板之外，还可以包括各种流体处理和监测部件。层状衬底是扩散接合的。在扩散接合之后，可以使用一系列设计成将更多的铬带到钢的表面的步骤，可以有利地处理不锈钢扩散接合部分以增强耐腐蚀性。

8. 发明授权

US06736370B1 Diaphragm valve with dynamic metal seat and coned disk springs 失效
标题翻译：带动态金属座和圆盘弹簧的隔膜阀
公开(公告)号：US06736370B1
公开(公告)日：2004-05-18
申请号：US10328135
申请日：2002-12-20
申请人： Mark Crockett , Michael DeChellis
发明人： Mark Crockett , Michael DeChellis
IPC分类号： F16K717
CPC分类号： F16K99/0001 , F16K27/003 , F16K99/0015 , F16K99/0028 , F16K99/0059 , F16K2099/0074 , F16K2099/0076
摘要： The disclosure pertains to a compact integrated fluid control valve useful in controlling process fluids handled as part of a semiconductor processing operation. In the wetted section of the valve, process fluids enter through one or more entrance ports and exit through an annular metallic valve seat. In the valve's drive section, a sliding cylinder, including an upper horizontal member tied to a lower horizontal member, moves up and down. The lower horizontal member presses a diaphragm against the valve seat to close the valve, and moves away from the valve seat to permit fluid flow through the valve. A spring presses at the top of the upper horizontal member of the sliding cylinder, while a controlled pneumatic pressure is applied at the bottom of the upper horizontal member. The balance between the force of the spring and the force of the pneumatic pressure determines the extent to which the valve is open.
摘要翻译：本公开涉及用于控制作为半导体加工操作的一部分而处理的工艺流体的紧凑的集成流体控制阀。在阀的润湿部分中，工艺流体通过一个或多个入口进入并通过环形金属阀座排出。在阀的驱动部分中，包括连接到下水平构件的上水平构件的滑动气缸上下移动。下水平构件将隔膜压向阀座以关闭阀，并且从阀座移开以允许流体流过阀。弹簧在滑动缸的上部水平构件的顶部压紧，同时在上部水平构件的底部施加受控的气动压力。弹簧的力与气动力的力之间的平衡决定了阀打开的程度。

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