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1. 发明授权

US07280313B2 High aspect ratio co-planar structure fabrication consisting of different materials 有权
标题翻译：高纵横比共面结构制造由不同材料组成
公开(公告)号：US07280313B2
公开(公告)日：2007-10-09
申请号：US10837386
申请日：2004-04-30
申请人： Jeffrey S. Lille , Son Van Nguyen , Hugo Alberto Emilio Santini
发明人： Jeffrey S. Lille , Son Van Nguyen , Hugo Alberto Emilio Santini
IPC分类号： G11B5/17 , G11B5/127
CPC分类号： G11B5/3163 , Y10T29/49052 , Y10T29/4906 , Y10T29/49064
摘要： A a method for fabricating a structure, such as a magnetic head, having two coplanar metallic features of different compositions, both deposited on their own seed layers. The features may be made tall relative to their widths (ie. have a high aspect ratio), and are also very closely spaced. Only a single high-definition, critically aligned photolithographic procedure is used to create the critical structures, avoiding any problem with aligning features produced by multiple procedures. The method is applied to the production of the write structure of a magnetic read/write head, where a portion of the pole structure and the inductive coils are fabricated in the same plane with a close spacing and both having a vertical aspect ratio of more than about 2:1.
摘要翻译：一种用于制造具有不同组成的两个共面金属特征的结构（例如磁头）的方法，两者都沉积在它们自己的种子层上。特征可以相对于它们的宽度（即，具有高纵横比）而高，并且也非常紧密地间隔开。仅使用单一的高清晰度，严格对准的光刻过程来创建关键结构，避免了由多个过程产生的对准特征的任何问题。该方法被应用于磁读/写头的写结构的制造，其中极结构和感应线圈的一部分以相近的间距制造在相同的平面中，并且两者的垂直纵横比大于约2：1。

2. 发明授权

US07248434B2 Planarized perpendicular pole tip system and method for manufacturing the same 失效
标题翻译：平面垂直极端系统及其制造方法
公开(公告)号：US07248434B2
公开(公告)日：2007-07-24
申请号：US10798163
申请日：2004-03-10
申请人： Frederick Hayes Dill , Jeffrey S. Lille , Son Van Nguyen , Hugo Alberto Emilio Santini
发明人： Frederick Hayes Dill , Jeffrey S. Lille , Son Van Nguyen , Hugo Alberto Emilio Santini
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , G11B5/3967 , Y10T29/49032
摘要： A method for manufacturing a pole tip structure for a magnetic head is provided. An etch stop layer is initially deposited after which a transfer layer is deposited. Further deposited is at least one masking layer. Reactive ion etching is then performed to define a trench in at least the transfer layer. A pole tip layer is then deposited in the trench to define a pole tip structure flanked at least in part by the transfer layer. A surface of the transfer layer or etch stop layer then remains in co-planar relationship with a surface of the pole tip structure.
摘要翻译：提供一种用于制造用于磁头的极尖结构的方法。最初沉积蚀刻停止层，之后沉积转移层。进一步沉积的是至少一个掩模层。然后执行反应离子蚀刻以在至少转移层中限定沟槽。然后将极尖层沉积在沟槽中以限定至少部分地由转移层侧面的极尖结构。然后转印层或蚀刻停止层的表面与极尖结构的表面保持共面关系。

3. 发明授权

US07117583B2 Method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure 失效
标题翻译：使用预图案种子层的方法和装置，用于提供用于感应头部结构的对准线圈
公开(公告)号：US07117583B2
公开(公告)日：2006-10-10
申请号：US10101196
申请日：2002-03-18
申请人： Thomas Edward Dinan , Jeffrey S. Lille , Son Van Nguyen , Hugo Alberto Emilio Santini
发明人： Thomas Edward Dinan , Jeffrey S. Lille , Son Van Nguyen , Hugo Alberto Emilio Santini
IPC分类号： G11B5/17 , C25D7/06
CPC分类号： G11B5/486 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , H01F17/0006 , H01F41/043 , H01F41/046 , Y10T29/4902 , Y10T29/4906 , Y10T29/49062 , Y10T29/49064 , Y10T29/49073
摘要： A method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure. The method uses an aligned process where the base plate imprint is fabricated on an electrically insulating layer and the reversed image is fabricated and etched into the coil insulation material, e.g., hard bake photoresist to alleviate the problems associated with complete ion removal of the seed layer between high aspect ratio coils. The method would also not be prone to plating non-uniformities (voids), and would not be subject to seed layer undercutting in a wet etch step process.
摘要翻译：一种使用预先图案化种子层来提供用于感应头部结构的对准线圈的方法和装置。该方法使用对准的工艺，其中基板印版制造在电绝缘层上，并且反转的图像被制造并蚀刻到线圈绝缘材料中，例如硬烘烤光致抗蚀剂以减轻与种子层的完全离子去除相关的问题在高纵横比线圈之间。该方法也不易于电镀不均匀（空隙），并且在湿法蚀刻步骤中不会经受种子层底切。

4. 发明授权

US06940693B2 Magnetic head having media heating device that is electrically connected to magnetic pole piece 有权
标题翻译：具有与磁极片电连接的介质加热装置的磁头
公开(公告)号：US06940693B2
公开(公告)日：2005-09-06
申请号：US10675065
申请日：2003-09-29
申请人： Jeffrey S. Lille , Hugo Alberto Emilio Santini
发明人： Jeffrey S. Lille , Hugo Alberto Emilio Santini
IPC分类号： G11B5/31 , G11B5/147
CPC分类号： G11B5/3116
摘要： An embodiment of a magnetic head of the present invention includes a media heating device that is fabricated within the magnetic head structure following the fabrication of the read head element of the magnetic head. The media heating device is preferably fabricated between the first and second magnetic pole layers and close to the ABS surface of the head. The heating device includes electrical leads and an electrically resistive heating element that is preferably comprised of TaSiN, NiCr or NiFe, and in the present invention one or both of the magnetic poles are utilized as an electrical lead of the heating device. The heating device serves to heat the magnetic media immediately prior to the passage of the magnetic media beneath the pole tip, which lowers the localized coercivity of the media and facilitates the writing of data to the media by the write head element of the magnetic head.
摘要翻译：本发明的磁头的一个实施例包括在制造磁头读头元件之后制造在磁头结构内的介质加热装置。介质加热装置优选地制造在第一和第二磁极层之间并且靠近头部的ABS表面。加热装置包括电引线和优选由TaSiN，NiCr或NiFe组成的电阻加热元件，并且在本发明中，一个或两个磁极用作加热装置的电引线。加热装置用于在磁性介质在磁极尖端之下通过之前立即加热磁性介质，这降低了介质的局部矫顽力，并且便于通过磁头的写头元件将数据写入介质。

5. 发明授权

US07268973B2 Perpendicular magnetic head having thermally assisted recording element 失效
标题翻译：具有热辅助记录元件的垂直磁头
公开(公告)号：US07268973B2
公开(公告)日：2007-09-11
申请号：US10627396
申请日：2003-07-24
申请人： Jeffrey S. Lille , Hugo Alberto Emilio Santini
发明人： Jeffrey S. Lille , Hugo Alberto Emilio Santini
IPC分类号： G11B5/147
CPC分类号： G11B5/012 , G11B5/02 , G11B5/1278 , G11B5/332 , G11B2005/0002 , G11B2005/0005 , G11B2005/001 , G11B2005/0021
摘要： A perpendicular magnetic head including a media heating element that is fabricated within the magnetic head structure. The heating element is preferably fabricated above the first magnetic pole layer close to the ABS surface of the head. In one embodiment, following the fabrication of the heating element, a second magnetic pole probe layer that includes the second magnetic pole tip is fabricated. In an alternative head embodiment, a second magnetic pole shaping layer is fabricated upon the heating element, followed by the fabrication of the probe layer that includes the second magnetic pole tip. The heating element is an electrically resistive heating element that is preferably comprised of NiCr or NiFe.
摘要翻译：包括在磁头结构内制造的介质加热元件的垂直磁头。加热元件优选制造在靠近头部的ABS表面的第一磁极层的上方。在一个实施例中，在加热元件的制造之后，制造包括第二磁极尖端的第二磁极探针层。在替代的头部实施例中，在加热元件上制造第二磁极成形层，随后制造包括第二磁极尖端的探针层。加热元件是优选由NiCr或NiFe组成的电阻加热元件。

6. 发明授权

US07187520B2 Magnetic head having thermally assisted recording device, and method of fabrication thereof 有权
标题翻译：具有热辅助记录装置的磁头及其制造方法
公开(公告)号：US07187520B2
公开(公告)日：2007-03-06
申请号：US10791186
申请日：2004-03-01
申请人： Edward Hin Pong Lee , Jeffrey S. Lille , Vladimir Nikitin , Hugo Alberto Emilio Santini
发明人： Edward Hin Pong Lee , Jeffrey S. Lille , Vladimir Nikitin , Hugo Alberto Emilio Santini
IPC分类号： G11B5/147
CPC分类号： G11B5/3133
摘要： A magnetic head including a media heating device that is fabricated within the magnetic head structure. The media heating device includes an electrically resistive element that is fabricated above the first magnetic pole layer close to the ABS surface of the head. A P1 pole pedestal is fabricated above the heating element. Electrical insulation layers are fabricated beneath and above the heating element to prevent electrical shorting to the P1 pole layer and the P1 pole pedestal that are disposed beneath and above the heating element, respectively.
摘要翻译：一种磁头，包括制造在磁头结构内的介质加热装置。介质加热装置包括电阻元件，其制造在接近头部的ABS表面的第一磁极层的上方。在加热元件上方制造一个P 1极基座。在加热元件下方和上方制造电绝缘层，以防止分别设置在加热元件下方和上方的P 1极层和P 1极基座的电短路。

7. 发明授权

US06696226B1 Simultaneous definition and direct transfer of a write head pole and coil for a magnetic read/write head 失效
标题翻译：同时定义并直接传送写磁头磁极和磁盘用于磁读/写磁头
公开(公告)号：US06696226B1
公开(公告)日：2004-02-24
申请号：US10290747
申请日：2002-11-08
申请人： Thomas Edward Dinan , Jeffrey S. Lille , Hugo Alberto Emilio Santini
发明人： Thomas Edward Dinan , Jeffrey S. Lille , Hugo Alberto Emilio Santini
IPC分类号： G11B5147
CPC分类号： G11B5/3163 , G11B5/17 , G11B5/235 , G11B5/3116 , G11B5/313 , G11B5/3166 , G11B5/3967 , Y10T29/49032 , Y10T29/49064
摘要： A method of making a magnetic read/write head using a single lithographic step to define both a write coil and a pole tip structure. The use of a thin image resist layer over a hard reactive-ion etch mask and image transfer techniques allows very high resolution optical lithography which can accommodate formation of a very compact coil and pole structure. The use of a single high resolution lithography step on a planarized structure to define both a write pole tip and a write coil coplanar with the write pole tip avoids the problems of reflective notching associated with lithography to define the pole tip in the vicinity of non-planar features of the coil structure and also eliminates alignment inaccuracies inherent in separate lithography processes for the coil and pole.
摘要翻译：一种使用单个光刻步骤制造磁读/写头以限定写入线圈和极尖结构的方法。在硬反应离子蚀刻掩模和图像转移技术上使用薄图像抗蚀剂层允许非常高分辨率的光学光刻，其可以适应非常紧凑的线圈和极结构的形成。在平坦化结构上使用单个高分辨率光刻步骤来限定写磁极尖端和与写磁极尖端共面的写入线圈两者都避免了与光刻相关联的反射凹陷的问题，以限定非极性附近的极尖，线圈结构的平面特征并且还消除了用于线圈和极的单独光刻工艺中固有的对准不精确。

8. 发明授权

US07024756B2 Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer 失效
标题翻译：制造具有可蚀刻粘合CMP停止层的垂直记录磁头极尖的方法
公开(公告)号：US07024756B2
公开(公告)日：2006-04-11
申请号：US10631706
申请日：2003-07-30
申请人： Quang Le , Jui-lung Li , Jeffrey S. Lille , Son Van Nguyen
发明人： Quang Le , Jui-lung Li , Jeffrey S. Lille , Son Van Nguyen
IPC分类号： G11B5/187 , B44C1/22
CPC分类号： G11B5/1278 , G11B5/3106 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： The method of making a magnetic head assembly includes forming a second pole piece layer that is recessed from a head surface, forming a reactive ion etchable (RIEable) pole tip forming layer on the second pole piece layer, forming an adhesion/stop layer of tantalum (Ta) on the pole tip forming layer, forming a photoresist mask on the adhesion/stop layer with an opening for patterning the adhesion/stop layer and the pole tip forming layer with another opening, reactive ion etching (RIE) through the opening to form the other opening, forming the second pole piece pole tip in the other opening with a top which is above a top of the adhesion/stop layer and chemical mechanical polishing (CMP) the top of the second pole piece pole tip until the CMP contacts the adhesion/stop layer. The invention also includes the magnetic head made by such a process.
摘要翻译：制造磁头组件的方法包括形成从头表面凹陷的第二极片层，在第二极片层上形成反应离子可蚀刻（可分离）极尖端形成层，形成钽的粘附/停止层（Ta），在粘合/停止层上形成光刻胶掩模，其中具有用于使粘附/阻挡层和极尖形成层图案化的开口具有另一个开口，反应离子蚀刻（RIE）通过开口至形成另一个开口，在另一个开口中形成具有位于粘附/停止层顶部之上的顶部的第二极靴极尖，并且在第二极片极尖的顶部进行化学机械抛光（CMP），直到CMP接触粘附/停止层。本发明还包括由这种方法制成的磁头。

9. 发明授权

US09236260B2 System, method and apparatus for seedless electroplated structure on a semiconductor substrate 有权
标题翻译：半导体衬底上无电解电镀结构的系统，方法和装置
公开(公告)号：US09236260B2
公开(公告)日：2016-01-12
申请号：US13328218
申请日：2011-12-16
申请人： Christian René Bonhôte , Jeffrey S. Lille , Ricardo Ruiz , Georges Gibran Siddiqi
发明人： Christian René Bonhôte , Jeffrey S. Lille , Ricardo Ruiz , Georges Gibran Siddiqi
IPC分类号： H01L21/70 , H01L21/28 , H01L29/66 , H01L29/78 , H01L21/8238
CPC分类号： H01L21/28052 , H01L21/823814 , H01L21/823828 , H01L29/665 , H01L29/78
摘要： An integrated circuit has a doped silicon semiconductor with regions of insulators and bare silicon. The bare silicon regions are isolated from other bare silicon regions. A semiconductor device on the doped silicon semiconductor has at least two electrical connections to form regions of patterned metal. A metal is electroplated directly on each of the regions of patterned metal to form plated connections without a seed layer. A self-aligned silicide is located under each plated connection, formed by annealing, for the regions of plated metal on bare silicon.
摘要翻译：集成电路具有具有绝缘体和裸硅区域的掺杂硅半导体。裸硅区域与其他裸硅区域隔离。掺杂硅半导体上的半导体器件具有至少两个电连接以形成图案化金属的区域。将金属直接电镀在图案化金属的每个区域上，以形成没有种子层的电镀连接。自对准硅化物位于通过退火形成的每个电镀连接处，用于裸硅上的电镀金属区域。

10. 发明申请

US20130068719A1 METHOD USING BLOCK COPOLYMERS AND A HARD ELECTROPLATED MASK FOR MAKING A MASTER DISK FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 失效
标题翻译：使用块状共聚物的方法和用于制备用于印制图形磁记录盘的主磁盘的硬电极掩模
公开(公告)号：US20130068719A1
公开(公告)日：2013-03-21
申请号：US13236484
申请日：2011-09-19
申请人： Christian Rene' Bonhote , Jeffrey S. Lille , Ricardo Ruiz , Georges Gibran Siddiqi
发明人： Christian Rene' Bonhote , Jeffrey S. Lille , Ricardo Ruiz , Georges Gibran Siddiqi
IPC分类号： G11B5/84 , C25D5/02 , H01B13/00
CPC分类号： C25D1/20 , C25D1/10 , G11B5/855 , G11B5/858
摘要： A method for making a master disk to be used in the nanoimprinting process to make patterned-media disks uses an electrically conductive substrate and guided self-assembly of a block copolymer to form patterns of generally radial lines and/or generally concentric rings of one of the block copolymer components. A metal is electroplated onto the substrate in the regions not protected by the lines and/or rings. After removal of the block copolymer component, the remaining metal pattern is used as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.
摘要翻译：一种用于在纳米压印过程中制造母盘以使图案化介质盘使用导电基底并引导嵌段共聚物的自组装以形成大体径向线和/或大致同心环的图案的方法嵌段共聚物组分。在不受线路和/或环保护的区域中，将金属电镀到衬底上。在除去嵌段共聚物组分之后，剩余的金属图案用作蚀刻掩模以制造最终的母盘或两个单独的模具，然后用于制造母盘。

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