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1. 发明授权

US5892096A Non-subliming mid-UV dyes and ultra-thin organic arcs having differential solubility 失效
标题翻译：非升华中紫外线染料和具有差异溶解度的超薄有机电弧
公开(公告)号：US5892096A
公开(公告)日：1999-04-06
申请号：US598711
申请日：1996-02-08
申请人： Jim D. Meador , Xie Shao , Vandana Krishnamurthy , Earnest C. Murphy , Tony D. Flaim , Terry Lowell Brewer
发明人： Jim D. Meador , Xie Shao , Vandana Krishnamurthy , Earnest C. Murphy , Tony D. Flaim , Terry Lowell Brewer
IPC分类号： C07C45/74 , C07C49/84 , C07C255/41 , G03F7/09 , C07C255/09
CPC分类号： G03F7/091 , C07C255/41 , C07C45/74 , C07C49/84
摘要： Mid-UV dyes enabling ultra thin antireflection coatings for multi-layer i-line photoetching are produced from bichalcones; bis-a-cyanoacrylates/bis-cyanoacrylamides; and 1.4 divinylbenzenes. The dyes are nonsubliminal and differentially insoluble in standard photoresist solvents.
摘要翻译：使用双层i线光刻技术实现超薄抗反射涂层的紫外线紫外线染料由双柠檬烯生产; 双氰基丙烯酸酯/双氰基丙烯酰胺; 和1.4二乙烯基苯。染料在标准光刻胶溶剂中是非共沸的和差异不溶的。

2. 发明授权

US5688987A Non-subliming Mid-UV dyes and ultra-thin organic arcs having differential solubility 失效
标题翻译：不升华的中紫外线染料和具有不同溶解度的超薄有机电弧
公开(公告)号：US5688987A
公开(公告)日：1997-11-18
申请号：US336340
申请日：1994-11-09
申请人： Jim D. Meador , Xie Shao , Vandana Krishnamurthy , Earnest C. Murphy , Tony D. Flaim , Terry Lowell Brewer
发明人： Jim D. Meador , Xie Shao , Vandana Krishnamurthy , Earnest C. Murphy , Tony D. Flaim , Terry Lowell Brewer
IPC分类号： C07C45/74 , C07C49/84 , C07C255/41 , G03F7/09 , C07C255/00
CPC分类号： G03F7/091 , C07C255/41 , C07C45/74 , C07C49/84
摘要： Mid-UV dyes enabling ultra thin antireflection coatings for multi-layer i-line photoetching are produced from bichalcones; bis-a-cyanoacrylates/bis-cyanoacrylamides; and 1.4 divinylbenzenes. The dyes are nonsubliminal and differentially insoluble in standard photoresist solvents.
摘要翻译：使用双层i线光刻技术实现超薄抗反射涂层的紫外线紫外线染料由双柠檬烯生产; 双氰基丙烯酸酯/双氰基丙烯酰胺; 和1.4二乙烯基苯。染料在标准光刻胶溶剂中是非共沸的和差异不溶的。

3. 发明授权

US5919598A Method for making multilayer resist structures with thermosetting anti-reflective coatings 失效
标题翻译：制备具有热固性抗反射涂层的多层抗蚀剂结构的方法
公开(公告)号：US5919598A
公开(公告)日：1999-07-06
申请号：US692714
申请日：1996-08-06
申请人： Tony D. Flaim , Jim D. Meador , Xie Shao , Terry Lowell Brewer
发明人： Tony D. Flaim , Jim D. Meador , Xie Shao , Terry Lowell Brewer
IPC分类号： C08G59/14 , C08G59/16 , C08G59/40 , C08G59/68 , C08L63/00 , C09D163/00 , G03F7/09 , G03C1/795 , C08L5/04 , C08L59/00 , G03C1/835
CPC分类号： G03F7/091 , C08G59/1455 , C08G59/68 , C08L63/00 , Y10S430/136 , Y10S522/904
摘要： A method for making multilayer resist structures for microlithographic processing using a thermosetting anti-reflective coating is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.
摘要翻译：公开了使用热固性抗反射涂层进行微光刻处理的多层抗蚀剂结构的方法，用于宽范围的曝光波长，所述涂层含有活性固化催化剂，衍生自大于3.0的环氧官能团的醚或酯键，接枝的羟基官能低聚物和烷基化的氨基塑料交联剂，均存在于低至中等含醇溶剂中。

4. 发明授权

US5693691A Thermosetting anti-reflective coatings compositions 失效
标题翻译：热固性抗反射涂料组合物
公开(公告)号：US5693691A
公开(公告)日：1997-12-02
申请号：US517089
申请日：1995-08-21
申请人： Tony D. Flaim , Jim D. Meador , Xie Shao , Terry Lowell Brewer
发明人： Tony D. Flaim , Jim D. Meador , Xie Shao , Terry Lowell Brewer
IPC分类号： C08G59/14 , C08G59/16 , C08G59/40 , C08G59/68 , C08L63/00 , C09D163/00 , G03F7/09 , C08F283/10 , C08K5/04 , C08L61/20
CPC分类号： G03F7/091 , C08G59/1455 , C08G59/68 , C08L63/00 , Y10S430/136 , Y10S522/904
摘要： A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.
摘要翻译：公开了一种热固性抗反射涂层及其制造和使用方法，用于宽范围的曝光波长，所述涂层含有活性固化催化剂，衍生自大于3.0的环氧官能团的醚或酯键，染料接枝的羟基 - 功能低聚物和烷基化氨基塑料交联剂，均存在于低 - 中等含醇溶剂中。

5. 发明授权

US6080530A Thermosetting polyester anti-reflective coatings for multilayer photoresist processes 有权
公开(公告)号：US6080530A
公开(公告)日：2000-06-27
申请号：US328305
申请日：1999-06-08
申请人： Xie Shao , Colin Hester , Tony D. Flaim , Terry Lowell Brewer
发明人： Xie Shao , Colin Hester , Tony D. Flaim , Terry Lowell Brewer
IPC分类号： G03F7/11 , C08G63/54 , C09D167/00 , G03F7/09 , G03F7/26
CPC分类号： G03F7/091 , C09D167/00 , Y10S430/109
摘要： Thermosetting, bottom-applied polymeric anti-reflective coatings exhibiting high optical density, rapid plasma etch rates, high solubility in preferred coating solvents, excellent feature coverage, and improved stability in solution are disclosed. The principal component of these new anti-reflective coatings is a polyester resin produced by the reaction of one or more difunctional aliphatic carboxylic acids with a stoichiometric excess of a di- and/or a trifunctional aliphatic primary alcohol, wherein at least one of the dicarboxylic acids may contain a reactive methylene (--CH.sub.2 --) group. The resulting polyester resin reaction product is further modified by attaching light-absorbing groups to some or all of the reactive methylene groups (if present) and/or hydroxy groups present on the resin. The dye-attached polyester resin is combined with an aminoplast crosslinking agent and acid catalyst in a suitable solvent system to form the final anti-reflective coating.

6. 发明授权

US6042990A Thermosetting polyester anti-reflective coatings for multilayer photoresist processes 失效
标题翻译：用于多层光刻胶工艺的热固聚酯抗反射涂层
公开(公告)号：US6042990A
公开(公告)日：2000-03-28
申请号：US328316
申请日：1999-06-08
申请人： Xie Shao , Colin Hester , Tony D. Flaim , Terry Lowell Brewer
发明人： Xie Shao , Colin Hester , Tony D. Flaim , Terry Lowell Brewer
IPC分类号： G03F7/11 , C08G63/54 , C09D167/00 , G03F7/09 , G03C1/492
CPC分类号： G03F7/091 , C09D167/00 , Y10S430/109
摘要： Thermosetting, bottom-applied polymeric anti-reflective coatings exhibiting high optical density, rapid plasma etch rates, high solubility in preferred coating solvents, excellent feature coverage, and improved stability in solution are disclosed. The principal component of these new anti-reflective coatings is a polyester resin produced by the reaction of one or more difunctional aliphatic carboxylic acids with a stoichiometric excess of a di- and/or a trifunctional aliphatic primary alcohol, wherein at least one of the dicarboxylic acids may contain a reactive methylene (--CH.sub.2 --) group. The resulting polyester resin reaction product is further modified by attaching light-absorbing groups to some or all of the reactive methylene groups (if present) and/or hydroxy groups present on the resin. The dye-attached polyester resin is combined with an aminoplast crosslinking agent and acid catalyst in a suitable solvent system to form the final anti-reflective coating.
摘要翻译：公开了具有高光密度，快速等离子蚀刻速率，优选涂层溶剂中的高溶解度，优异的特征覆盖和改进的溶液稳定性的热固性，底涂聚合物抗反射涂层。这些新的抗反射涂层的主要成分是通过一种或多种二官能脂族羧酸与化学计量过量的二官能和/或三官能脂族伯醇的反应制备的聚酯树脂，其中至少一种二羧酸酸可以含有反应性亚甲基（-CH 2 - ）基团。所得到的聚酯树脂反应产物通过将光吸收基团附着在树脂上存在的一些或全部反应性亚甲基（如果存在）和/或羟基上进一步改性。染料连接的聚酯树脂与氨基塑料交联剂和酸催化剂在合适的溶剂体系中组合以形成最终的抗反射涂层。

7. 发明授权

US5935760A Thermosetting polyester anti-reflective coatings for multilayer photoresist processes 失效
公开(公告)号：US5935760A
公开(公告)日：1999-08-10
申请号：US954425
申请日：1997-10-20
申请人： Xie Shao , Colin Hester , Tony D. Flaim , Terry Lowell Brewer
发明人： Xie Shao , Colin Hester , Tony D. Flaim , Terry Lowell Brewer
IPC分类号： G03F7/11 , C08G63/54 , C09D167/00 , G03F7/09 , G03C1/492
CPC分类号： G03F7/091 , C09D167/00 , Y10S430/109
摘要： Thermosetting, bottom-applied polymeric anti-reflective coatings exhibiting high optical density, rapid plasma etch rates, high solubility in preferred coating solvents, excellent feature coverage, and improved stability in solution are disclosed. The principal component of these new anti-reflective coatings is a polyester resin produced by the reaction of one or more difunctional aliphatic carboxylic acids with a stoichiometric excess of a di- and/or a trifunctional aliphatic primary alcohol, wherein at least one of the dicarboxylic acids may contain a reactive methylene (--CH.sub.2 --) group. The resulting polyester resin reaction product is further modified by attaching light-absorbing groups to some or all of the reactive methylene groups (if present) and/or hydroxy groups present on the resin. The dye-attached polyester resin is combined with an aminoplast crosslinking agent and acid catalyst in a suitable solvent system to form the final anti-reflective coating.

8. 发明授权

US06316160B1 Fast-etching, thermosetting anti-reflective coatings derived from cellulosic binders 失效
标题翻译：快速蚀刻，衍生自纤维素粘合剂的热固性抗反射涂层
公开(公告)号：US06316160B1
公开(公告)日：2001-11-13
申请号：US09643695
申请日：2000-08-22
申请人： Xie Shao , Jim D. Meador , Terry Lowell Brewer
发明人： Xie Shao , Jim D. Meador , Terry Lowell Brewer
IPC分类号： G03F711
CPC分类号： C09D101/14 , G02B1/111 , G03F7/091
摘要： Anti-reflective compositions are prepared from cellulosic binders with improved etch rates.
摘要翻译：防反射组合物由具有改进的蚀刻速率的纤维素粘合剂制备

9. 发明授权

US06962769B2 Anti-reflective coating composition with improved spin bowl compatibility 有权
标题翻译：抗反射涂料组合物具有改善的旋转碗相容性
公开(公告)号：US06962769B2
公开(公告)日：2005-11-08
申请号：US10660667
申请日：2003-09-11
申请人： Xie Shao , Jim D. Meador , Mandar Bhave , Vandana Krishnamurthy , Kelly A. Nowak , Michelle Fowler , Shreeram V. Deshpande
发明人： Xie Shao , Jim D. Meador , Mandar Bhave , Vandana Krishnamurthy , Kelly A. Nowak , Michelle Fowler , Shreeram V. Deshpande
IPC分类号： G03F7/11 , B32B7/02 , C08J3/24 , C09D5/00 , C09D7/12 , C09D105/00 , C09D133/00 , C09D161/20 , C09D163/00 , C09D167/00 , C09D171/00 , C09D179/08 , C09D201/00 , G03F7/004 , G03F7/09 , H01L21/027 , G03C1/492
CPC分类号： C08J3/241 , G03F7/091 , Y10S430/151
摘要： Anti-reflective compositions and methods of using those compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In one embodiment, the compositions comprise less than about 0.3% by weight of a strong acid. In another embodiment, the weight ratio of strong acid to weak acid in the composition is from about 0:100 to about 25:75. Examples of preferred weak acid compounds include phenolic compounds (e.g., Bisphenol S, Bisphenol A, α-cyano-4-hydroxycinnamic acid), carboxylic acids (e.g., acetic acid), phosphoric acid, and cyano compounds. The polymer and other ingredients are preferably physically mixed in a solvent system. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature).
摘要翻译：提供了抗反射组合物和使用这些组合物形成电路的方法。组合物包含溶解或分散在溶剂体系中的聚合物。在一个实施方案中，组合物包含小于约0.3重量％的强酸。在另一个实施方案中，组合物中强酸与弱酸的重量比为约0:100至约25:75。优选的弱酸化合物的实例包括酚类化合物（例如双酚S，双酚A，α-氰基-4-羟基肉桂酸），羧酸（例如乙酸），磷酸和氰基化合物。聚合物和其它成分优选在溶剂体系中物理混合。所得的组合物是旋转碗相容的（即，它们在微光刻工艺的烘烤阶段之前或在室温下储存期间不交联）。

10. 发明授权

US06670425B2 Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings 有权
标题翻译：具有环氧化物环的聚合物的抗反射涂层与光衰减化合物和未反应的环氧化物环反应
公开(公告)号：US06670425B2
公开(公告)日：2003-12-30
申请号：US09874783
申请日：2001-06-05
申请人： Rama Puligadda , James E. Lamb, III , Tony D. Flaim , Runhui Huang , Xie Shao
发明人： Rama Puligadda , James E. Lamb, III , Tony D. Flaim , Runhui Huang , Xie Shao
IPC分类号： B32B2706
CPC分类号： G03F7/091 , Y10S438/952 , Y10T428/31511 , Y10T428/31525
摘要： Anti-reflective compositions and methods of using those compositions with low dielectric constant materials are provided. In one embodiment, the compositions include polymers comprising recurring monomers having unreacted epoxide groups. In another embodiment, the polymers further comprise recurring monomers comprising epoxide rings reacted with a light attenuating compound so as to open the ring. The compositions can be applied to dielectric layers so as to minimize or prevent reflection during the dual damascene process while simultaneously blocking via or photoresist poisoning which commonly occurs when organic anti-reflective coatings are applied to low dielectric constant layers.
摘要翻译：提供抗反射组合物和使用具有低介电常数材料的那些组合物的方法。在一个实施方案中，组合物包括包含具有未反应的环氧基团的重复单体的聚合物。在另一个实施方案中，聚合物还包含包含与光衰减化合物反应以便打开环的环氧化物环的重复单体。组合物可以施加到电介质层，以便在双镶嵌工艺期间最小化或防止反射，同时阻挡当将有机抗反射涂层施加到低介电常数层时通常发生的通孔或光致抗蚀剂中毒。

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