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1. 发明申请

US20070002493A1 APPARATUS FOR PROVIDING AN ALIGNED COIL FOR AN INDUCTIVE HEAD STRUCTURE USING A PATTERNED SEED LAYER 审中-公开
标题翻译：用于使用图案种子层为感应头结构提供对齐线圈的装置
公开(公告)号：US20070002493A1
公开(公告)日：2007-01-04
申请号：US11470594
申请日：2006-09-06
申请人： Thomas Dinan , Jeffrey Lille , Son Nguyen , Hugo Santini
发明人： Thomas Dinan , Jeffrey Lille , Son Nguyen , Hugo Santini
IPC分类号： G11B5/147
CPC分类号： G11B5/486 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , H01F17/0006 , H01F41/043 , H01F41/046 , Y10T29/4902 , Y10T29/4906 , Y10T29/49062 , Y10T29/49064 , Y10T29/49073
摘要： An apparatus for providing an aligned coil for an inductive head structure using a patterned seed layer is disclosed. The present invention uses an aligned process where the base plate imprint is fabricated on an electrically insulating layer and the reversed image is fabricated and etched into the coil insulation material, e.g., hard bake photoresist to alleviate the problems associated with complete ion removal of the seed layer between high aspect ratio coils. The present invention would also not be prone to plating non-uniformities (voids), and would not be subject to seed layer undercutting in a wet etch step process.
摘要翻译：公开了一种用于使用图案化种子层提供用于感应头结构的对准线圈的装置。本发明使用对准的工艺，其中基板印版制造在电绝缘层上，并且反转的图像被制造并蚀刻到线圈绝缘材料中，例如硬烘烤光致抗蚀剂以减轻与种子的完全离子去除相关的问题高纵横比线圈之间的层。本发明也不易于电镀不均匀（空隙），并且在湿法蚀刻步骤中不会经受种子层底切。

2. 发明申请

US20050243465A1 High aspect ratio co-planar structure fabrication consisting of different materials 有权
标题翻译：高纵横比共面结构制造由不同材料组成
公开(公告)号：US20050243465A1
公开(公告)日：2005-11-03
申请号：US10837386
申请日：2004-04-30
申请人： Jeffrey Lille , Son Nguyen , Hugo Santini
发明人： Jeffrey Lille , Son Nguyen , Hugo Santini
IPC分类号： G11B5/147 , G11B5/31
CPC分类号： G11B5/3163 , Y10T29/49052 , Y10T29/4906 , Y10T29/49064
摘要： A a method for fabricating a structure, such as a magnetic head, having two coplanar metallic features of different compositions, both deposited on their own seed layers. The features may be made tall relative to their widths (ie. have a high aspect ratio), and are also very closely spaced. Only a single high-definition, critically aligned photolithographic procedure is used to create the critical structures, avoiding any problem with aligning features produced by multiple procedures. The method is applied to the production of the write structure of a magnetic read/write head, where a portion of the pole structure and the inductive coils are fabricated in the same plane with a close spacing and both having a vertical aspect ratio of more than about 2:1.
摘要翻译：一种用于制造具有不同组成的两个共面金属特征的结构（例如磁头）的方法，两者都沉积在它们自己的种子层上。特征可以相对于它们的宽度（即，具有高纵横比）而高，并且也非常紧密地间隔开。仅使用单一的高清晰度，严格对准的光刻过程来创建关键结构，避免了由多个过程产生的对准特征的任何问题。该方法被应用于磁读/写头的写结构的制造，其中极结构和感应线圈的一部分以相近的间距制造在相同的平面中，并且两者的垂直纵横比大于约2：1。

3. 发明申请

US20050201011A1 Planarized perpendicular pole tip system and method for manufacturing the same 失效
标题翻译：平面垂直极端系统及其制造方法
公开(公告)号：US20050201011A1
公开(公告)日：2005-09-15
申请号：US10798163
申请日：2004-03-10
申请人： Frederick Dill , Jeffrey Lille , Son Nguyen , Hugo Santini
发明人： Frederick Dill , Jeffrey Lille , Son Nguyen , Hugo Santini
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , G11B5/3967 , Y10T29/49032
摘要： A method for manufacturing a pole tip structure for a magnetic head is provided. An etch stop layer is initially deposited after which a transfer layer is deposited. Further deposited is at least one masking layer. Reactive ion etching is then performed to define a trench in at least the transfer layer. A pole tip layer is then deposited in the trench to define a pole tip structure flanked at least in part by the transfer layer. A surface of the transfer layer or etch stop layer then remains in co-planar relationship with a surface of the pole tip structure.
摘要翻译：提供一种用于制造用于磁头的极尖结构的方法。最初沉积蚀刻停止层，之后沉积转移层。进一步沉积的是至少一个掩模层。然后执行反应离子蚀刻以在至少转移层中限定沟槽。然后将极尖层沉积在沟槽中以限定至少部分地由转移层侧面的极尖结构。然后转印层或蚀刻停止层的表面与极尖结构的表面保持共面关系。

4. 发明申请

US20050068676A1 Magnetic head having media heating device that is electrically connected to magnetic pole piece 有权
公开(公告)号：US20050068676A1
公开(公告)日：2005-03-31
申请号：US10675065
申请日：2003-09-29
申请人： Jeffrey Lille , Hugo Santini
发明人： Jeffrey Lille , Hugo Santini
IPC分类号： G11B5/31 , G11B5/147
CPC分类号： G11B5/3116
摘要： An embodiment of a magnetic head of the present invention includes a media heating device that is fabricated within the magnetic head structure following the fabrication of the read head element of the magnetic head. The media heating device is preferably fabricated between the first and second magnetic pole layers and close to the ABS surface of the head. The heating device includes electrical leads and an electrically resistive heating element that is preferably comprised of TaSiN, NiCr or NiFe, and in the present invention one or both of the magnetic poles are utilized as an electrical lead of the heating device. The heating device serves to heat the magnetic media immediately prior to the passage of the magnetic media beneath the pole tip, which lowers the localized coercivity of the media and facilitates the writing of data to the media by the write head element of the magnetic head.

5. 发明申请

US20060109588A1 Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer 审中-公开
公开(公告)号：US20060109588A1
公开(公告)日：2006-05-25
申请号：US11325133
申请日：2006-01-03
申请人： Quang Le , Jui-lung Li , Jeffrey Lille , Son Nguyen
发明人： Quang Le , Jui-lung Li , Jeffrey Lille , Son Nguyen
IPC分类号： G11B5/147
CPC分类号： G11B5/1278 , G11B5/3106 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： The method of making a magnetic head assembly includes forming a second pole piece layer that is recessed from a head surface, forming a reactive ion etchable (RIEable) pole tip forming layer on the second pole piece layer, forming an adhesion/stop layer of tantalum (Ta) on the pole tip forming layer, forming a photoresist mask on the adhesion/stop layer with an opening for patterning the adhesion/stop layer and the pole tip forming layer with another opening, reactive ion etching (RIE) through the opening to form the other opening, forming the second pole piece pole tip in the other opening with a top which is above a top of the adhesion/stop layer and chemical mechanical polishing (CMP) the top of the second pole piece pole tip until the CMP contacts the adhesion/stop layer. The invention also includes the magnetic head made by such a process.

6. 发明申请

US20050024779A1 Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer 失效
标题翻译：制造具有可蚀刻粘合CMP停止层的垂直记录磁头极尖的方法
公开(公告)号：US20050024779A1
公开(公告)日：2005-02-03
申请号：US10631706
申请日：2003-07-30
申请人： Quang Le , Jui-Iung Li , Jeffrey Lille , Son Nguyen
发明人： Quang Le , Jui-Iung Li , Jeffrey Lille , Son Nguyen
IPC分类号： G11B5/127 , G11B5/31
CPC分类号： G11B5/1278 , G11B5/3106 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： The method of making a magnetic head assembly includes forming a second pole piece layer that is recessed from a head surface, forming a reactive ion etchable (RIEable) pole tip forming layer on the second pole piece layer, forming an adhesion/stop layer of tantalum (Ta) on the pole tip forming layer, forming a photoresist mask on the adhesion/stop layer with an opening for patterning the adhesion/stop layer and the pole tip forming layer with another opening, reactive ion etching (RIE) through the opening to form the other opening, forming the second pole piece pole tip in the other opening with a top which is above a top of the adhesion/stop layer and chemical mechanical polishing (CMP) the top of the second pole piece pole tip until the CMP contacts the adhesion/stop layer. The invention also includes the magnetic head made by such a process.
摘要翻译：制造磁头组件的方法包括形成从头表面凹陷的第二极片层，在第二极片层上形成反应离子可蚀刻（可分离）极尖端形成层，形成钽的粘附/停止层（Ta），在粘合/停止层上形成光刻胶掩模，其中具有用于使粘附/阻挡层和极尖形成层图案化的开口具有另一个开口，反应离子蚀刻（RIE）通过开口至形成另一个开口，在另一个开口中形成具有位于粘附/停止层顶部之上的顶部的第二极靴极尖，并且在第二极片极尖的顶部进行化学机械抛光（CMP），直到CMP接触粘附/停止层。本发明还包括由这种方法制成的磁头。

7. 发明申请

US20080007872A1 Storage device with slider with sacrificial lapping extension 失效
标题翻译：带有牺牲研磨延伸的滑块的存储设备
公开(公告)号：US20080007872A1
公开(公告)日：2008-01-10
申请号：US11901748
申请日：2007-09-19
申请人： Richard Bunch , Jeffrey Lille , Huey-Ming Tzeng
发明人： Richard Bunch , Jeffrey Lille , Huey-Ming Tzeng
IPC分类号： G11B5/60
CPC分类号： G11B5/6005 , B24B37/048 , G11B5/3106 , G11B5/314 , G11B5/3163 , G11B5/3166 , G11B5/3169 , G11B5/3173 , G11B5/6082 , Y10T29/49037
摘要： A process for fabricating sliders with one or more sacrificial structures (extensions) that facilitate lapping to create the air-bearing surface (ABS) is described. Prior to separating individual sliders from a wafer, a mask outlines a sacrificial extension around portions of the magnetic transducer elements that are nearest the predetermined plane which will become the ABS. The sacrificial extension extends below the predetermined ABS plane. When the sliders are individually separated by DRIE, the shape of the mask including the sacrificial extension is projected down into and along the slider body. In one embodiment, a channel is disposed on the side of the slider opposite the ABS to provide space for the sacrificial extension of the adjacent slider and allow the sliders to be spaced closer together on the wafer surface for more efficient use of the wafer during head fabrication.
摘要翻译：描述了一种用于制造具有一个或多个牺牲结构（延伸部分）的滑块的方法，其便于研磨以产生空气轴承表面（ABS）。在将各个滑块与晶片分开之前，掩模围绕最靠近将成为ABS的预定平面的磁换能器元件周围的牺牲延伸。牺牲延伸部延伸到预定的ABS平面以下。当滑块由DRIE单独分开时，包括牺牲延伸部分的面罩的形状向下突出并沿着滑块体。在一个实施例中，通道设置在与ABS相对的滑块的侧面上，以为相邻滑块的牺牲延伸提供空间，并允许滑块在晶片表面上更靠近在一起，以在头部期间更有效地使用晶片制造。

8. 发明申请

US20070137027A1 METHOD FOR MANUFACTURING A TRAILING SHIELD STRUCTURE FOR A PERPENDICULAR MAGNETIC WRITE HEAD 有权
标题翻译：用于制造一个贯穿磁头写入头的跟踪屏蔽结构的方法
公开(公告)号：US20070137027A1
公开(公告)日：2007-06-21
申请号：US11678856
申请日：2007-02-26
申请人： Jeffrey Lille
发明人： Jeffrey Lille
IPC分类号： G11B5/33 , G11B5/127
CPC分类号： G11B5/1278 , G11B5/112 , Y10T29/49032 , Y10T29/49039 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49067
摘要： A method for forming a head having a trailing shield that includes forming a gap layer above a pole, forming a mask above the gap layer, and forming a trailing shield above the gap layer and adjacent the mask, a throat height of the trailing shield being defined between the mask.
摘要翻译：一种用于形成具有后挡板的头部的方法，包括在杆上形成间隙层，在间隙层上方形成掩模，以及在间隙层上方并在掩模附近形成后护罩，后护罩的喉部高度为在面具之间定义。

9. 发明申请

US20060152859A1 Three terminal magnetic sensor having an in-stack longitudinal biasing layer structure 失效
标题翻译：具有叠层纵向偏置层结构的三端磁传感器
公开(公告)号：US20060152859A1
公开(公告)日：2006-07-13
申请号：US11032598
申请日：2005-01-10
申请人： Jeffrey Childress , Robert Fontana , Jeffrey Lille
发明人： Jeffrey Childress , Robert Fontana , Jeffrey Lille
IPC分类号： G11B5/33 , G11B5/127 , G11B5/147 , H01L29/82 , H01L43/00
CPC分类号： B82Y25/00 , G01R33/093 , G11B5/3903 , G11B5/3932 , H01L29/66984 , H01L43/08
摘要： A three terminal magnetic sensor (TTM) suitable for use in a magnetic head has a base region, a collector region, and an emitter region. A first barrier layer is located between the emitter region and the base region, and a second barrier layer is located between the collector region and the base region. An air bearing surface (ABS) sensing plane of the TTM is defined along sides of the base region, the collector region, and the emitter region. The base region includes a free layer structure, a pinned layer structure, a first non-magnetic spacer layer formed between the free layer structure and the pinned layer structure, an in-stack longitudinal biasing layer (LBL) structure which magnetically biases the free layer structure, and a second non-magnetic spacer layer formed between the free layer structure and the in-stack longitudinal biasing layer structure. In one variation, the layers in the base region are inverted. The TTM may comprise a spin valve transistor (SVT), a magnetic tunnel transistor (MTT), or a double junction structure.
摘要翻译：适用于磁头的三端磁传感器（TTM）具有基极区域，集电极区域和发射极区域。第一阻挡层位于发射极区域和基极区域之间，第二阻挡层位于集电极区域和基极区域之间。 TTM的空气轴承表面（ABS）感测平面沿着基极区域，集电极区域和发射极区域的侧面被限定。基极区域包括自由层结构，钉扎层结构，形成在自由层结构和被钉扎层结构之间的第一非磁性间隔层，叠层纵向偏置层（LBL）结构，其磁性地偏置自由层结构，以及形成在自由层结构和叠层间纵向偏置层结构之间的第二非磁性间隔层。在一个变型中，基区中的层被倒置。 TTM可以包括自旋阀晶体管（SVT），磁隧道晶体管（MTT）或双结结构。

10. 发明申请

US20060039081A1 Method and apparatus for an enhanced coplanar conductance structure for inductive heads 失效
标题翻译：用于感应头的增强型共面电导结构的方法和装置
公开(公告)号：US20060039081A1
公开(公告)日：2006-02-23
申请号：US11247666
申请日：2005-10-11
申请人： Jeffrey Lille
发明人： Jeffrey Lille
IPC分类号： G11B5/17
CPC分类号： G11B5/17 , Y10T29/4906 , Y10T29/49064 , Y10T29/49073
摘要： A method and apparatus for forming a high conductance, high aspect ratio structure in a single low temperature copper chemical vapor deposition step. The present invention includes topographical features to increase a conformal coverage area.
摘要翻译：在单个低温铜化学气相沉积步骤中形成高电导率，高纵横比结构的方法和装置。本发明包括增加保形覆盖区域的形貌特征。

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