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    • 4. 发明授权
    • Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements
    • 计量系统的照明子系统,计量系统以及用于计量测量的照明样本的方法
    • US09080990B2
    • 2015-07-14
    • US13061936
    • 2009-09-29
    • Yung-Ho (Alex) ChuangVladimir LevinskiXuefeng Liu
    • Yung-Ho (Alex) ChuangVladimir LevinskiXuefeng Liu
    • G01N21/55G01N21/95G01N21/47
    • G01N21/9501G01N2021/479
    • Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements are provided. One illumination subsystem includes a light source configured to generate coherent pulses of light and a dispersive element positioned in the path of the coherent pulses of light, which is configured to reduce coherence of the pulses of light by mixing spatial and temporal characteristics of light distribution in the pulses of light. The illumination subsystem also includes an electro-optic modulator positioned in the path of the pulses of light exiting the dispersive element and which is configured to reduce the coherence of the pulses of light by temporally modulating the light distribution in the pulses of light. The illumination subsystem is configured to direct the pulses of light from the electro-optic modulator to a specimen positioned in the metrology system.
    • 提供了计量系统的照明子系统,计量系统和用于度量测量的照明样本的方法。 一个照明子系统包括被配置为产生相干的光脉冲的光源和位于相干脉冲光的路径中的色散元件,该色散元件被配置为通过将光分布的空间和时间特征混合在一起来减小光脉冲的相干性 光的脉冲。 照明子系统还包括位于离开色散元件的光的脉冲的路径中的电光调制器,其被配置为通过暂时调制光脉冲中的光分布来减小光脉冲的相干性。 照明子系统被配置为将来自电光调制器的光的脉冲引导到位于计量系统中的样本。
    • 7. 发明授权
    • On-chip transmission line structures with balanced phase delay
    • 具有平衡相位延迟的片上传输线结构
    • US08860191B2
    • 2014-10-14
    • US13168512
    • 2011-06-24
    • Hanyi DingKai D. FengZhong-Xiang HeXuefeng Liu
    • Hanyi DingKai D. FengZhong-Xiang HeXuefeng Liu
    • H01L23/66H01P1/18H01L23/522
    • H01L23/5222H01L23/5225H01L23/66H01L2223/6638H01L2924/0002H01P1/184Y10T29/49117H01L2924/00
    • A transmission wiring structure, associated design structure and associated method for forming the same. A structure is disclosed having: a plurality of wiring levels formed on a semiconductor substrate; a pair of adjacent first and second signal lines located in the wiring levels, wherein the first signal line comprises a first portion formed on a first wiring level and a second portion formed on a second wiring level; a primary dielectric structure having a first dielectric constant located between the first portion and a ground shield; and a secondary dielectric structure having a second dielectric constant different than the first dielectric constant, the secondary dielectric structure located between the second portion and the ground shield, and the second dielectric layer extending co-planar with the second portion and having a length that is substantially the same as the second portion.
    • 一种传输线路结构,相关设计结构及其相关方法。 公开了一种结构,其具有:形成在半导体衬底上的多个布线层; 位于布线层中的一对相邻的第一和第二信号线,其中第一信号线包括形成在第一布线层上的第一部分和形成在第二布线层上的第二部分; 第一介电结构,其具有位于第一部分和接地屏蔽之间的第一介电常数; 以及具有不同于所述第一介电常数的第二介电常数的次级介电结构,所述第二介电结构位于所述第二部分和所述接地屏蔽之间,并且所述第二电介质层与所述第二部分共面延伸并且具有长度为 基本上与第二部分相同。