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    • 6. 发明申请
    • DISPLAY SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
    • 显示基板及其制造方法
    • US20120037910A1
    • 2012-02-16
    • US13111027
    • 2011-05-19
    • Young-Joo CHOIWoo-Geun LEEDo-Hyun KIM
    • Young-Joo CHOIWoo-Geun LEEDo-Hyun KIM
    • H01L33/08H01L33/16
    • H01L27/1225
    • A display substrate includes; a gate pattern including a gate electrode disposed on a substrate, a gate insulation layer disposed on the substrate and the gate pattern, an insulation pattern including; a first thickness part disposed on a first area of the gate insulation layer overlapping the gate electrode and a second thickness part disposed on a second area of the gate insulation layer adjacent to the first area, an oxide semiconductor pattern disposed on the first thickness part of the first area, an etch stopper disposed on the oxide semiconductor pattern, a source pattern including a source electrode and a drain electrode which contact the oxide semiconductor pattern, and a pixel electrode which contacts the drain electrode.
    • 显示基板包括: 栅极图案,包括设置在基板上的栅极电极,设置在基板上的栅极绝缘层和栅极图案,绝缘图案,包括: 设置在与栅电极重叠的栅极绝缘层的第一区域上的第一厚度部分和设置在与第一区域相邻的栅极绝缘层的第二区域上的第二厚度部分,设置在栅极绝缘层的第一厚度部分上的氧化物半导体图案 第一区域,设置在氧化物半导体图案上的蚀刻停止件,包括与氧化物半导体图案接触的源电极和漏电极的源图案以及与漏电极接触的像素电极。