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    • 1. 发明授权
    • Method for shallow trench isolation
    • 浅沟槽隔离方法
    • US5728621A
    • 1998-03-17
    • US845870
    • 1997-04-28
    • Jia Zhen ZhengCharlie Wee Song TayWei LuLap Chan
    • Jia Zhen ZhengCharlie Wee Song TayWei LuLap Chan
    • H01L21/762H01L21/76
    • H01L21/76224
    • A new method for forming planarized high quality oxide shallow trench isolation is described. A nitride layer overlying a pad oxide layer is provided over the surface of a semiconductor substrate. A plurality of isolation trenches is etched through the nitride and pad oxide layers into the semiconductor substrate wherein there is at least one first wide nitride region between two of the isolation trenches and at least one second narrow nitride region between another two of the isolation trenches. A high density plasma (HDP) oxide layer is deposited over the nitride layer filling the isolation trenches wherein the HDP oxide deposits more thickly in the first region over the wide nitride layer and deposits more thinly in the second region over the narrow nitride layer and wherein the difference in step heights of the HDP oxide between the first region and a region overlying an isolation trench is a first height. A layer of spin-on-glass is coated over the HDP oxide layer wherein the difference in step heights of the spin-on-glass material between the first region and the region overlying an isolation trench is a second height smaller than the first height. The spin-on-glass layer and portions of the HDP oxide layer in the first region are etched away. The spin-on-glass layer and HDP oxide layer remaining are polished away wherein the substrate is planarized.
    • 描述了形成平面化高质量氧化物浅沟槽隔离的新方法。 覆盖衬垫氧化物层的氮化物层设置在半导体衬底的表面上。 通过氮化物和衬垫氧化物层蚀刻多个隔离沟槽到半导体衬底中,其中在两个隔离沟槽之间存在至少一个第一宽氮化物区域和在另外两个隔离沟槽之间的至少一个第二窄氮化物区域。 在填充隔离沟槽的氮化物层上沉积高密度等离子体(HDP)氧化物层,其中HDP氧化物在宽氮化物层上的第一区域中更厚地沉积,并且在第二区域上更薄地沉积在窄氮化物层上,并且其中 在第一区域和覆盖隔离沟槽的区域之间的HDP氧化物的阶跃高度的差异是第一高度。 在HDP氧化物层上涂覆一层旋涂玻璃,其中在第一区域和覆盖隔离沟槽的区域之间的旋涂玻璃材料的阶梯高度的差异是比第一高度小的第二高度。 旋转玻璃层和第一区域中的HDP氧化物层的部分被蚀刻掉。 抛光剩余的旋涂玻璃层和HDP氧化物层,其中衬底被平坦化。
    • 10. 发明授权
    • Content associative caching method for web applications
    • Web应用程序的内容关联缓存方法
    • US08793307B2
    • 2014-07-29
    • US12695996
    • 2010-01-28
    • Wei LuJamshid MahdaviDarrell Long
    • Wei LuJamshid MahdaviDarrell Long
    • G06F15/16
    • H04L67/2842
    • A cache logically disposed in a communication path between a client and a server receives a request for a content item and, in response thereto, requests from the server header information concerning the content item and an initial portion of data that makes up the content item. The cache then computes a first hashing value from the header information and a second hashing value from the initial portion of data. A content identifier is created by combining the first hashing value and the second hashing value. Using the content identifier, the cache determines whether a copy of the content item is stored by the cache; and, if so provides same to the client. Otherwise, the cache requests the content item from the server and, upon receipt thereof, provides it to the client.
    • 逻辑上设置在客户端和服务器之间的通信路径中的高速缓存器接收对内容项目的请求,并响应于此,来自服务器的关于内容项目的信息的请求以及组成内容项的数据的初始部分。 然后,高速缓存从头信息计算第一散列值,并从数据的初始部分计算第二哈希值。 通过组合第一哈希值和第二散列值来创建内容标识符。 使用内容标识符,缓存确定高速缓存是否存储内容项的副本; 如果是这样,给客户端一样。 否则,高速缓存从服务器请求内容项,并在接收到该内容时将其提供给客户端。