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    • 9. 发明授权
    • Composite waveguide for solid phase binding assays
    • 用于固相结合测定的复合波导
    • US5832165A
    • 1998-11-03
    • US705893
    • 1996-08-28
    • W. Monty ReichertJames N. HerronDouglas A. ChristensenHsu-Kun Wang
    • W. Monty ReichertJames N. HerronDouglas A. ChristensenHsu-Kun Wang
    • G01N21/77G01N33/543G02B6/12G02B6/34G02B6/10
    • G01N21/7703G01N21/05G01N21/274G01N21/648G01N33/543G01N2021/058G01N2021/7709G01N2021/7763G01N2021/7786G02B2006/12038G02B2006/12107G02B2006/12173G02B2006/12176G02B6/34Y10S435/808Y10S436/805
    • A step-gradient composite waveguide for evanescent sensing in fluorescent binding assays comprises a thick substrate layer having one or more thin film waveguide channels deposited thereon. In one embodiment, the substrate is silicon dioxide and the thin film is silicon oxynitride. Specific binding molecules having the property of binding with specificity to an analyte are immobilized on the surface of the thin film channels. In preferred embodiments, the composite waveguide further includes light input coupling means integrally adapted to the thin film channels. Such light coupling means can be a grating etched into the substrate prior to deposition of the thin film, or a waveguide coupler affixed to the upper surface of the thin film. The waveguide coupler has a thick input waveguide of high refractive index which receives the laser light through one end and propagates it by total internal reflection. The propagated light is then coupled evanescently into the thin film waveguide across a spacer layer of precise thickness and having an index of refraction lower than either the input waveguide or the thin-film waveguide. The composite waveguide can be constructed by plasma vapor deposition of silicon oxynitride onto the silicon dioxide substrate, masking the channel waveguides with a photoresist, and using reactive ion etching to expose the substrate in the unmasked regions.
    • 在荧光结合测定中用于ev逝感测的梯度梯度复合波导包括其上沉积有一个或多个薄膜波导通道的厚基底层。 在一个实施例中,衬底是二氧化硅,薄膜是氮氧化硅。 具有与分析物特异性结合的特性的特异性结合分子被固定在薄膜通道的表面上。 在优选实施例中,复合波导还包括与薄膜通道整体适配的光输入耦合装置。 这种光耦合装置可以是在沉积薄膜之前蚀刻到基板中的光栅,或者固定到薄膜的上表面的波导耦合器。 波导耦合器具有高折射率的厚输入波导,其通过一端接收激光并通过全内反射传播。 然后将传播的光ev逝地穿过精确厚度的间隔层并且具有低于输入波导或薄膜波导的折射率的薄膜波导。 复合波导可以通过将氧氮化硅等离子体气相沉积到二氧化硅衬底上,用光致抗蚀剂掩蔽通道波导,并且使用反应离子蚀刻来暴露未掩模区域中的衬底。