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1. 发明授权

US08676375B2 Automated cassette-to-cassette substrate handling system 失效
标题翻译：自动盒式至纸盒基板处理系统
公开(公告)号：US08676375B2
公开(公告)日：2014-03-18
申请号：US13406076
申请日：2012-02-27
申请人： Joseph Arthur Kraus , Jeremy James Boyer , Joseph Mack , Michael DeChellis , Michael Koo
发明人： Joseph Arthur Kraus , Jeremy James Boyer , Joseph Mack , Michael DeChellis , Michael Koo
IPC分类号： G06F7/00 , B65H1/00 , G05B1/00
CPC分类号： H01L21/681 , H01L21/67259 , H01L21/67276 , H01L21/6838
摘要： An automated cassette-to-cassette substrate handling system includes a cassette storage module for storing a plurality of substrates in cassettes before and after processing. A substrate carrier storage module stores a plurality of substrate carriers. A substrate carrier loading/unloading module loads substrates from the cassette storage module onto the plurality of substrate carriers and unloads substrates from the plurality of substrate carriers to the cassette storage module. A transport mechanism transports the plurality of substrates between the cassette storage module and the plurality of substrate carriers and transports the plurality of substrate carriers between the substrate carrier loading/unloading module and a processing chamber. A vision system recognizes recesses in the plurality of substrate carriers corresponding to empty substrate positions in the substrate carrier. A processor receives data from the vision system and instructs the transport mechanism to transport substrates to positions on the substrate carrier in response to the received data.
摘要翻译：一种自动盒式磁带盒式基板处理系统，包括：盒式存储模块，用于在处理之前和之后将多个基板存储在盒中。衬底载体存储模块存储多个衬底载体。衬底载体装载/卸载模块将衬底从盒存储模块加载到多个衬底载体上，并将衬底从多个衬底载体卸载到盒存储模块。传送机构将多个基板传送到盒存储模块和多个基板载体之间，并将多个基板载体传送到基板载体装载/卸载模块和处理室之间。视觉系统识别对应于衬底载体中的空衬底位置的多个衬底载体中的凹部。处理器从视觉系统接收数据并且指示传送机构响应于所接收的数据将衬底传送到衬底载体上的位置。

2. 发明申请

US20130226335A1 Automated Cassette-To-Cassette Substrate Handling System 失效
标题翻译：自动盒式纸盒基板处理系统
公开(公告)号：US20130226335A1
公开(公告)日：2013-08-29
申请号：US13406076
申请日：2012-02-27
申请人： Joseph Arthur Kraus , Jeremy James Boyer , Michael DeChellis , Michael Koo
发明人： Joseph Arthur Kraus , Jeremy James Boyer , Michael DeChellis , Michael Koo
IPC分类号： H01L21/677 , G05D3/00
CPC分类号： H01L21/681 , H01L21/67259 , H01L21/67276 , H01L21/6838
摘要： An automated cassette-to-cassette substrate handling system includes a cassette storage module for storing a plurality of substrates in cassettes before and after processing. A substrate carrier storage module stores a plurality of substrate carriers. A substrate carrier loading/unloading module loads substrates from the cassette storage module onto the plurality of substrate carriers and unloads substrates from the plurality of substrate carriers to the cassette storage module. A transport mechanism transports the plurality of substrates between the cassette storage module and the plurality of substrate carriers and transports the plurality of substrate carriers between the substrate carrier loading/unloading module and a processing chamber. A vision system recognizes recesses in the plurality of substrate carriers corresponding to empty substrate positions in the substrate carrier. A processor receives data from the vision system and instructs the transport mechanism to transport substrates to positions on the substrate carrier in response to the received data.
摘要翻译：一种自动盒式磁带盒式基板处理系统，包括：盒式存储模块，用于在处理之前和之后将多个基板存储在盒中。衬底载体存储模块存储多个衬底载体。衬底载体装载/卸载模块将衬底从盒存储模块加载到多个衬底载体上，并将衬底从多个衬底载体卸载到盒存储模块。传送机构将多个基板传送到盒存储模块和多个基板载体之间，并将多个基板载体传送到基板载体装载/卸载模块和处理室之间。视觉系统识别对应于衬底载体中的空衬底位置的多个衬底载体中的凹部。处理器从视觉系统接收数据并且指示传送机构响应于所接收的数据将衬底传送到衬底载体上的位置。

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