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    • 2. 发明授权
    • Variable shear A. C. interferometer
    • 可变剪切A.C干涉仪
    • US06304325B1
    • 2001-10-16
    • US05868951
    • 1978-01-12
    • John W. HardyJoseph E. LefebvreChris L. Koliopoulos
    • John W. HardyJoseph E. LefebvreChris L. Koliopoulos
    • G01B902
    • G01B9/0207G01B9/02027G01B9/0209G01B9/02098G01B11/2441G01B2290/10G01B2290/30
    • Variable shear A.C. interferometer based on a rotating radial grating. Light is passed through the rotating radial grating to produce multiple sidebands diffracted at various angles. These multiple sidebands produce overlapping (sheared) images of the input wavefront at a detector plane causing intensity variations proportional to the phase difference between the sheared wavefronts. An array of detectors is positioned to monitor the images on the detector plane and the outputs of each are processed to obtain the local slope of the wavefront averaged over each detector. From this data, complete wavefront slope information in one direction (X) can be obtained. By providing a second interferometer to make slope measurements in the Y direction, complete information can be obtained from which the entire input wavefront can be reconstructed. The system provided can be used with white light extended sources, has high optical efficiency, requires only a small number of optical components and is relatively insensitive to vibration. The amount of shear can also be easily varied by translating the grating rotation axis relative to the optical
    • 基于旋转径向光栅的可变剪切干涉仪。 光通过旋转的径向光栅以产生以各种角度衍射的多个边带。 这些多个边带在检测器平面处产生输入波前的重叠(剪切)图像,导致与剪切波前的相位差成比例的强度变化。 检测器阵列被定位成监测检测器平面上的图像,并且每个检测器的输出被处理以获得在每个检测器上平均的波前的局部斜率。 从该数据,可以获得一个方向(X)的完整波前斜率信息。 通过提供第二干涉仪在Y方向进行斜率测量,可以获得完整的信息,从而可以重构整个输入波阵面。所提供的系统可以与白光扩展源一起使用,具有高光学效率,只需要一个小的 光学元件的数量并且对振动相对不敏​​感。 剪切的量也可以通过相对于光学平移光栅旋转轴而容易地变化
    • 3. 发明授权
    • Wavefront sensor using a surface acoustic wave diffraction grating
    • 波前传感器使用表面声波衍射光栅
    • US4474467A
    • 1984-10-02
    • US335118
    • 1981-12-28
    • John W. HardyJeffrey H. Everson
    • John W. HardyJeffrey H. Everson
    • G01J9/02G02F1/11G01B9/02
    • G01J9/02G02F1/11G01J2009/0219
    • A wavefront sensor for detecting the slope of an input wavefront. A surface acoustic wave reflective diffraction grating is positioned at a focal point of the wavefront, and generates surface acoustic waves at two primary frequencies f.sub.1 and f.sub.2. The reflective diffraction grating produces a first AC shearing interferogram between two like diffraction orders generated by the f.sub.1 and f.sub.2 surface acoustic waves. A photodetector array is positioned to detect the shearing interferogram at a two dimensional array of zones, and the phase of the output signal for each zone is representative of the local slope of the wavefront in the direction of shearing, thus producing the slope in one direction. Complete two dimensional wavefront slope information is obtained by shearing the wavefront in a second orthogonal direction in substantially the same manner utilizing a second surface acoustic wave diffraction grating and a second photodetector array.
    • 用于检测输入波前的斜率的波前传感器。 表面声波反射衍射光栅位于波前的焦点处,并在两个主频f1和f2处产生表面声波。 反射衍射光栅在由f1和f2表面声波产生的两个相似衍射级之间产生第一AC剪切干涉图。 定位光电检测器阵列以检测区域的二维阵列上的剪切干涉图,并且每个区域的输出信号的相位表示在剪切方向上波前的局部斜率,从而在一个方向上产生斜率 。 通过使用第二表面声波衍射光栅和第二光电检测器阵列以基本相同的方式在第二正交方向上剪切波前来获得完整的二维波前斜率信息。
    • 5. 发明授权
    • Wavefront sensor with astigmatic optics
    • 带散光光学的波前传感器
    • US4441019A
    • 1984-04-03
    • US343653
    • 1982-01-28
    • John W. Hardy
    • John W. Hardy
    • G01J9/00G01J1/20
    • G01J9/00
    • A relatively simple wavefront sensor is constructed with an astigmatic optical system which focuses an indicent wavefront to x and y focal planes, with the x and y focal planes being relatively displaced along the optical axis because of the astigmatic nature of the optical system. An x modulation reticle is positioned at the x focal plane, and an x drive tuning fork drives the x modulation reticle in linear oscillation at a frequency f.sub.x to modulate the wavefront thereat. A y modulation reticle is positioned at the y focal plane, and a y drive tuning fork drives the y modulation reticle in oscillation, substantially perpendicular to the direction of oscillation of the x modulation reticle, at a frequency f.sub.y, different from the frequency f.sub.x, to also modulate the wavefront thereat. A detector array then receives the modulated wavefront, with each detector in the array receiving and detecting a different zone of the incident wavefront. An x electrical filter is coupled to the output of each detector, tuned to the frequency f.sub.x, to filter out the modulated signal derived from modulation by the x modulation reticle, and a y electrical filter is also coupled to the output of each detector, tuned to the frequency f.sub.y, to filter out the modulated signal derived from modulation by said y modulation reticle. The arrangement is such that the time relationships between the signals produced by the detectors in the array ar representative of the slopes of different portions of the wavefront.
    • 相对简单的波前传感器由具有散射光学系统的像散光学系统构成,其将指示波前聚焦到x和y焦平面,由于光学系统的散光性质,x和y焦平面沿着光轴相对移位。 x调制掩模版位于x焦平面处,x驱动音叉以频率fx以线性振荡驱动x调制掩模版,以调制波前的波前。 y调制掩模版位于y焦平面处,并且驱动音叉以与频率fx不同的频率fy,基本上垂直于x调制掩模版的振荡方向的振荡驱动y调制掩模版, 也在那里调整波前。 检测器阵列然后接收调制波前,阵列中的每个检测器接收并检测入射波前的不同区域。 x电滤波器耦合到调谐到频率fx的每个检测器的输出,以滤除由x调制掩模版调制得到的调制信号,并且电滤波器也耦合到每个检测器的输出,调谐到 频率fy滤除由所述y调制掩模版调制得到的调制信号。 该布置使得由阵列ar中的检测器产生的信号之间的时间关系表示波前不同部分的斜率。
    • 6. 发明授权
    • Wavefront sensor employing a modulation reticle
    • 采用调制掩模版的波前传感器
    • US4438330A
    • 1984-03-20
    • US353554
    • 1982-03-01
    • John W. Hardy
    • John W. Hardy
    • G01J9/00G02B26/06
    • G02B26/06G01J9/00
    • An incremental slope wavefront sensor having an optical system which focuses an incident wavefront to a focal point. A novel modulation reticle is positioned at the focal point, and is driven in linear oscillation along a single axis. The modulation reticle has a modulation pattern formed thereon by alternating triangular light transmissive areas and inverted triangular light reflective areas. A first detector array detects the wavefront which has passed through the transmissive areas and diverged from the focal point in a two dimensional array of zones. A second detector array detects the wavefront which has been reflected by the reflective areas and diverged from the focal point in a two dimensional array of zones. The output signals from the first and second detector arrays for each corresponding zone are differentially combined to form a differential output signal for each zone. The y position of detected radiation in each zone of the wavefront is obtained by multiplying its differential output signal by a weighting function proportional to the instantaneous velocity of the reticle. The x position of detected radiation in each zone is obtained by multiplying its differential output signal by a weighting function proportional to the instantaneous velocity of the reticle and by a square wave function having respectively positive and negative values when the displacement of the reticle along the single axis is respectively positive and negative with respect to a coordinate system defined by the modulation pattern.
    • 具有将入射波前聚焦到焦点的光学系统的增量斜率波前传感器。 一个新的调制掩模版位于焦点处,并沿着单个轴线性振荡驱动。 调制掩模版具有通过交替的三角形透光区域和倒置的三角形光反射区域形成在其上的调制图案。 第一检测器阵列检测已经穿过透射区域并在二维阵列阵列中从焦点发散的波前。 第二检测器阵列检测已被反射区域反射并且在二维阵列阵列中从焦点发散的波前。 来自每个对应区域的来自第一和第二检测器阵列的输出信号被差分地组合以形成每个区域的差分输出信号。 通过将其差分输出信号乘以与掩模版的瞬时速度成比例的加权函数,获得波阵面的每个区域中检测到的辐射的y位置。 每个区域中检测到的辐射的x位置通过将其差分输出信号乘以与掩模版的瞬时速度成比例的加权函数,并通过具有分别为正值和负值的方波函数来获得,当标线沿着单个位移 轴相对于由调制图案定义的坐标系分别是正的和负的。