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    • 3. 发明申请
    • Method for forming pattern and method for fabricating LCD device using the same
    • 用于形成图案的方法和使用其制造LCD装置的方法
    • US20070148603A1
    • 2007-06-28
    • US11640985
    • 2006-12-19
    • Hye LeeJae Oh
    • Hye LeeJae Oh
    • G03F7/26
    • G03F7/0007G02F1/133512G02F1/133516G03F7/11G03F7/42
    • A method for forming a pattern and a method for fabricating an LCD device using the same is disclosed, wherein a photoresist layer is removed from a substrate without using a photoresist stripper, so that the pattern is formed with a low fabrication costs. The method comprising sequentially forming a pattern material layer, a transformed material layer and a photoresist layer on a substrate; patterning the photoresist layer by exposure and development using a mask; selectively etching the transformed material layer and the pattern material layer by using the patterned photoresist layer as a mask; and removing the transformed material layer and the patterned photoresist layer in a lift-off method by applying light.
    • 公开了一种用于形成图案的方法和使用该图案的LCD器件的制造方法,其中在不使用光致抗蚀剂剥离器的情况下从衬底去除光致抗蚀剂层,从而以低制造成本形成图案。 该方法包括在衬底上依次形成图案材料层,变形材料层和光致抗蚀剂层; 通过使用掩模的曝光和显影来图案化光致抗蚀剂层; 通过使用图案化的光致抗蚀剂层作为掩模来选择性地蚀刻变形材料层和图案材料层; 以及通过施加光而以剥离方法去除转化的材料层和图案化的光致抗蚀剂层。
    • 7. 发明申请
    • Array substrate for liquid crystal display device and manufacturing method thereof
    • 液晶显示装置用阵列基板及其制造方法
    • US20070166859A1
    • 2007-07-19
    • US11646550
    • 2006-12-28
    • Hye LeeJae Oh
    • Hye LeeJae Oh
    • H01L21/00
    • H01L27/124G02F1/136213G02F1/1368H01L27/1214H01L27/1288H01L29/4908
    • An array substrate for an LCD device and a manufacturing method thereof. The array substrate includes: a gate line, a gate electrode, a gate pad, and a pixel electrode formed on the substrate; a gate insulation layer formed on the substrate to expose the gate line and the pixel electrode; a source electrode connected to a data line crossing the gate line, a drain electrode facing the source electrode with a channel interposed, a data pad formed at one end of the data line, and a capacitor electrode overlapping portions of the pixel electrode and the gate line; a semiconductor layer constituting the channel between the source electrode and the drain electrode; first, second, third, and fourth contact holes formed in the gate pad, the data pad, the capacitor electrode, and the drain electrode, respectively; and first through fourth contact electrodes formed in the first through fourth contact holes, respectively.
    • 一种LCD装置用阵列基板及其制造方法。 阵列基板包括:栅极线,栅电极,栅极焊盘和形成在基板上的像素电极; 栅极绝缘层,形成在所述衬底上以暴露所述栅极线和所述像素电极; 连接到与栅极线交叉的数据线的源极电极,与源极电极相对的沟道插入的漏电极,形成在数据线的一端的数据焊盘和电容器电极,重叠部分的像素电极和栅极 线; 构成源电极和漏电极之间的沟道的半导体层; 分别形成在栅极焊盘,数据焊盘,电容器电极和漏极电极中的第一,第二,第三和第四接触孔; 以及形成在第一至第四接触孔中的第一至第四接触电极。