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1. 发明授权

US5810935A Apparatus for transferring a wafer 失效
标题翻译：用于传送晶片的装置
公开(公告)号：US5810935A
公开(公告)日：1998-09-22
申请号：US564575
申请日：1995-11-29
申请人： Jong-Hyun Lee , Hyung-Joun Yoo , Boo-Yeon Choi , Won-Ick Jang , Ki-Ho Jang
发明人： Jong-Hyun Lee , Hyung-Joun Yoo , Boo-Yeon Choi , Won-Ick Jang , Ki-Ho Jang
IPC分类号： B65G49/07 , B25J15/08 , H01L21/677 , H01L21/68 , H01L21/687 , C23C16/00
CPC分类号： H01L21/68707 , Y10S414/136 , Y10S414/137 , Y10S414/139 , Y10S414/141
摘要： An apparatus for transferring a wafer in a semiconductor manufacturing process, and for carrying a wafer between a cassette and a wafer chuck without an additional tool such as a tripod. The apparatus includes: a holder capable of holding the side of the wafer; a wafer transfer assembly including an actuator of the holder and a detector that detects a malfunction of the holder; and a process reactor having a vacuum exhaust port installed under a wafer chuck so as to guide gas in an axially-symmetric flow pattern. The holder grasps the rounded side of a wafer. Removal of additional tools makes the structure of an overall system more simple and an exhaust port can be installed under the reactor so as to cause processing gas to be guided in an axially-symmetric flow, resulting in an enhancement of the process uniformity.
摘要翻译：一种用于在半导体制造工艺中转移晶片的装置，并且用于在没有诸如三脚架的附加工具之间将晶片携带在盒和晶片卡盘之间。该装置包括：能够保持晶片侧面的保持器; 晶片传送组件，其包括所述保持器的致动器和检测器，所述检测器检测所述保持器的故障; 以及具有安装在晶片卡盘下方的真空排气口以便引导轴向对称流动模式的气体的处理反应器。保持器抓住晶片的圆形侧。除去附加工具使得整个系统的结构更简单，并且排气口可以安装在反应器下方，以便使处理气体以轴向对称的流动被引导，导致工艺均匀性的提高。

2. 发明授权

US5783749A Vibrating disk type micro-gyroscope 失效
标题翻译：振动盘式微陀螺仪
公开(公告)号：US5783749A
公开(公告)日：1998-07-21
申请号：US675970
申请日：1996-07-05
申请人： Jong-Hyun Lee , Boo-Yeon Choi , Kyung-Ho Park , Hyung-Joun Yoo
发明人： Jong-Hyun Lee , Boo-Yeon Choi , Kyung-Ho Park , Hyung-Joun Yoo
IPC分类号： G01C19/00 , G01C19/56 , G01P15/08 , G01P9/04
CPC分类号： G01C19/56 , G01P15/0802
摘要： A vibrating disk type micro-gyroscope and a method of manufacture thereof are disclosed. The micro-gyroscope includes a support platform for supporting a vibrating disk, the vibrating disk converting a resonance frequency into two beat frequencies, a bottom detection electrode for detecting the angular velocity of the gyroscope from a detection of the electrostatic capacitance changes between the bottom detection electrode and the vibrating disk, and an upper drive electrode for exciting the vibrating disk. The method includes the steps of: depositing an insulator layer, a polycrystalline silicon layer, the bottom detection layer, and the bottom sacrificial layer; dry etching the bottom sacrificial layer; depositing polycrystalline silicon doped with dopants; dry etching every area except the support platform and the vibrating disk; depositing an oxide upper sacrificial layer; and forming a pattern and then wet etching the upper sacrificial layer and the bottom sacrificial layer.
摘要翻译：公开了一种振动盘式微陀螺仪及其制造方法。微陀螺仪包括用于支撑振动盘的支撑平台，振动盘将共振频率转换成两个拍频;底部检测电极，用于检测陀螺仪的角速度，从检测到底部检测之间的静电电容变化电极和振动盘，以及用于激励振动盘的上驱动电极。该方法包括以下步骤：沉积绝缘体层，多晶硅层，底部检测层和底部牺牲层; 干蚀刻底部牺牲层; 沉积掺杂有掺杂剂的多晶硅; 干燥蚀刻除支撑平台和振动盘之外的每个区域; 沉积氧化物上牺牲层; 并形成图案，然后湿蚀刻上牺牲层和底牺牲层。

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