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    • 7. 发明授权
    • Tapered piezoelectric in-plane bimorph and method of fabricating
    • 锥形压电平面双压电晶片及其制造方法
    • US07005777B2
    • 2006-02-28
    • US10042926
    • 2002-01-09
    • John Stuart WrightJames Morgan Murphy
    • John Stuart WrightJames Morgan Murphy
    • H01L41/08
    • H01L41/338H01L41/096Y10T29/42
    • Tapered elements fabricated from a substrate of a size many times that of a single element are disclosed. Such tapered elements may be used as piezoelectric microactuators such as in-plane piezoelectric bimorph microactuators. A unique method of fabricating such tapered elements is provided. According to the method, cutting directions are first defined, the substrate is then cut a plurality of times in each cutting direction with adjacent cuts in each cutting direction indexed by proper indexing distances which are determined based on the dimensions of the final tapered elements. In one embodiment of the method, a plurality of optically detectable marks are used to define the cutting directions and cutting means is accordingly optically aligned with the cutting directions.
    • 公开了由单个元件的尺寸的许多倍的衬底制造的锥形元件。 这种锥形元件可以用作压电微致动器,例如面内压电双压电晶片微致动器。 提供了制造这种锥形元件的独特方法。 根据该方法,首先限定切割方向,然后在每个切割方向上切割多个基板,并且基于由最终锥形元件的尺寸确定的由适当的分度距离指定的每个切割方向上的相邻切口。 在该方法的一个实施例中,使用多个光学可检测标记来限定切割方向,因此切割装置与切割方向光学对准。
    • 8. 发明授权
    • Trailing edge acoustic emission sensor and pyroelectric sensor for asperity detection
    • 后期声发射传感器和热释电传感器,用于粗糙度检测
    • US06196062B1
    • 2001-03-06
    • US09575318
    • 2000-05-19
    • John Stuart WrightMark James Schaenzer
    • John Stuart WrightMark James Schaenzer
    • G01B528
    • G01B21/30G11B5/6076G11B33/10
    • A disc testing system includes a base, a disc rotatably attached to the base, and an actuator assembly movably attached to the base. A ramp assembly includes a set of ramps for loading and unloading the sliders and transducing elements carried by the sliders to and from the disc attached to the base. A load spring is attached to the arm of the actuator. A slider is attached to the load spring. The slider further includes a leading edge and a trailing edge. A piezoelectric sensor and a pyroelectric sensor is carried by the trailing edge of the slider. The piezoelectric sensor and the pyroelectric sensor are made from the same material which has both piezoelectric properties and pyroelectric properties. The piezoelectric sensor and the pyroelectric sensor are formed by the same process. The two sensors can also be formed substantially simultaneously. A conductive layer is placed on the trailing edge of the slider followed by a strip of thick film material. Epoxy may be added to the sensors to form a composite of epoxy and lead titanate zirconate.
    • 盘测试系统包括基座,可旋转地附接到基座的盘和可移动地连接到基座的致动器组件。 斜坡组件包括一组斜面,用于将滑块和由滑块承载的换能元件装载和卸载到连接到基座的盘上和从与其附接的盘上。 负载弹簧连接到执行机构的臂上。 滑块连接到负载弹簧。 滑块还包括前缘和后缘。 压电传感器和热电传感器由滑块的后缘承载。 压电传感器和热电传感器由具有压电性质和热电性质的相同材料制成。 压电传感器和热电传感器由相同的工艺形成。 两个传感器也可以基本上同时形成。 导电层被放置在滑块的后缘上,随后是一块厚膜材料条。 环氧树脂可以添加到传感器中以形成环氧树脂和钛酸铅钛酸酯的复合物。