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    • 2. 发明授权
    • Airgap interconnect with hood layer and method of forming
    • 气罩与罩层互连和成型方法
    • US09123727B2
    • 2015-09-01
    • US13997171
    • 2011-12-29
    • Kevin Fischer
    • Kevin Fischer
    • H01L21/70H01L23/532H01L21/764H01L23/522H01L21/768
    • H01L23/53238H01L21/764H01L21/7682H01L21/76834H01L21/7685H01L21/76852H01L23/5222H01L23/53295H01L2924/0002H01L2924/00
    • An airgap interconnect structure with hood layer and methods for forming such an airgap interconnect structure are disclosed. A substrate having a dielectric layer with a plurality of interconnects formed therein is provided. Each interconnect is encapsulated by a barrier layer. A hardmask is formed on the dielectric layer and patterned to expose the dielectric layer between adjacent interconnects where an airgap is desired. The dielectric layer is etched to form a trench, wherein the etching process additionally etches at least a portion of the barrier layer to expose a portion of the side surface of each adjacent copper interconnect. A hood layer is electrolessly plated onto an exposed portion of the top surface and the exposed portion of the side surface to reseal the interconnect. A gap-sealing dielectric layer is formed over the device, sealing the trench to form an airgap.
    • 公开了一种具有罩层的气隙互连结构以及用于形成这种气隙互连结构的方法。 提供具有形成有多个互连件的电介质层的基板。 每个互连由阻挡层封装。 在电介质层上形成硬掩模,并图案化以暴露需要气隙的相邻互连之间的电介质层。 蚀刻介电层以形成沟槽,其中蚀刻工艺另外蚀刻阻挡层的至少一部分以暴露每个相邻铜互连的侧表面的一部分。 罩层被无电镀在顶表面的暴露部分和侧表面的暴露部分上以重新密封互连。 在器件上形成间隙密封电介质层,密封沟槽以形成气隙。
    • 5. 发明授权
    • Processing means and terminal incorporating same, particularly for point
of sale systems
    • 处理手段和终端整合,特别是销售点系统
    • US4912309A
    • 1990-03-27
    • US282443
    • 1988-12-09
    • Arvin D. DanielsonLyndon L. DunbarKevin FischerEdward R. MillerThomas W. Pepper, Jr.
    • Arvin D. DanielsonLyndon L. DunbarKevin FischerEdward R. MillerThomas W. Pepper, Jr.
    • G06F1/18G07G1/00G07G1/12
    • G07G1/0018G06F1/181G07G1/12
    • A point of sale system as illustrated comprised of a terminal with input or output devices including a manual data input, a coded data input (e.g., bar code scanner and/or smart card reader), an on-line display, and a hard copy output. A primary processing module has ten expansion connectors such that the primary module can become any level of processor from powerful peripheral controller to a master processor with a large non-volatile database, such flexibility giving a point of sale terminal configuration advantages such as the following: (1) reduced cost in volume production because one common computing core is used to control different functions; (2) improved system redundancy since the primary processor unit can control localized peripherals at the bus level independently of a point of sale system network; and (3) improved system performance by (a) reducing the amount of peripheral network communication traffic, and (b) direct access to database information in small to medium size point of sale systems.
    • 如图所示的销售点系统包括具有输入或输出装置的终端,包括手动数据输入,编码数据输入(例如,条形码扫描器和/或智能卡读取器),在线显示和硬拷贝 输出。 主处理模块具有十个扩展连接器,使得主模块可以成为从强大的外围控制器到具有大型非易失性数据库的主处理器的任何级别的处理器,这样的灵活性给出了销售点配置的优点,如: (1)降低了批量生产成本,因为一个普通的计算核心用于控制不同的功能; (2)改进的系统冗余,因为主处理器单元可以独立于销售点系统网络来控制总线层上的本地化外围设备; (3)通过(a)减少外围网络通信流量,改善系统性能;(b)直接访问中小型销售点系统中的数据库信息。