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    • 5. 发明授权
    • Small UHV compatible hyperthermal oxygen atom generator
    • 小型特高压兼容超热氧原子发生器
    • US5367161A
    • 1994-11-22
    • US88963
    • 1993-07-02
    • Ronald A. OutlawMark R. Davison
    • Ronald A. OutlawMark R. Davison
    • H05H3/02H05H3/00
    • H05H3/02
    • A high purity, hyperthermal, continuous beam atomic oxygen source capable of retrofitting to existing UHV systems has been developed. The instrument complements a general system capability, while its small size and simplicity of design permits tailoring the instrument for most experimental geometries. The flux level presently available is near 1.times.10.sup.14 cm.sup.-2 s.sup.-1 (.sup.3 P) but may be extended toward the theoretical limit of 3.times.10.sup.15 cm.sup.-2 s.sup.-1. The energy distribution of the emitted neutrals shows that the mean kinetic energy is about the same as observed for the ions or about 5 eV. The energy of the oxygen atoms may be substantially reduced for other applications by collision with a temperature controlled, non-reactive surface (with a concomitant spread in the energy distribution).
    • 已经开发了能够改造现有特高压系统的高纯度,超热,连续射束原子氧源。 该仪器补充了一般的系统功能,而其小尺寸和简单的设计允许为大多数实验几何尺寸定制仪器。 目前可获得的通量水平接近1×1014cm-2s-1(3P),但可以延伸到理论极限3×10 15 cm -2 s -1。 发射的中性粒子的能量分布表明,平均动能大约与离子观察到的相当,或约5 eV。 通过与温度控制的非反应性表面的碰撞(伴随着能量分布的扩散),氧原子的能量可以通过与其它应用相比大大降低。
    • 6. 发明授权
    • Method for producing an atomic oxygen beam
    • 原子氧束的制造方法
    • US4828817A
    • 1989-05-09
    • US113955
    • 1987-10-29
    • Ronald A. Outlaw
    • Ronald A. Outlaw
    • C01B13/02
    • C01B13/02
    • A method for producing an atomic oxygen beam is provided by the present invention. First, a material 10' is provided which dissociates molecular oxygen and dissolves atomic oxygen into its bulk. Next, molecular oxygen is exposed to entrance surface 11' of material 10'. Next, material 10' is heated by heater 17' to facilitate the permeation of atomic oxygen through material 10' to the UHV side 12'. UHV side 12' is interfaced with an ultra-high vacuum (UHV) environment provided by UHV pump 15'. The atomic oxygen on the UHV side 12' is excited to a non-binding state by exciter 14' thus producing the release of atomic oxygen to form an atomic oxygen beam 35'.
    • 本发明提供了一种生产原子氧束的方法。 首先,提供了解离分子氧并将原子氧溶解成其体积的材料10'。 接下来,分子氧暴露于材料10'的入射面11'。 接下来,材料10'被加热器17'加热以促进原子氧通过材料10'渗透到特高压侧12'。 特高压侧12'与UHV泵15'提供的超高真空(UHV)环境接口。 UHV侧12'上的原子氧被激发器14'激发到非结合状态,从而产生原子氧的释放以形成原子氧束35'。
    • 7. 发明授权
    • Precision manipulator heating and cooling apparatus for use in UHV
systems with sample transfer capability
    • 精密机械手加热和冷却设备,用于具有样品转移能力的特高压系统
    • US4516435A
    • 1985-05-14
    • US547176
    • 1983-10-31
    • Ronald A. OutlawBill T. Baugh
    • Ronald A. OutlawBill T. Baugh
    • G01N1/00G01N35/00H01J37/20G01N37/00
    • H01J37/20G01N2035/00346
    • An improvement of a precision manipulator for use in UHV systems with sample transfer capability in which a spring loaded thermocouple 47 and a heater electrode (51, 52) are both in direct contact with the transferred sample 35. The thermocouple and heater electrode assembly are mounted concentric with a sample receiving block 33 on the end of an offset manipulator 20. Hence, when a sample is transferred from an introduction chamber 12 into the UHV chamber 11, it contacts the spring loaded thermocouple 47 and then seats a heater electrode 52. Cooling by a copper plate 41 and a strap 22 combined with the resistance heating capability allow sample temperatures over the range of 150.degree.-1750.degree. K. while positioned in front of any diagnostic instrument in the UHV system and while taking data with these instruments.
    • 改进用于具有样品转移能力的特高压系统的精密机械手,其中弹簧加载的热电偶47和加热器电极(51,52)都与转移的样品35直接接触。热电偶和加热器电极组件被安装 与偏移操纵器20的端部上的样品接收块33同心。因此,当样品从引入室12转移到UHV室11中时,其接触弹簧加载的热电偶47,然后安置加热器电极52.冷却 通过铜板41和带22与电阻加热能力相结合,允许样品温度在150°-1750°K的范围内,同时位于UHV系统中的任何诊断仪器的前面,并在使用这些仪器的数据。
    • 9. 发明授权
    • Small vacuum compatible hyperthermal atom generator
    • 小真空兼容超热原子发生器
    • US5834768A
    • 1998-11-10
    • US698541
    • 1996-08-15
    • Ronald A. OutlawMark R. Davidson
    • Ronald A. OutlawMark R. Davidson
    • H05H3/02H05H3/00
    • H05H3/02
    • A vacuum compatible hyperthermal atom generator includes a membrane having two sides, the membrane having the capability of dissolving atoms into the membrane's bulk. A first housing is furnished in operative association with the first side of the membrane to provide for the exposure of the first side of the membrane to a gas species. A second housing is furnished in operative association with the second side of the membrane to provide a vacuum environment having a pressure of less than 1.times.10.sup.-3 Torr on the second side of the membrane. Exciting means excites atoms adsorbed on the second side of the membrane to a non-binding state so that a portion from 0% to 100% of atoms adsorbed on the second side of is the membrane are released from the second side of the membrane primarily as an atom beam.
    • 真空兼容的超热原子发生器包括具有两侧的膜,该膜具有将原子溶解到膜的体积中的能力。 第一壳体与膜的第一侧可操作地相关联地设置,以提供膜的第一面暴露于气体种类。 第二壳体设置成与膜的第二侧可操作地相关联,以在膜的第二侧提供具有小于1×10-3乇的压力的真空环境。 激发装置将吸附在膜的第二面上的原子激发到非结合状态,使得吸附在第二面上的原子的0%至100%的部分是膜从膜的第二侧主要作为 一个原子束。
    • 10. 发明授权
    • Laminar flow element with inboard sensor taps and coaxial laminar flow
guides
    • 具有内侧传感器抽头和同轴层流引导件的层流元件
    • US5750892A
    • 1998-05-12
    • US720025
    • 1996-09-27
    • Yufeng HuangWilliam J. AlvestefferRonald A. Outlaw
    • Yufeng HuangWilliam J. AlvestefferRonald A. Outlaw
    • G01F1/40G01F1/684G01F5/00G01F15/00
    • G01F15/00G01F1/40G01F1/6847G01F5/00
    • A laminar flow element for use in flow metering devices has a laminar flow element plug with an upstream end and a downstream end and a linear extent between the upstream end and the downstream end, the laminar flow element plug configured to be positioned within a base cavity with the upstream end oriented toward the direction of flow, and sensor taps through walls of the base cavity positioned inboard of the laminar flow element plug so that entrance effect is eliminated, error due to flow cross-sectional area differential is eliminated, and orifice effect is minimized, to produce a laminar flow with linear pressure drop across the sensor taps as a function of flow rate. Coaxial laminar flow guides are fixed coaxially about at least a portion of the length of the laminar flow element plug to increase the number of flow passages to enable linear measurements of higher flow rates.
    • 用于流量计量装置的层流元件具有层流元件塞,其具有上游端和下游端以及在上游端和下游端之间的线性范围,所述层流元件插塞被配置为定位在基腔内 其上游端朝向流动方向,并且传感器通过位于层流元件插塞内侧的基腔的壁进行抽头,从而消除入口效应,消除由于流动横截面积差异引起的误差,并且孔效应 被最小化,以产生具有作为流量的函数的传感器抽头上的线性压降的层流。 同轴层流引导件围绕层流元件塞的长度的至少一部分同轴地固定,以增加流动通道的数量,以实现更高流速的线性测量。