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1. 发明申请

US20100289511A1 METHOD FOR TESTING A TEST SUBSTRATE UNDER DEFINED THERMAL CONDITIONS AND THERMALLY CONDITIONABLE PROBER 有权
标题翻译：在定义的热条件和热调节探头下测试测试基板的方法
公开(公告)号：US20100289511A1
公开(公告)日：2010-11-18
申请号：US12681806
申请日：2008-10-01
申请人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
发明人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
IPC分类号： G01R31/00
CPC分类号： G01R31/2891 , G01R31/2874
摘要： In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.
摘要翻译：在用于在限定的热条件下测试测试基板的方法和装置中，待测试的基板由温度可控的卡盘保持并设定在限定的温度; 测试基板通过至少一个定位装置相对于测试探针定位; 并且测试探针与测试基板接触以进行测试。存在于受温度控制的测试基板附近的定位装置的至少一个部件通过温度控制装置设定为与测试基板的温度无关的温度，并且该温度保持恒定。

2. 发明授权

US08497693B2 Method for testing a test substrate under defined thermal conditions and thermally conditionable prober 有权
标题翻译：在确定的热条件下测试测试基板的方法和热定向探针
公开(公告)号：US08497693B2
公开(公告)日：2013-07-30
申请号：US12681806
申请日：2008-10-01
申请人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
发明人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
IPC分类号： G01R31/00
CPC分类号： G01R31/2891 , G01R31/2874
摘要： In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.
摘要翻译：在用于在限定的热条件下测试测试基板的方法和装置中，待测试的基板由温度可控的卡盘保持并设定在限定的温度; 测试基板通过至少一个定位装置相对于测试探针定位; 并且测试探针与测试基板接触以进行测试。存在于受温度控制的测试基板附近的定位装置的至少一个部件通过温度控制装置设定为与测试基板的温度无关的温度，并且该温度保持恒定。

3. 发明授权

US08240650B2 Chuck with triaxial construction 有权
标题翻译：夹头三轴结构
公开(公告)号：US08240650B2
公开(公告)日：2012-08-14
申请号：US12048323
申请日：2008-03-14
申请人： Michael Teich , Karsten Stoll , Axel Schmidt , Stojan Kanev , Jörg Kiesewetter
发明人： Michael Teich , Karsten Stoll , Axel Schmidt , Stojan Kanev , Jörg Kiesewetter
IPC分类号： B25B1/00 , B23Q3/00 , G01R31/20 , F28F7/00 , B23B31/30 , B23B31/12
CPC分类号： G01R1/04 , G01R31/2865 , H01L21/68714 , H01L21/68757 , Y10T279/11 , Y10T279/18
摘要： A chuck with triaxial construction comprises a receiving surface for a test substrate and arranged below the receiving surface: an electrically conductive first surface element, an electrically conductive second surface element electrically insulated therefrom, and an electrically conductive third surface element electrically insulated therefrom, and, between the first and the second surface element, a first insulation element and, between the second and the third surface element, a second insulation element. A chuck for very low current measurements which can be used to prevent the occurrence of leakage currents and a triboelectric charge and which is configured favourably in terms of production, is achieved because at least one of the electrically conductive surface elements is mechanically connected to at least one insulation element and has an elasticity that compensates for an expansion difference resulting from differences in different coefficients of expansion between a respective surface element and an adjoining insulation element.
摘要翻译：具有三轴结构的卡盘包括用于测试基板的接收表面并且布置在接收表面下方：导电的第一表面元件，与其电绝缘的导电的第二表面元件和与其电绝缘的导电的第三表面元件，在第一和第二表面元件之间，第一绝缘元件和第二和第三表面元件之间的第二绝缘元件。实现了用于非常低的电流测量的卡盘，其可用于防止泄漏电流和摩擦电荷的发生，并且在生产方面被有利地配置，这是因为至少一个导电表面元件至少机械地连接到一个绝缘元件并且具有补偿由相应的表面元件和相邻绝缘元件之间的不同膨胀系数的差异引起的膨胀差的弹性。

4. 发明授权

US08344744B2 Probe station for on-wafer-measurement under EMI-shielding 有权
标题翻译：探测台用于EMI屏蔽下的晶圆测量
公开(公告)号：US08344744B2
公开(公告)日：2013-01-01
申请号：US12818442
申请日：2010-06-18
申请人： Axel Schmidt , Botho Hirschfeld , Stojan Kanev , Andrej Rumiantsev , Michael Teich
发明人： Axel Schmidt , Botho Hirschfeld , Stojan Kanev , Andrej Rumiantsev , Michael Teich
IPC分类号： G01R31/00
CPC分类号： G01R31/2886 , G01R1/18
摘要： An arrangement is provided for testing DUTs with a chuck that has a support surface for supporting of a DUT as well as for supplying the support surface with a defined potential, or for connecting the DUT. The arrangement further includes a positioning device for positioning the chuck as well as an electromagnetic shielding housing enclosing at least the chuck. Inside the housing and adjacent to the chuck, a signal preamplifier is arranged whose signal port facing the chuck is electrically connected with the support surface, wherein the signal preamplifier is moveable together with the chuck by the positioning device in a way that it holds its position constant relative to the chuck during positioning. The signal preamplifier is connected to a measurement unit outside of the housing via a measurement cable.
摘要翻译：提供了一种用于使用具有用于支撑DUT的支撑表面以及用于向支撑表面提供限定电位或用于连接DUT的卡盘来测试DUT的布置。该装置还包括用于定位卡盘的定位装置以及至少包围卡盘的电磁屏蔽壳体。在壳体内部和卡盘附近，布置了一个信号前置放大器，其信号端口面向卡盘与支撑表面电连接，其中信号前置放大器可以通过定位装置与卡盘一起移动，使其保持其位置在定位期间相对于卡盘是恒定的。信号前置放大器通过测量电缆连接到壳体外部的测量单元。

5. 发明申请

US20110241711A1 METHOD FOR VERIFYING A TEST SUBSTRATE IN A PROBER UNDER DEFINED THERMAL CONDITIONS 有权
标题翻译：用于在定义的热条件下在探测器中验证测试基板的方法
公开(公告)号：US20110241711A1
公开(公告)日：2011-10-06
申请号：US13119145
申请日：2009-07-31
申请人： Michael Teich , Stojan Kanev , Hans-Jurgen Fleischer
发明人： Michael Teich , Stojan Kanev , Hans-Jurgen Fleischer
IPC分类号： G01R31/00
CPC分类号： G01R1/0408 , G01R31/2855 , G01R31/2874 , G01R31/2875 , G01R31/2886
摘要： A method and an apparatus for verifying or testing test substrates, i.e. wafers and other electronic semiconductor components, in a prober under defined thermal conditions. Such a verifying apparatus, known to the person skilled in the art as a prober, has a housing having at least two housing sections, in one housing section of which, designated hereinafter as test chamber, the test substrate to be verified is held by a chuck and is set to a defined temperature, and in the other housing section of which, designated hereinafter as probe chamber, probes are held. For verification purposes, the test substrate and the probes are positioned relative to one another by means of at least one positioning device and the probes subsequently make contact with the test substrate.
摘要翻译：一种用于在确定的热条件下在探测器中验证或测试测试基板，即晶片和其它电子半导体部件的方法和装置。这种本领域技术人员已知的探测器的验证装置具有壳体，该壳体具有至少两个壳体部分，在其一个壳体部分中，下文称为测试室，待验证的测试基板由卡盘并设定在限定的温度，并且在其另一个壳体部分中，下文称为探针室，探针被保持。为了验证目的，测试基板和探针通过至少一个定位装置相对于彼此定位，并且探头随后与测试基板接触。

6. 发明授权

US08692567B2 Method for verifying a test substrate in a prober under defined thermal conditions 有权
标题翻译：用于在确定的热条件下验证探测器中的测试基板的方法
公开(公告)号：US08692567B2
公开(公告)日：2014-04-08
申请号：US13119145
申请日：2009-07-31
申请人： Michael Teich , Stojan Kanev , Hans-Jurgen Fleischer
发明人： Michael Teich , Stojan Kanev , Hans-Jurgen Fleischer
IPC分类号： G01R31/00 , G01R31/28
CPC分类号： G01R1/0408 , G01R31/2855 , G01R31/2874 , G01R31/2875 , G01R31/2886
摘要： A method and an apparatus for verifying or testing test substrates, i.e. wafers and other electronic semiconductor components, in a prober under defined thermal conditions. Such a verifying apparatus, known to the person skilled in the art as a prober, has a housing having at least two housing sections, in one housing section of which, designated hereinafter as test chamber, the test substrate to be verified is held by a chuck and is set to a defined temperature, and in the other housing section of which, designated hereinafter as probe chamber, probes are held. For verification purposes, the test substrate and the probes are positioned relative to one another by means of at least one positioning device and the probes subsequently make contact with the test substrate.
摘要翻译：一种用于在确定的热条件下在探测器中验证或测试测试基板，即晶片和其它电子半导体部件的方法和装置。这种本领域技术人员已知的探测器的验证装置具有壳体，该壳体具有至少两个壳体部分，在其一个壳体部分中，下文称为测试室，待验证的测试基板由卡盘并设定在限定的温度，并且在其另一个壳体部分中，下文称为探针室，探针被保持。为了验证目的，测试基板和探针通过至少一个定位装置相对于彼此定位，并且探头随后与测试基板接触。

7. 发明申请

US20110013011A1 ARRANGEMENT AND METHOD FOR FOCUSING A MULTIPLANE IMAGE ACQUISITION ON A PROBER 有权
标题翻译：用于聚焦探测器上多幅图像采集的布置方法
公开(公告)号：US20110013011A1
公开(公告)日：2011-01-20
申请号：US12847723
申请日：2010-07-30
申请人： Michael Teich , Ulf Hackius , Juliane Busch , Joerg Kiesewetter , Axel Becker
发明人： Michael Teich , Ulf Hackius , Juliane Busch , Joerg Kiesewetter , Axel Becker
IPC分类号： H04N7/18
CPC分类号： G02B21/365 , G02B21/06 , G02B21/244 , G02B21/26 , G02B21/32
摘要： A focused multi-planar image acquisition in real time even while a test object is moving, is achieved with a system and a method for a focused multi-planar image acquisition in a prober. When a surface of a test object is positioned laterally in relation to tips of separated probe needles, a microscope is focused on the surface of the test object at a first time and on a plane of the probe needles at a second time. The objective lens is provided with a microscope objective lens focusing system, which can focus the objective lens, independently of a vertical adjustment drive of the microscope, on the surface of the test object in a first focal plane and in a second focal plane, which is on a level with the probe needle tips.
摘要翻译：使用用于在探测器中聚焦的多平面图像采集的系统和方法来实现即使在测试对象移动时实时聚焦的多平面图像采集。当测试对象的表面相对于分离的探针的尖端横向定位时，显微镜在第一时间和第二次在探针的平面上聚焦在测试对象的表面上。物镜上设有显微镜物镜聚焦系统，该系统可独立于显微镜的垂直调节驱动物体将物镜聚焦在第一焦平面和第二焦平面上的测试物体的表面上，在探针针尖的水平上。

8. 发明授权

US08072586B2 Arrangement and method for focusing a multiplane image acquisition on a prober 有权
标题翻译：将多平面图像采集聚焦在探测器上的布置和方法
公开(公告)号：US08072586B2
公开(公告)日：2011-12-06
申请号：US12847723
申请日：2010-07-30
申请人： Michael Teich , Ulf Hackius , Juliane Busch , Joerg Kiesewetter , Axel Becker
发明人： Michael Teich , Ulf Hackius , Juliane Busch , Joerg Kiesewetter , Axel Becker
IPC分类号： G01N21/00
CPC分类号： G02B21/365 , G02B21/06 , G02B21/244 , G02B21/26 , G02B21/32
摘要： A focused multi-planar image acquisition in real time even while a test object is moving, is achieved with a system and a method for a focused multi-planar image acquisition in a prober. When a surface of a test object is positioned laterally in relation to tips of separated probe needles, a microscope is focused on the surface of the test object at a first time and on a plane of the probe needles at a second time. The objective lens is provided with a microscope objective lens focusing system, which can focus the objective lens, independently of a vertical adjustment drive of the microscope, on the surface of the test object in a first focal plane and in a second focal plane, which is on a level with the probe needle tips.
摘要翻译：使用用于在探测器中聚焦的多平面图像采集的系统和方法来实现即使在测试对象移动时实时聚焦的多平面图像采集。当测试对象的表面相对于分离的探针的尖端横向定位时，显微镜在第一时间和第二次在探针的平面上聚焦在测试对象的表面上。物镜上设有显微镜物镜聚焦系统，该系统可独立于显微镜的垂直调节驱动物体将物镜聚焦在第一焦平面和第二焦平面上的测试物体的表面上，在探针针尖的水平上。

9. 发明申请

US20080212078A1 ARRANGEMENT AND METHOD FOR FOCUSING A MULTIPLANE IMAGE ACQUISITION ON A PROBER 审中-公开
标题翻译：用于聚焦探测器上多幅图像采集的布置方法
公开(公告)号：US20080212078A1
公开(公告)日：2008-09-04
申请号：US11964744
申请日：2007-12-27
申请人： Michael Teich , Ulf Hackius , Juliane Busch , Joerg Kiesewetter
发明人： Michael Teich , Ulf Hackius , Juliane Busch , Joerg Kiesewetter
IPC分类号： G01N21/00 , G01N21/25
CPC分类号： G02B21/365 , G02B21/06 , G02B21/244 , G02B21/26 , G02B21/32
摘要： The invention relates to a system and a method for capturing images in a prober. According to the invention, the surface of a test object is illuminated in succession with light of a first, second and third color; and an image capturing device records a gray scale image of the surface; and a composite image is produced from the three gray scale images by means of an image evaluating device. The object of the invention is to qualitatively improve the image capturing, in order to raise the positioning accuracy by means of an improved display, as a result of which, finely structured test objects can be used. This object of the invention is achieved in that the lighting device is designed as a unit, which can be controlled by the image evaluating unit and which produces at least three colors and which exhibits at least one light emitting diode (LED) as the lighting means.
摘要翻译：本发明涉及一种用于在探测器中捕获图像的系统和方法。根据本发明，测试对象的表面依次用第一，第二和第三种颜色的光照亮; 并且图像捕获装置记录表面的灰度图像; 并且通过图像评估装置从三个灰度图像产生合成图像。本发明的目的是为了通过改进的显示来提高定位精度来定性改进图像捕获，结果可以使用精细结构的测试对象。本发明的目的是实现照明装置被设计为可以由图像评估单元控制并且产生至少三种颜色的单元，并且其具有作为照明装置的至少一个发光二极管（LED）。

10. 发明授权

US07038441B2 Test apparatus with loading device 有权
标题翻译：带装载装置的试验装置
公开(公告)号：US07038441B2
公开(公告)日：2006-05-02
申请号：US10677524
申请日：2003-10-02
申请人： Karsten Stoll , Stefan Kreissig , Alf Wachtveitl , Michael Teich , Stefan Schneidewind , Claus Dietrich , Jorg Kiesewetter , Dietmar Runge
发明人： Karsten Stoll , Stefan Kreissig , Alf Wachtveitl , Michael Teich , Stefan Schneidewind , Claus Dietrich , Jorg Kiesewetter , Dietmar Runge
IPC分类号： G01R31/02
CPC分类号： G01R31/2865 , G01R31/2806 , G01R31/2831 , G01R31/2887
摘要： The invention, which relates to a test apparatus with loading device which has a chuck, which is provided with a bearing surface for a test substrate and with a chuck drive, by means of which the chuck can be displaced with a working area, and which has a receiving means for receiving test substrates, which can be displaced from a working area of the chuck to a receiving position outside the working area, is based on the object of increasing the accuracy of the movement of the chuck. Moreover, in the case of test apparatus with a controlled atmosphere, a further object is to prevent the chuck from being exposed to the open-air atmosphere. This is achieved by virtue of the fact that a carriage, which can be displaced between a position close to the chuck, in which the chuck is located in a position inside the working area, and the receiving position, is provided, which carriage is provided with a holder, in which the test substrate can be at least indirectly inserted in such a way that the test substrate, when the carriage is in the position close to the chuck, is located above the chuck. The holder and the chuck can move vertically relative to one another when the carriage is in the position close to the chuck.
摘要翻译：本发明涉及具有卡盘的装载装置的测试装置，其具有用于测试基板的轴承表面和卡盘驱动装置，通过该卡盘驱动器卡盘可以移动工作区域，并且其中具有用于接收可以从卡盘的工作区域移动到工作区域外部的接收位置的测试基板的接收装置，其基础是提高卡盘的运动精度的目的。此外，在具有受控气氛的测试装置的情况下，另一个目的是防止卡盘暴露于露天气氛。这是通过以下事实来实现的：提供了可以在卡盘位于工作区域内的位置的接近卡盘的位置之间移动的托架和接收位置，该托架被设置具有保持器，其中测试基板可以至少间接地插入，使得当托架处于靠近卡盘的位置时，测试基板位于卡盘上方。当托架位于靠近卡盘的位置时，托架和夹头可以相对于彼此垂直移动。

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