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1. 发明申请

US20100294053A1 PROBE HOLDER 有权
标题翻译：探索者
公开(公告)号：US20100294053A1
公开(公告)日：2010-11-25
申请号：US12681967
申请日：2008-10-10
申请人： Joerg Kiesewetter , Stojan Kanev , Stefan Kreissig
发明人： Joerg Kiesewetter , Stojan Kanev , Stefan Kreissig
IPC分类号： G01D21/00
CPC分类号： G01R31/2889 , G01R31/2887
摘要： A probe holder has a manipulator, a probe arm arranged on the manipulator, and a probe needle that is at least indirectly connected to the probe arm. To increase the number of contacts of a substrate to be tested and to make it possible to test a plurality of contacts in etched trenches of semiconductor elements in a group of wafers, the probe arm is connected to a needle support on which the probe needle and at least one second probe needle are arranged.
摘要翻译：探针支架具有操纵器，布置在操纵器上的探针臂和至少间接地连接到探针臂的探针。为了增加要测试的衬底的触点数量，并且可以在一组晶片中的半导体元件的蚀刻沟槽中测试多个触点，探针臂连接到针支撑件上，探头针和至少设置一个第二探针。

2. 发明授权

US08402848B2 Probe holder 有权
标题翻译：探头架
公开(公告)号：US08402848B2
公开(公告)日：2013-03-26
申请号：US12681967
申请日：2008-10-10
申请人： Joerg Kiesewetter , Stojan Kanev , Stefan Kreissig
发明人： Joerg Kiesewetter , Stojan Kanev , Stefan Kreissig
IPC分类号： G01N15/00
CPC分类号： G01R31/2889 , G01R31/2887
摘要： A probe holder has a manipulator, a probe arm arranged on the manipulator, and a probe needle that is at least indirectly connected to the probe arm. To increase the number of contacts of a substrate to be tested and to make it possible to test a plurality of contacts in etched trenches of semiconductor elements in a group of wafers, the probe arm is connected to a needle support on which the probe needle and at least one second probe needle are arranged.
摘要翻译：探针支架具有操纵器，布置在操纵器上的探针臂和至少间接地连接到探针臂的探针。为了增加要测试的衬底的触点数量，并且可以在一组晶片中的半导体元件的蚀刻沟槽中测试多个触点，探针臂连接到针支撑件上，探头针和至少设置一个第二探针。

3. 发明授权

US08497693B2 Method for testing a test substrate under defined thermal conditions and thermally conditionable prober 有权
标题翻译：在确定的热条件下测试测试基板的方法和热定向探针
公开(公告)号：US08497693B2
公开(公告)日：2013-07-30
申请号：US12681806
申请日：2008-10-01
申请人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
发明人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
IPC分类号： G01R31/00
CPC分类号： G01R31/2891 , G01R31/2874
摘要： In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.
摘要翻译：在用于在限定的热条件下测试测试基板的方法和装置中，待测试的基板由温度可控的卡盘保持并设定在限定的温度; 测试基板通过至少一个定位装置相对于测试探针定位; 并且测试探针与测试基板接触以进行测试。存在于受温度控制的测试基板附近的定位装置的至少一个部件通过温度控制装置设定为与测试基板的温度无关的温度，并且该温度保持恒定。

4. 发明申请

US20100289511A1 METHOD FOR TESTING A TEST SUBSTRATE UNDER DEFINED THERMAL CONDITIONS AND THERMALLY CONDITIONABLE PROBER 有权
标题翻译：在定义的热条件和热调节探头下测试测试基板的方法
公开(公告)号：US20100289511A1
公开(公告)日：2010-11-18
申请号：US12681806
申请日：2008-10-01
申请人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
发明人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
IPC分类号： G01R31/00
CPC分类号： G01R31/2891 , G01R31/2874
摘要： In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.
摘要翻译：在用于在限定的热条件下测试测试基板的方法和装置中，待测试的基板由温度可控的卡盘保持并设定在限定的温度; 测试基板通过至少一个定位装置相对于测试探针定位; 并且测试探针与测试基板接触以进行测试。存在于受温度控制的测试基板附近的定位装置的至少一个部件通过温度控制装置设定为与测试基板的温度无关的温度，并且该温度保持恒定。

5. 发明授权

US07282930B2 Device for testing thin elements 有权
标题翻译：用于测试薄元素的设备
公开(公告)号：US07282930B2
公开(公告)日：2007-10-16
申请号：US11314624
申请日：2005-12-21
申请人： Uwe Beier , Dietmar Runge , Stefan Kreissig , Steffen Grauer , Matthias Rottka , Botho Hirschfeld , Joerg Kiesewetter
发明人： Uwe Beier , Dietmar Runge , Stefan Kreissig , Steffen Grauer , Matthias Rottka , Botho Hirschfeld , Joerg Kiesewetter
IPC分类号： G01R31/302
CPC分类号： G01R31/2831
摘要： A device for testing thin elements, such as wafers or individual substrates, while at the same time offering a facility for inspecting the reverse side of the thin elements is provided in which any deflection of the substrate as a consequence of high contact power of the probe card is avoided and which is also suitable for substrate diameters of 200 mm and above. The device includes a stable plate with a central opening positioned on the basic construction, a frame which can be moved and/or turned on the plate in an x/y direction and, if required, in a theta direction, a highly-rigid substrate support which can be mounted in the frame, and substrates which can be mounted on the substrate support, wherein the mounting is effected through a vacuum, using mechanical elements (clamping ring, clamping foil or other suitable clamping elements), gel pack pads, or adhesive etc.
摘要翻译：提供了用于测试诸如晶片或单独基板的薄元件的装置，同时提供用于检查薄元件的反面的设备，其中作为探针的高接触功率的结果的基板的任何偏转避免卡片，也适用于200mm及以上的基材直径。该装置包括具有位于基本结构上的中心开口的稳定板，可在x / y方向上移动和/或转动板的框架，并且如果需要，在θ方向上可以是高度刚性的基板可以安装在框架中的支撑件以及可以安装在基板支撑件上的基板，其中通过真空使用机械元件（夹紧环，夹紧箔或其它合适的夹紧元件），凝胶封装垫或粘合剂等

6. 发明授权

US07235990B1 Probe station comprising a bellows with EMI shielding capabilities 有权
标题翻译：探头台包括具有EMI屏蔽功能的波纹管
公开(公告)号：US07235990B1
公开(公告)日：2007-06-26
申请号：US11299487
申请日：2005-12-12
申请人： Stefan Kreissig , Joerg Kiesewetter
发明人： Stefan Kreissig , Joerg Kiesewetter
IPC分类号： G01R31/02
CPC分类号： G01R31/2886
摘要： A probe station allows for effective EMI shielding of the passage of the probe through the wall of the housing of such probe station. The probe is freely movable in the X, Y and Z directions. The probe station comprises a housing having at least one aperture through which a probe can extend, a chuck for supporting a test device, the chuck being arranged inside the housing, at least one probe support for supporting a probe, the probe support being arranged relative to the housing such that a first portion of the probe extends into the housing through one of said apertures, at least one positioning mechanism enabling at least one of said probe and said chuck to move relative to the other, and is characterized in that at least one electrically conductive, elastic bellows is attached to the edge of an aperture which provides a variable passage for the probe.
摘要翻译：探针台允许通过探针台的壳体的壁对探针的通道进行有效的EMI屏蔽。探头可以在X，Y和Z方向上自由移动。探针台包括一个壳体，该壳体具有至少一个探针能够延伸穿过的孔口，用于支撑测试装置的卡盘，卡盘布置在壳体内部，至少一个用于支撑探针的探针支架，探针支架相对于所述探针的第一部分通过所述孔中的一个延伸到所述壳体中，所述至少一个定位机构使所述探针和所述卡盘中的至少一个能够相对于另一个移动，并且其特征在于至少一个导电的弹性波纹管连接到孔的边缘，为探针提供可变通道。

7. 发明申请

US20060212248A1 Procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate in a probe station 有权
标题翻译：在探测台中再现对准的和之后移位的校准基板的校准位置的步骤
公开(公告)号：US20060212248A1
公开(公告)日：2006-09-21
申请号：US11365424
申请日：2006-03-01
申请人： Joerg Kiesewetter , Axel Schmidt , Stefan Kreissig , Karsten Stoll , Ralph Juettner , Hans-Juergen Fleischer
发明人： Joerg Kiesewetter , Axel Schmidt , Stefan Kreissig , Karsten Stoll , Ralph Juettner , Hans-Juergen Fleischer
IPC分类号： G01C17/38
CPC分类号： G01R31/2891
摘要： A wafer probe station is provided with a wafer chuck, a wafer fastened on the chuck by vacuum suction, and a probe needle arrangement above the wafer to test the wafer at high frequencies by contacting selected pads on the wafer and alternately pads on a calibration substrate also fastened on the wafer chuck. A procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate uses first and second measurement systems to calculate a new offset position of the calibration substrate after a second wafer is loaded on the wafer chuck. In a last step, the wafer chuck is driven by a 4axis manipulator stage to the new calibration position from the recent position.
摘要翻译：晶片探针台设置有晶片卡盘，通过真空吸附紧固在卡盘上的晶片，以及在晶片上方的探针针布置，以通过接触晶片上的选定的焊盘并在校准基板上交替地焊接来高速测试晶片也固定在晶片卡盘上。用于再现对准的和随后移位的校准基板的校准位置的过程使用第一和第二测量系统来计算在第二晶片装载在晶片卡盘上之后校准基板的新偏移位置。在最后一步中，晶片卡盘由最近的位置由4轴的机械手级驱动到新的校准位置。

8. 发明申请

US20070132465A1 PROBE STATION COMPRISING A BELLOWS WITH EMI SHIELDING CAPABILITIES 有权
标题翻译：包含EMI屏蔽能力的BELLOWS的探索站
公开(公告)号：US20070132465A1
公开(公告)日：2007-06-14
申请号：US11299487
申请日：2005-12-12
申请人： Stefan Kreissig , Joerg Kiesewetter
发明人： Stefan Kreissig , Joerg Kiesewetter
IPC分类号： G01R31/02
CPC分类号： G01R31/2886
摘要： A probe station allows for effective EMI shielding of the passage of the probe through the wall of the housing of such probe station. The probe is freely movable in the X, Y and Z directions. The probe station comprises a housing having at least one aperture through which a probe can extend, a chuck for supporting a test device, the chuck being arranged inside the housing, at least one probe support for supporting a probe, the probe support being arranged relative to the housing such that a first portion of the probe extends into the housing through one of said apertures, at least one positioning mechanism enabling at least one of said probe and said chuck to move relative to the other, and is characterized in that at least one electrically conductive, elastic bellows is attached to the edge of an aperture which provides a variable passage for the probe.
摘要翻译：探针台允许通过探针台的壳体的壁对探针的通道进行有效的EMI屏蔽。探头可以在X，Y和Z方向上自由移动。探针台包括一个壳体，该壳体具有至少一个探针能够延伸穿过的孔口，用于支撑测试装置的卡盘，卡盘布置在壳体内部，至少一个用于支撑探针的探针支架，探针支架相对于所述探针的第一部分通过所述孔中的一个延伸到所述壳体中，所述至少一个定位机构使所述探针和所述卡盘中的至少一个能够相对于另一个移动，并且其特征在于至少一个导电的弹性波纹管连接到孔的边缘，为探针提供可变通道。

9. 发明授权

US07265536B2 Procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate in a probe station 有权
标题翻译：在探测台中再现对准的和之后移位的校准基板的校准位置的步骤
公开(公告)号：US07265536B2
公开(公告)日：2007-09-04
申请号：US11365424
申请日：2006-03-01
申请人： Joerg Kiesewetter , Axel Schmidt , Stefan Kreissig , Karsten Stoll , Ralph Juettner , Hans-Juergen Fleischer
发明人： Joerg Kiesewetter , Axel Schmidt , Stefan Kreissig , Karsten Stoll , Ralph Juettner , Hans-Juergen Fleischer
IPC分类号： G01R31/02 , G01R35/00
CPC分类号： G01R31/2891
摘要： A wafer probe station is provided with a wafer chuck, a wafer fastened on the chuck by vacuum suction, and a probe needle arrangement above the wafer to test the wafer at high frequencies by contacting selected pads on the wafer and alternately pads on a calibration substrate also fastened on the wafer chuck. A procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate uses first and second measurement systems to calculate a new offset position of the calibration substrate after a second wafer is loaded on the wafer chuck. In a last step, the wafer chuck is driven by a 4axis manipulator stage to the new calibration position from the recent position.
摘要翻译：晶片探针台设置有晶片卡盘，通过真空吸附紧固在卡盘上的晶片，以及在晶片上方的探针针布置，以通过接触晶片上的选定的焊盘并在校准基板上交替地焊接来高速测试晶片也固定在晶片卡盘上。用于再现对准的和随后移位的校准基板的校准位置的过程使用第一和第二测量系统来计算在第二晶片装载在晶片卡盘上之后校准基板的新偏移位置。在最后一步中，晶片卡盘由最近的位置由4轴的机械手级驱动到新的校准位置。

10. 发明申请

US20070139067A1 Device for testing thin elements 有权
标题翻译：用于测试薄元素的设备
公开(公告)号：US20070139067A1
公开(公告)日：2007-06-21
申请号：US11314624
申请日：2005-12-21
申请人： Uwe Beier , Dietmar Runge , Stefan Kreissig , Steffen Grauer , Matthias Rottka , Botho Hirschfeld , Joerg Kiesewetter
发明人： Uwe Beier , Dietmar Runge , Stefan Kreissig , Steffen Grauer , Matthias Rottka , Botho Hirschfeld , Joerg Kiesewetter
IPC分类号： G01R31/26
CPC分类号： G01R31/2831
摘要： A device for testing thin elements, such as wafers or individual substrates, while at the same time offering a facility for inspecting the reverse side of the thin elements is provided in which any deflection of the substrate as a consequence of high contact power of the probe card is avoided and which is also suitable for substrate diameters of 200 mm and above. The device includes a stable plate with a central opening positioned on the basic construction, a frame which can be moved and/or turned on the plate in an x/y direction and, if required, in a theta direction, a highly-rigid substrate support which can be mounted in the frame, and substrates which can be mounted on the substrate support, wherein the mounting is effected through a vacuum, using mechanical elements (clamping ring, clamping foil or other suitable clamping elements), gel pack pads, or adhesive etc.)
摘要翻译：提供了用于测试诸如晶片或单独基板的薄元件的装置，同时提供用于检查薄元件的反面的设备，其中作为探针的高接触功率的结果的基板的任何偏转避免卡片，也适用于200mm及以上的基材直径。该装置包括具有位于基本结构上的中心开口的稳定板，可在x / y方向上移动和/或转动板的框架，并且如果需要，在θ方向上可以是高度刚性的基板可以安装在框架中的支撑件以及可以安装在基板支撑件上的基板，其中通过真空使用机械元件（夹紧环，夹紧箔或其它合适的夹紧元件），凝胶封装垫或粘合剂等）

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