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1. 发明授权

US07400488B2 Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters 有权
标题翻译：用于微带谐振器和滤波器的宽带调谐的可变电容膜致动器
公开(公告)号：US07400488B2
公开(公告)日：2008-07-15
申请号：US11606734
申请日：2006-11-30
申请人： Jonathan J. Lynch , Sarabjit Mehta , John Pasiecznik , Peter Petre
发明人： Jonathan J. Lynch , Sarabjit Mehta , John Pasiecznik , Peter Petre
IPC分类号： H01G7/00
CPC分类号： H01G5/18 , H01G5/015 , H01G5/16 , H01P5/04 , H03J3/20 , H03J2200/39
摘要： A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of the capacitance of the electronic circuit is obtained by pulling the membrane upwards by means of the bias circuitry. The disclosed device provides a sizeable capacitance variation and high Q factor, resulting in overall low filter insertion loss. A nearly constant group delay over a wide operating bandwidth is also obtained.
摘要翻译：公开了一种用于改变电子电路的电容的装置。该装置包括位于电子电路上方的柔性膜，连接到柔性膜的金属层和位于膜上方的偏置电路。电子电路的电容的变化是通过利用偏置电路向上拉膜来获得的。所公开的器件提供相当大的电容变化和高Q因子，导致总体上低的滤波器插入损耗。也获得了在宽工作带宽上几乎恒定的组延迟。

2. 发明授权

US07161791B2 Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters 有权
公开(公告)号：US07161791B2
公开(公告)日：2007-01-09
申请号：US11041159
申请日：2005-01-21
申请人： Jonathan J. Lynch , Sarabjit Mehta , John Pasiecznik , Peter Petre
发明人： Jonathan J. Lynch , Sarabjit Mehta , John Pasiecznik , Peter Petre
IPC分类号： H01G7/00
CPC分类号： H01G5/18 , H01G5/015 , H01G5/16 , H01P5/04 , H03J3/20 , H03J2200/39
摘要： A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of the capacitance of the electronic circuit is obtained by pulling the membrane upwards by means of the bias circuitry. The disclosed device provides a sizeable capacitance variation and high Q factor, resulting in overall low filter insertion loss. A nearly constant group delay over a wide operating bandwidth is also obtained.

3. 发明授权

US07085121B2 Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters 失效
标题翻译：用于微带谐振器和滤波器的宽带调谐的可变电容膜致动器
公开(公告)号：US07085121B2
公开(公告)日：2006-08-01
申请号：US10421302
申请日：2003-04-22
申请人： Jonathan J. Lynch , Sarabjit Mehta , John Pasiecznik , Peter Petre
发明人： Jonathan J. Lynch , Sarabjit Mehta , John Pasiecznik , Peter Petre
IPC分类号： H01G7/00
CPC分类号： H01G5/18 , H01G5/015 , H01G5/16 , H01P5/04 , H03J3/20 , H03J2200/39
摘要： A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of the capacitance of the electronic circuit is obtained by pulling the membrane upwards by means of the bias circuitry. The disclosed device provides a sizeable capacitance variation and high Q factor, resulting in overall low filter insertion loss. A nearly constant group delay over a wide operating bandwidth is also obtained.
摘要翻译：公开了一种用于改变电子电路的电容的装置。该装置包括位于电子电路上方的柔性膜，连接到柔性膜的金属层和位于膜上方的偏置电路。电子电路的电容的变化是通过利用偏置电路向上拉膜来获得的。所公开的器件提供相当大的电容变化和高Q因子，导致总体上低的滤波器插入损耗。也获得了在宽工作带宽上几乎恒定的组延迟。

4. 发明申请

US20070070576A1 Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters 有权
标题翻译：用于微带谐振器和滤波器的宽带调谐的可变电容膜致动器
公开(公告)号：US20070070576A1
公开(公告)日：2007-03-29
申请号：US11606734
申请日：2006-11-30
申请人： Jonathan Lynch , Sarabjit Mehta , John Pasiecznik , Peter Petre
发明人： Jonathan Lynch , Sarabjit Mehta , John Pasiecznik , Peter Petre
IPC分类号： H01G7/00
CPC分类号： H01G5/18 , H01G5/015 , H01G5/16 , H01P5/04 , H03J3/20 , H03J2200/39
摘要： A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of the capacitance of the electronic circuit is obtained by pulling the membrane upwards by means of the bias circuitry. The disclosed device provides a sizeable capacitance variation and high Q factor, resulting in overall low filter insertion loss. A nearly constant group delay over a wide operating bandwidth is also obtained.
摘要翻译：公开了一种用于改变电子电路的电容的装置。该装置包括位于电子电路上方的柔性膜，连接到柔性膜的金属层和位于膜上方的偏置电路。电子电路的电容的变化是通过利用偏置电路向上拉膜来获得的。所公开的器件提供相当大的电容变化和高Q因子，导致总体上低的滤波器插入损耗。也获得了在宽工作带宽上几乎恒定的组延迟。

5. 发明申请

US20050155851A1 Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters 有权
标题翻译：用于微带谐振器和滤波器的宽带调谐的可变电容膜致动器
公开(公告)号：US20050155851A1
公开(公告)日：2005-07-21
申请号：US11041159
申请日：2005-01-21
申请人： Jonathan Lynch , Sarabjit Mehta , John Pasiecznik , Peter Petre
发明人： Jonathan Lynch , Sarabjit Mehta , John Pasiecznik , Peter Petre
IPC分类号： H01G5/00 , H01G5/015 , H01G5/18 , H01G7/00 , H01H1/10 , H01P1/00 , H01P1/18 , H03J3/20
CPC分类号： H01G5/18 , H01G5/015 , H01G5/16 , H01P5/04 , H03J3/20 , H03J2200/39
摘要： A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of the capacitance of the electronic circuit is obtained by pulling the membrane upwards by means of the bias circuitry. The disclosed device provides a sizeable capacitance variation and high Q factor, resulting in overall low filter insertion loss. A nearly constant group delay over a wide operating bandwidth is also obtained.
摘要翻译：公开了一种用于改变电子电路的电容的装置。该装置包括位于电子电路上方的柔性膜，连接到柔性膜的金属层和位于膜上方的偏置电路。电子电路的电容的变化是通过利用偏置电路向上拉膜来获得的。所公开的器件提供相当大的电容变化和高Q因子，导致总体上低的滤波器插入损耗。也获得了在宽工作带宽上几乎恒定的组延迟。

6. 发明授权

US07861398B1 Method for fabricating a miniature tunable filter 有权
标题翻译：微型可调滤波器的制造方法
公开(公告)号：US07861398B1
公开(公告)日：2011-01-04
申请号：US12142580
申请日：2008-06-19
申请人： Sarabjit Mehta , Peter Petre
发明人： Sarabjit Mehta , Peter Petre
IPC分类号： H01Q13/00
CPC分类号： H01P1/2056 , H01P11/007 , Y10T29/49016 , Y10T29/49126 , Y10T29/49155 , Y10T29/49165
摘要： A method for fabrication of a filter includes forming an input transformer pole in a first substrate by forming a first conductive via, forming an output transformer pole in the first substrate by forming a second conductive via, forming one or more filter poles in the first substrate between the input transformer pole and the output transformer pole by forming one or more conductive vias in the first substrate between the input transformer pole and the output transformer pole, fabricating one or more tuning elements on a second substrate, wherein the number of tuning elements corresponds to the number of filter poles between the input transformer pole and the output transformer pole, and bonding the second substrate to a top surface of the first substrate so that each tuning element on the second substrate is aligned with and overlays a filter pole on the first substrate.
摘要翻译：一种制造滤波器的方法，包括：通过形成第一导电通孔，在第一基板中形成输入变压器极，通过形成第二导电通孔在第一基板中形成输出变压器极，在第一基板中形成一个或多个滤波极在所述输入变压器极和所述输出变压器极之间，通过在所述输入变压器极和所述输出变压器极之间的所述第一衬底中形成一个或多个导电通孔，在第二衬底上制造一个或多个调谐元件，其中所述调谐元件的数量对应与所述输入变压器极和所述输出变压器极之间的滤波器极数，以及将所述第二衬底接合到所述第一衬底的顶表面，使得所述第二衬底上的每个调谐元件与所述第一衬底上的滤波极对准并且覆盖所述第一衬底上的滤波器极基质。

7. 发明授权

US07405637B1 Miniature tunable filter having an electrostatically adjustable membrane 有权
标题翻译：具有静电调节膜的微型可调谐滤光片
公开(公告)号：US07405637B1
公开(公告)日：2008-07-29
申请号：US11166032
申请日：2005-06-23
申请人： Sarabjit Mehta , Peter Petre
发明人： Sarabjit Mehta , Peter Petre
IPC分类号： H01P1/205
CPC分类号： H01P1/2056
摘要： A miniature tunable filter comprising filter poles disposed with a filter substrate. A moveable electrically conductive membrane is disposed above each filter pole and is spaced from the filter pole by an air or vacuum gap. The gap spacing is changed by deflecting the membrane with an electrostatic voltage. The change in gap spacing varies the capacitive loading at the pole, thus providing tuning of the filter. The electrically conductive membrane is preferably manufactured on a separate substrate that is bonded to the filter body containing the filter substrate.
摘要翻译：一种微型可调滤波器，包括设置有滤波器基板的滤波极。可移动导电膜设置在每个过滤极上方，并通过空气或真空间隙与过滤器柱间隔开。通过用静电电压使膜偏转来改变间隙间隔。间隙间隙的变化会改变极点处的电容负载，从而提供滤波器的调谐。优选地，导电膜在与包含过滤器基板的过滤体接合的单独基板上制造。

8. 发明授权

US11282970B1 Wideband detector structures 有权
公开(公告)号：US11282970B1
公开(公告)日：2022-03-22
申请号：US13372366
申请日：2012-02-13
申请人： Daniel Yap , Rajesh D. Rajavel , Sarabjit Mehta
发明人： Daniel Yap , Rajesh D. Rajavel , Sarabjit Mehta
IPC分类号： H01L31/0236 , H01L27/146 , H01L31/0352
摘要： An apparatus and method for a detector are disclosed. The apparatus disclosed contains a non-absorbing layer shaped as one or more pyramids, one or more collector regions, an absorber layer disposed between the one or more collector regions and the non-absorbing layer, a first electrical contact, and a second electrical contact, wherein the absorber layer is configured to absorb photons of incident light and generate minority electrical carriers and majority electrical carriers, wherein the one or more collector regions are electrically connected with the absorber layer and with the first electrical contact for extracting the minority electrical carriers, and the absorber layer is electrically connected with the one or more collector regions and with the second electrical contact to extract the majority electrical carriers.

9. 发明授权

US07992271B2 Process of manufacturing a piezoelectric actuator for tunable electronic components on a carrier substrate 有权
标题翻译：在载体基板上制造用于可调电子部件的压电致动器的工艺
公开(公告)号：US07992271B2
公开(公告)日：2011-08-09
申请号：US12622931
申请日：2009-11-20
申请人： Sarabjit Mehta
发明人： Sarabjit Mehta
IPC分类号： H04R17/10
CPC分类号： H01G5/18 , H01L41/0933 , H01L41/25 , H01L41/313 , Y10T29/42
摘要： A processes for manufacturing actuating assembly for tuning a circuit by forming a carrier substrate containing a membrane, a conductive layer, and piezoelectric actuators are disclosed. The process includes the steps of: providing a substrate having a bottom protective layer on a bottom side and etched trenches on a top side; depositing a top protective layer on the top side of the substrate; depositing a first conductive layer on the top protective layer; patterning the first conductive layer; patterning the bottom protective layer to form an etch mask aligned with the patterned first conductive layer; forming a piezoelectric structure on the top side of the substrate; depositing a membrane layer along the top side of the substrate and above the piezoelectric structure; curing the membrane layer; depositing a second conductive layer on the cured membrane layer; depositing a protective photoresist layer on the second conductive layer; patterning and hard-baking the photoresist layer; removing a portion of the substrate from the bottom side of the substrate, forming an etched opening in the substrate; removing a portion of the top protective layer; removing a portion of the second conductive layer to form a patterned second conductive layer; and removing the patterned photoresist layer. Changes in shape of the resulting piezoelectric arrangement allow a deflection of the membrane and a corresponding controllable upward or downward movement of the conductive element.
摘要翻译：公开了一种制造用于通过形成包含膜，导电层和压电致动器的载体衬底来调谐电路的致动组件的制造方法。该方法包括以下步骤：提供在底侧具有底部保护层并在顶侧蚀刻沟槽的衬底; 在衬底的顶侧上沉积顶部保护层; 在顶部保护层上沉积第一导电层; 图案化第一导电层; 图案化底部保护层以形成与图案化的第一导电层对准的蚀刻掩模; 在所述基板的上侧形成压电结构; 沿着衬底的顶侧并且在压电结构之上沉积膜层; 固化膜层; 在固化膜层上沉积第二导电层; 在第二导电层上沉积保护光致抗蚀剂层; 图案化和硬烘烤光致抗蚀剂层; 从衬底的底侧去除衬底的一部分，在衬底中形成刻蚀开口; 去除顶部保护层的一部分; 去除所述第二导电层的一部分以形成图案化的第二导电层; 并去除图案化的光致抗蚀剂层。所得压电装置的形状变化允许膜的偏转和导电元件的相应可控的向上或向下运动。

10. 发明授权

US07928389B1 Wide bandwidth infrared detector and imager 有权
标题翻译：宽带红外探测器和成像仪
公开(公告)号：US07928389B1
公开(公告)日：2011-04-19
申请号：US12544788
申请日：2009-08-20
申请人： Daniel Yap , Rajesh D. Rajavel , Sarabjit Mehta , Joseph S. Colburn
发明人： Daniel Yap , Rajesh D. Rajavel , Sarabjit Mehta , Joseph S. Colburn
IPC分类号： H01L31/0236
CPC分类号： H01L31/1844 , H01L27/14685 , H01L31/02363 , H01L31/035281 , H01L31/1892 , Y02E10/50
摘要： An apparatus and method for a detector are disclosed. The apparatus disclosed contains an extractor layer, an absorber layer disposed adjacent to the extractor layer, a first electrical contact and a second electrical contact. The absorber layer is configured to absorb photons of incident light and generate minority electrical carriers and majority electrical carriers. In the disclosed apparatus, the top surface of the absorber layer is shaped as a pyramid, the extractor layer is electrically connected with the absorber layer and with the first electrical contact for extracting the minority electrical carriers, and the absorber layer is electrically connected with the extractor layer and with the second electrical contact to extract the majority electrical carriers.
摘要翻译：公开了一种检测器的装置和方法。所公开的装置包括提取器层，邻近提取器层设置的吸收层，第一电接触和第二电接触。吸收层被配置为吸收入射光的光子并产生少数电载体和多数电载体。在所公开的装置中，吸收体层的顶面成形为金字塔，提取层与吸收层电连接，第一电接点用于抽取少数电气载体，吸收层与提取器层和第二电接触以提取大多数电载体。

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