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    • 10. 发明授权
    • Micromachined ultrasonic spiral arrays for medical diagnostic imaging
    • 用于医疗诊断成像的微加工超声波螺旋阵列
    • US06359367B1
    • 2002-03-19
    • US09455881
    • 1999-12-06
    • Thilaka S. SumanaweeraSevig AyterJohn W. Sliwa, Jr.
    • Thilaka S. SumanaweeraSevig AyterJohn W. Sliwa, Jr.
    • H02N100
    • B06B1/0292
    • Spiral, sparse spiral, substantially spiral or substantially sparse spiral transducer arrays comprising capacitive micromachined ultrasonic transducer elements disposed on a silicon substrate, and ultrasound imaging systems employing same. The transducer elements are respectively coupled to a plurality of amplifiers. Imager electronics are coupled to each of the amplifiers and drives the transducer elements and/or generates an output of the spiral transducer array. The amplifiers may be located in the silicon substrate containing the transducer elements, or on a separate substrate that is interconnected to the substrate containing the transducer elements using bumps, for example. Electrical interconnection to the transducer elements may readily be achieved without interfering with the acoustic output of the transducer elements.
    • 包括设置在硅衬底上的电容微加工超声换能器元件的螺旋,稀疏螺旋,基本螺旋或基本上稀疏的螺旋形换能器阵列,以及采用其的超声成像系统。 换能器元件分别耦合到多个放大器。 成像仪电子器件耦合到每个放大器并驱动换能器元件和/或产生螺旋换能器阵列的输出。 放大器可以位于包含换能器元件的硅衬底中,或者位于使用例如使用凸块互连到包含换能器元件的衬底的单独衬底上。 可以容易地实现与换能器元件的电互连,而不会干扰换能器元件的声输出。