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    • 4. 发明申请
    • METAL CAPACITOR DESIGN FOR IMPROVED RELIABILITY AND GOOD ELECTRICAL CONNECTION
    • 金属电容器设计,改善可靠性和良好的电气连接
    • US20130105944A1
    • 2013-05-02
    • US13716693
    • 2012-12-17
    • Jianhong ZHUJames F. Buller
    • Jianhong ZHUJames F. Buller
    • H01L49/02
    • H01L28/40H01L23/5223H01L2924/0002H01L2924/00
    • A metal capacitor is formed with good conductivity for both nodes of the capacitor and improved reliability. An embodiment includes a first layer of alternating first and second metal lines, a second layer of alternating third and fourth metal lines, a dielectric layer between the first and second layers, and vias in the dielectric layer connecting the first and second metal lines with the third and fourth metal lines, respectively, wherein each metal line comprises alternating first segments having a first width and second segments having a second width, the first width being greater than the second width, each first segment lying adjacent to a second segment of an adjacent metal line, and only first segments of the metal lines overlapping the vias. The design enables the spacing between metal lines to be maintained, the spacing between via to metal to be increased, and via connection to be maintained for both nets, thereby improving the conductivity and reliability of the capacitor and maintaining capacitance density.
    • 形成对电容器的两个节点具有良好导电性的金属电容器,并提高可靠性。 一个实施例包括交替的第一和第二金属线的第一层,交替的第三和第四金属线的第二层,第一和第二层之间的介电层,以及介电层中的通孔,将第一和第二金属线与 第三和第四金属线,其中每个金属线包括具有第一宽度的交替的第一段和具有第二宽度的第二段,第一宽度大于第二宽度,每个第一段邻近相邻的第二段的第二段 金属线,并且仅金属线的第一段与通孔重叠。 该设计使得能够保持金属线之间的间距,通孔与金属之间的间隔增加,并且通过两个网络的连接来保持,从而提高电容器的导电性和可靠性并保持电容密度。
    • 5. 发明申请
    • METAL CAPACITOR DESIGN FOR IMPROVED RELIABILITY AND GOOD ELECTRICAL CONNECTION
    • 金属电容器设计,改善可靠性和良好的电气连接
    • US20110108949A1
    • 2011-05-12
    • US12615796
    • 2009-11-10
    • Jianhong ZhuJames F. Buller
    • Jianhong ZhuJames F. Buller
    • H01L27/08H01L21/4763
    • H01L28/40H01L23/5223H01L2924/0002H01L2924/00
    • A metal capacitor is formed with good conductivity for both nodes of the capacitor and improved reliability. An embodiment includes a first layer of alternating first and second metal lines, a second layer of alternating third and fourth metal lines, a dielectric layer between the first and second layers, and vias in the dielectric layer connecting the first and second metal lines with the third and fourth metal lines, respectively, wherein each metal line comprises alternating first segments having a first width and second segments having a second width, the first width being greater than the second width, each first segment lying adjacent to a second segment of an adjacent metal line, and only first segments of the metal lines overlapping the vias. The design enables the spacing between metal lines to be maintained, the spacing between via to metal to be increased, and via connection to be maintained for both nets, thereby improving the conductivity and reliability of the capacitor and maintaining capacitance density.
    • 形成对电容器的两个节点具有良好导电性的金属电容器,并提高可靠性。 一个实施例包括交替的第一和第二金属线的第一层,交替的第三和第四金属线的第二层,第一和第二层之间的介电层,以及介电层中的通孔,将第一和第二金属线与 第三和第四金属线,其中每个金属线包括具有第一宽度的交替的第一段和具有第二宽度的第二段,第一宽度大于第二宽度,每个第一段邻近相邻的第二段的第二段 金属线,并且仅金属线的第一段与通孔重叠。 该设计使得能够保持金属线之间的间距,通孔与金属之间的间隔增加,并且通过两个网络的连接来保持,从而提高电容器的导电性和可靠性并保持电容密度。
    • 6. 发明授权
    • Metal capacitor design for improved reliability and good electrical connection
    • 金属电容设计,提高可靠性和良好的电气连接
    • US08357584B2
    • 2013-01-22
    • US12615796
    • 2009-11-10
    • Jianhong ZhuJames F. Buller
    • Jianhong ZhuJames F. Buller
    • H01L21/20
    • H01L28/40H01L23/5223H01L2924/0002H01L2924/00
    • A metal capacitor is formed with good conductivity for both nodes of the capacitor and improved reliability. An embodiment includes a first layer of alternating first and second metal lines, a second layer of alternating third and fourth metal lines, a dielectric layer between the first and second layers, and vias in the dielectric layer connecting the first and second metal lines with the third and fourth metal lines, respectively, wherein each metal line comprises alternating first segments having a first width and second segments having a second width, the first width being greater than the second width, each first segment lying adjacent to a second segment of an adjacent metal line, and only first segments of the metal lines overlapping the vias. The design enables the spacing between metal lines to be maintained, the spacing between via to metal to be increased, and via connection to be maintained for both nets, thereby improving the conductivity and reliability of the capacitor and maintaining capacitance density.
    • 形成对电容器的两个节点具有良好导电性的金属电容器,并提高可靠性。 一个实施例包括交替的第一和第二金属线的第一层,交替的第三和第四金属线的第二层,第一和第二层之间的介电层,以及介电层中的通孔,将第一和第二金属线与 第三和第四金属线,其中每个金属线包括具有第一宽度的交替的第一段和具有第二宽度的第二段,第一宽度大于第二宽度,每个第一段邻近相邻的第二段的第二段 金属线,并且仅金属线的第一段与通孔重叠。 该设计使得能够保持金属线之间的间距,通孔与金属之间的间隔增加,并且通过两个网络的连接来保持,从而提高电容器的导电性和可靠性并保持电容密度。
    • 8. 发明授权
    • Semiconductor device and methods for fabricating same
    • 半导体装置及其制造方法
    • US08076703B2
    • 2011-12-13
    • US12603353
    • 2009-10-21
    • Akif SultanJames F. BullerKaveri Mathur
    • Akif SultanJames F. BullerKaveri Mathur
    • H01L29/78
    • H01L27/1203H01L21/823807H01L21/823878H01L21/84H01L29/7843
    • A semiconductor device is provided which includes a substrate including an inactive region and an active region, a gate electrode structure having portions overlying the active region, a compressive layer overlying the active region, and a tensile layer overlying the inactive region and located outside the active region. The active region has a lateral edge which defines a width of the active region, and a transverse edge which defines a length of the active region. The gate electrode structure includes: a common portion spaced apart from the active region; a plurality of gate electrode finger portions integral with the common portion, and a plurality of fillet portions integral with the common portion and the gate electrode finger portions. A portion of each gate electrode finger portion overlies the active region. The fillet portions are disposed between the common portion and the gate electrode finger portions, and do not overlie the active region. The compressive layer also overlies the gate electrode finger portions, and the tensile layer is disposed adjacent the transverse edge of the active region.
    • 提供了一种半导体器件,其包括:基板,其包括非活性区域和有源区域;栅极电极结构,其具有覆盖有源区域的部分;覆盖有源区域的压缩层;以及覆盖非活性区域并位于有源区域外部的拉伸层 地区。 有源区域具有限定有源区域的宽度的横向边缘和限定有源区域的长度的横向边缘。 栅电极结构包括:与有源区间隔开的公共部分; 与公共部分成一体的多个栅极电极指部,以及与公共部分和栅电极指部分成一体的多个圆角部分。 每个栅电极指部分的一部分覆盖有源区。 圆角部分设置在公共部分和栅极电极指部分之间,并且不覆盖有源区域。 压电层也覆盖在栅极电极指部分上,并且拉伸层邻近有源区的横向边缘设置。
    • 9. 发明授权
    • SOI device and method for its fabrication
    • SOI器件及其制造方法
    • US07718503B2
    • 2010-05-18
    • US11459316
    • 2006-07-21
    • Mario M. PellelaDonggang D. WuJames F. Buller
    • Mario M. PellelaDonggang D. WuJames F. Buller
    • H01L21/20
    • H01L27/0255H01L21/743H01L21/84H01L27/1203
    • A silicon on insulator (SOI) device and methods for fabricating such a device are provided. The device includes an MOS capacitor coupled between voltage busses and formed in a monocrystalline semiconductor layer overlying an insulator layer and a semiconductor substrate. The device includes at least one electrical discharge path for discharging potentially harmful charge build up on the MOS capacitor. The MOS capacitor has a conductive electrode material forming a first plate of the MOS capacitor and an impurity doped region in the monocrystalline silicon layer beneath the conductive electrode material forming a second plate. A first voltage bus is coupled to the first plate of the capacitor and to an electrical discharge path through a diode formed in the semiconductor substrate and a second voltage bus is coupled to the second plate of the capacitor.
    • 提供一种绝缘体上硅(SOI)器件及其制造方法。 该器件包括耦合在电压总线之间并形成在覆盖绝缘体层和半导体衬底的单晶半导体层中的MOS电容器。 该器件包括至少一个放电路径,用于在MOS电容器上放出潜在的有害电荷。 MOS电容器具有形成MOS电容器的第一板的导电电极材料和形成第二板的导电电极材料下面的单晶硅层中的杂质掺杂区域。 第一电压总线耦合到电容器的第一板和通过形成在半导体衬底中的二极管的放电路径,第二电压总线耦合到电容器的第二板。