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1. 发明申请

US20090021749A1 HIGH THROUGHPUT ACROSS-WAFER-VARIATION MAPPING 有权
标题翻译：高通量波变换映射
公开(公告)号：US20090021749A1
公开(公告)日：2009-01-22
申请号：US12173766
申请日：2008-07-15
申请人： Jeong Ho Yeo , Efrat Rosenman , Erez Ravid , Doron Meshulach , Gadi Greenberg , Kobi Kan , Yehuda Cohen , Shimon Levi
发明人： Jeong Ho Yeo , Efrat Rosenman , Erez Ravid , Doron Meshulach , Gadi Greenberg , Kobi Kan , Yehuda Cohen , Shimon Levi
IPC分类号： G01B11/24
CPC分类号： G01N21/9501 , G01N21/8851 , G01N2021/8825 , G01N2021/8848 , G03F7/70616
摘要： A method for characterizing a surface of a sample object, the method including dividing the surface into pixels which are characterized by a parameter variation, and defining blocks of the surface as respective groups of the pixels. The method further includes irradiating the pixels in multiple scans over the surface with radiation having different, respective types of polarization, and detecting returning radiation from the pixels in response to each of the scans. For each scan, respective block signatures of the blocks are constructed, in response to the returning radiation from the group of pixels in each block. Also for each scan, a block signature variation using the respective block signatures of the blocks is determined. In response to the block signature variation, one or more of the types of polarization for use in subsequent examination of a test object are selected.
摘要翻译：一种用于表征样本对象的表面的方法，所述方法包括将表面划分成由参数变化表征的像素，以及将表面的块定义为相应的像素组。所述方法还包括用具有不同类型的偏振的辐射在表面上以多次扫描照射像素，以及响应于每个扫描检测来自像素的返回辐射。对于每个扫描，响应于来自每个块中的像素组的返回辐射来构造块的相应块签名。同样对于每个扫描，确定使用块的相应块签名的块签名变化。响应于块签名变化，选择用于随后检查测试对象的一种或多种类型的偏振。

2. 发明授权

US07990546B2 High throughput across-wafer-variation mapping 有权
标题翻译：高吞吐量跨晶片变化映射
公开(公告)号：US07990546B2
公开(公告)日：2011-08-02
申请号：US12173766
申请日：2008-07-15
申请人： Jeong Ho Yeo , Efrat Rosenman , Erez Ravid , Doron Meshulach , Gadi Greenberg , Kobi Kan , Yehuda Cohen , Shimon Levi
发明人： Jeong Ho Yeo , Efrat Rosenman , Erez Ravid , Doron Meshulach , Gadi Greenberg , Kobi Kan , Yehuda Cohen , Shimon Levi
IPC分类号： G01B11/24
CPC分类号： G01N21/9501 , G01N21/8851 , G01N2021/8825 , G01N2021/8848 , G03F7/70616
摘要： A method for characterizing a surface of a sample object, the method including dividing the surface into pixels which are characterized by a parameter variation, and defining blocks of the surface as respective groups of the pixels. The method further includes irradiating the pixels in multiple scans over the surface with radiation having different, respective types of polarization, and detecting returning radiation from the pixels in response to each of the scans. For each scan, respective block signatures of the blocks are constructed, in response to the returning radiation from the group of pixels in each block. Also for each scan, a block signature variation using the respective block signatures of the blocks is determined. In response to the block signature variation, one or more of the types of polarization for use in subsequent examination of a test object are selected.
摘要翻译：一种用于表征样本对象的表面的方法，所述方法包括将表面划分成由参数变化表征的像素，以及将表面的块定义为相应的像素组。所述方法还包括用具有不同类型的偏振的辐射在表面上以多次扫描照射像素，以及响应于每个扫描检测来自像素的返回辐射。对于每个扫描，响应于来自每个块中的像素组的返回辐射来构造块的相应块签名。同样对于每个扫描，确定使用块的相应块签名的块签名变化。响应于块签名变化，选择用于随后检查测试对象的一种或多种类型的偏振。

3. 发明申请

US20090284835A1 SCANNING MICROSCOPY USING INHOMOGENEOUS POLARIZATION 有权
标题翻译：扫描显微镜使用非均匀偏振
公开(公告)号：US20090284835A1
公开(公告)日：2009-11-19
申请号：US12464761
申请日：2009-05-12
申请人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
发明人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
IPC分类号： G02B27/28
CPC分类号： G02B21/0092 , G02B21/0068
摘要： Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.
摘要翻译：用于对表面进行成像的装置，包括声光（AO）系统。 AO系统包括具有辐射输入表面和辐射输出表面的AO元件。该元件被配置为在辐射输入表面处接收射频（RF）脉冲和辐射输入并且产生来自辐射输出表面的行进光束。 AO系统还包括相对于AO元件定位的不均匀偏振发生器，使得AO系统输出行进的非均匀偏振光束。该装置包括被配置为将不均匀偏振光束聚焦到表面上以在其上形成相应的行进点的物镜光学元件; 收集光学器件，其被配置为从所述行进点收集散射的辐射并且聚焦所述散射的辐射以形成相应的图像斑点; 以及检测器，其被布置成接收相应的图像点并响应于此产生信号。

4. 发明授权

US08228601B2 Scanning microscopy using inhomogeneous polarization 有权
标题翻译：扫描显微镜使用不均匀的极化
公开(公告)号：US08228601B2
公开(公告)日：2012-07-24
申请号：US12464761
申请日：2009-05-12
申请人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
发明人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
IPC分类号： G02B27/28
CPC分类号： G02B21/0092 , G02B21/0068
摘要： Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.
摘要翻译：用于对表面进行成像的装置，包括声光（AO）系统。 AO系统包括具有辐射输入表面和辐射输出表面的AO元件。该元件被配置为在辐射输入表面处接收射频（RF）脉冲和辐射输入并且产生来自辐射输出表面的行进光束。 AO系统还包括相对于AO元件定位的不均匀偏振发生器，使得AO系统输出行进的非均匀偏振光束。该装置包括被配置为将不均匀偏振光束聚焦到表面上以在其上形成相应的行进点的物镜光学元件; 收集光学器件，其被配置为从所述行进点收集散射的辐射并且聚焦所述散射的辐射以形成相应的图像斑点; 以及检测器，其被布置成接收相应的图像点并响应于此产生信号。

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