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1. 发明申请

US20060207976A1 Laser material micromachining with green femtosecond pulses 审中-公开
标题翻译：激光材料微加工与绿色飞秒脉冲
公开(公告)号：US20060207976A1
公开(公告)日：2006-09-21
申请号：US11336383
申请日：2006-01-20
申请人： James Bovatsek , Alan Arai , Lawrence Shah , Fumiyo Yoshino
发明人： James Bovatsek , Alan Arai , Lawrence Shah , Fumiyo Yoshino
IPC分类号： B23K26/38 , B23K26/06
CPC分类号： B23K26/0624 , B23K26/0006 , B23K26/364 , B23K26/40 , B23K2103/172 , B23K2103/30 , B23K2103/42 , B23K2103/50 , C03B33/0222 , H01S3/0057
摘要： Various embodiments of a system described herein relate to micromachining materials using ultrashort visible laser pulses. The ultrashort laser pulses may be green and have a wavelength between about 500 to 550 nanometers in some embodiments. Additionally, the pulses may have a pulse duration of less than one picosecond in certain embodiments.
摘要翻译：本文描述的系统的各种实施例涉及使用超短可见激光脉冲的微加工材料。在一些实施例中，超短激光脉冲可以是绿色的并且具有在约500至550纳米之间的波长。另外，在某些实施例中，脉冲可以具有小于1皮秒的脉冲持续时间。

2. 发明申请

US20050226287A1 Femtosecond laser processing system with process parameters, controls and feedback 有权
标题翻译：飞秒激光加工系统具有工艺参数，控制和反馈
公开(公告)号：US20050226287A1
公开(公告)日：2005-10-13
申请号：US10813269
申请日：2004-03-31
申请人： Lawrence Shah , James Bovatsek , Alan Arai , Tadashi Yamamoto , Rajesh Patel , Donald Harter
发明人： Lawrence Shah , James Bovatsek , Alan Arai , Tadashi Yamamoto , Rajesh Patel , Donald Harter
IPC分类号： G01J11/00 , H01S3/00 , H01S3/067 , H01S3/10 , H01S3/102 , H01S3/109 , H01S3/13 , H01S3/16 , H01S3/23
CPC分类号： H01S3/10038 , G01J11/00 , H01S3/0014 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0078 , H01S3/06754 , H01S3/10023 , H01S3/10061 , H01S3/102 , H01S3/1024 , H01S3/108 , H01S3/109 , H01S3/1305 , H01S3/1618
摘要： A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.
摘要翻译：飞秒激光激光处理系统，具有飞秒激光，变频光学，光束操纵光学，目标运动控制，处理室，诊断系统和系统控制模块。基于飞秒激光的激光加工系统允许在微加工中利用独特的热控制，并且该系统具有更大的输出光束稳定性，连续可变的重复率和独特的时间波束整形能力。

3. 发明授权

US09321126B2 Laser-based material processing apparatus and methods 有权
标题翻译：激光材料加工设备及方法
公开(公告)号：US09321126B2
公开(公告)日：2016-04-26
申请号：US13037614
申请日：2011-03-01
申请人： Jingzhou Xu , Jin Young Sohn , Gyu Cheon Cho , Lawrence Shah
发明人： Jingzhou Xu , Jin Young Sohn , Gyu Cheon Cho , Lawrence Shah
IPC分类号： B23K26/00
CPC分类号： B23K26/00 , Y02P40/57
摘要： Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse width sufficiently short so that material is efficiently removed by nonlinear optical absorption from the region and a quantity of heat affected zone and thermal stress on the material within the region, proximate to the region, or both is reduced relative to a quantity obtainable using a laser with longer pulses. In at least one embodiment, an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a composite material.
摘要翻译：各种实施例可以用于对工件的目标材料进行基于激光的修改，同时有利地实现处理生产量和/或质量的改善。一种处理方法的实施例可以包括将激光脉冲聚焦并且以足够短的脉冲宽度将激光脉冲引导到工件的区域，使得通过来自该区域的非线性光学吸收和一定数量的热影响区域和区域内的材料，邻近区域或两者都相对于使用具有较长脉冲的激光可获得的量减少。在至少一个实施例中，超短脉冲激光系统可以包括光纤放大器或光纤激光器中的至少一个。各种实施例适合于在复合材料上或复合材料内的切割，切割，划线和成形特征中的至少一个。

4. 发明授权

US08094691B2 Yb: and Nd: mode-locked oscillators and fiber systems incorporated in solid-state short pulse laser systems 有权
标题翻译： Yb：和Nd：锁模振荡器和光纤系统并入固态短脉冲激光系统
公开(公告)号：US08094691B2
公开(公告)日：2012-01-10
申请号：US12816105
申请日：2010-06-15
申请人： Donald Harter , Gyu Cho , Zhenlin Liu , Martin Fermann , Xinhua Gu , Salvatore Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
发明人： Donald Harter , Gyu Cho , Zhenlin Liu , Martin Fermann , Xinhua Gu , Salvatore Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
IPC分类号： H01S3/30 , H01S3/10 , H01S3/13
CPC分类号： H01S3/1106 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0085 , H01S3/0092 , H01S3/06712 , H01S3/06725 , H01S3/0675 , H01S3/06754 , H01S3/06758 , H01S3/094003 , H01S3/094019 , H01S3/094042 , H01S3/094076 , H01S3/09415 , H01S3/1086 , H01S3/109 , H01S3/11 , H01S3/1118 , H01S3/1305 , H01S3/1611 , H01S3/1618 , H01S3/1643 , H01S3/235
摘要： The invention describes classes of robust fiber laser systems usable as pulse sources for Nd: or Yb: based regenerative amplifiers intended for industrial settings. The invention modifies adapts and incorporates several recent advances in FCPA systems to use as the input source for this new class of regenerative amplifier.
摘要翻译：本发明描述了可用作用于工业设置的用于基于Nd：或Yb：的再生放大器的脉冲源的鲁棒光纤激光器系统。本发明修改了适应性，并结合了FCPA系统中的几个最新进展，用作这种新型再生放大器的输入源。

5. 发明申请

US20100197116A1 LASER-BASED MATERIAL PROCESSING METHODS AND SYSTEMS 有权
标题翻译：基于激光的材料加工方法与系统
公开(公告)号：US20100197116A1
公开(公告)日：2010-08-05
申请号：US12641256
申请日：2009-12-17
申请人： Lawrence Shah , Gyu Cheon Cho , Jingzhou Xu
发明人： Lawrence Shah , Gyu Cheon Cho , Jingzhou Xu
IPC分类号： H01L21/461 , B23K26/38
CPC分类号： H01L21/268 , B23K26/0624 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/082 , B23K26/083 , B23K26/364 , B23K26/38 , B23K26/40 , B23K2101/40 , B23K2103/50
摘要： Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse repetition rate sufficiently high so that material is efficiently removed from the region and a quantity of unwanted material within the region, proximate to the region, or both is reduced relative to a quantity obtainable at a lower repetition rate. In at least one embodiment, an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a semiconductor substrate. Workpiece materials may also include metals, inorganic or organic dielectrics, or any material to be micromachined with femtosecond and/or picosecond pulses, and in some embodiments with pulse widths up to a few nanoseconds.
摘要翻译：各种实施例可以用于对工件的目标材料进行基于激光的修改，同时有利地实现处理生产量和/或质量的改善。处理方法的实施例可以包括将激光脉冲聚焦并以足够高的脉冲重复频率将激光脉冲引导到工件的区域，使得材料有效地从该区域移除并且在该区域内靠近该区域的一些不想要的材料，或者两者相对于以较低的重复率可获得的量减少。在至少一个实施例中，超短脉冲激光系统可以包括光纤放大器或光纤激光器中的至少一个。各种实施例适合于在半导体衬底上或半导体衬底内的切割，切割，划线和形成特征中的至少一个。工件材料还可以包括金属，无机或有机电介质，或用飞秒和/或皮秒脉冲微加工的任何材料，在一些实施例中，脉冲宽度可达几纳秒。

6. 发明申请

US20090097515A1 YB: AND ND: MODE-LOCKED OSCILLATORS AND FIBER SYSTEMS INCORPORATED IN SOLID-STATE SHORT PULSE LASER SYSTEMS 有权
标题翻译： YB：和ND：在固态短脉冲激光系统中并入的模式锁定振荡器和光纤系统
公开(公告)号：US20090097515A1
公开(公告)日：2009-04-16
申请号：US12340036
申请日：2008-12-19
申请人： Donald J. HARTER , Gyu C. Cho , Zhenlin Liu , Martin E. Fermann , Xinhua Gu , Salvatore F. Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
发明人： Donald J. HARTER , Gyu C. Cho , Zhenlin Liu , Martin E. Fermann , Xinhua Gu , Salvatore F. Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
IPC分类号： H01S3/10
CPC分类号： H01S3/1106 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0085 , H01S3/0092 , H01S3/06712 , H01S3/06725 , H01S3/0675 , H01S3/06754 , H01S3/06758 , H01S3/094003 , H01S3/094019 , H01S3/094042 , H01S3/094076 , H01S3/09415 , H01S3/1086 , H01S3/109 , H01S3/11 , H01S3/1118 , H01S3/1305 , H01S3/1611 , H01S3/1618 , H01S3/1643 , H01S3/235
摘要： The invention describes classes of robust fiber laser systems usable as pulse sources for Nd: or Yb: based regenerative amplifiers intended for industrial settings. The invention modifies adapts and incorporates several recent advances in FCPA systems to use as the input source for this new class of regenerative amplifier.
摘要翻译：本发明描述了可用作用于工业设置的用于基于Nd：或Yb：的再生放大器的脉冲源的鲁棒光纤激光器系统。本发明修改了适应性，并结合了FCPA系统中的几个最新进展，用作这种新型再生放大器的输入源。

7. 发明申请

US20060120418A1 Yb: and Nd: mode-locked oscillators and fiber systems incorporated in solid-state short pulse laser systems 有权
公开(公告)号：US20060120418A1
公开(公告)日：2006-06-08
申请号：US11005218
申请日：2004-12-07
申请人： Donald Harter , Gyu Cho , Zhenlin Liu , Martin Fermann , Xinhua Gu , Salvatore Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
发明人： Donald Harter , Gyu Cho , Zhenlin Liu , Martin Fermann , Xinhua Gu , Salvatore Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
IPC分类号： H01S3/13
CPC分类号： H01S3/1106 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0085 , H01S3/0092 , H01S3/06712 , H01S3/06725 , H01S3/0675 , H01S3/06754 , H01S3/06758 , H01S3/094003 , H01S3/094019 , H01S3/094042 , H01S3/094076 , H01S3/09415 , H01S3/1086 , H01S3/109 , H01S3/11 , H01S3/1118 , H01S3/1305 , H01S3/1611 , H01S3/1618 , H01S3/1643 , H01S3/235
摘要： The invention describes classes of robust fiber laser systems usable as pulse sources for Nd: or Yb: based regenerative amplifiers intended for industrial settings. The invention modifies adapts and incorporates several recent advances in FCPA systems to use as the input source for this new class of regenerative amplifier.

8. 发明授权

US08405885B2 Ultrashort laser micro-texture printing 有权
公开(公告)号：US08405885B2
公开(公告)日：2013-03-26
申请号：US12495609
申请日：2009-06-30
申请人： Lawrence Shah , Martin E. Fermann
发明人： Lawrence Shah , Martin E. Fermann
IPC分类号： H04N1/04
CPC分类号： G06K15/1209 , B41J2/442 , B41J2/471 , G06K15/129 , H04N1/40037 , H04N1/407
摘要： Systems and methods for providing laser texturing of solid substrates are disclosed. The texturing may be used to provide grayscale images obtainable from substrates, which may include steel, aluminum, glass, and silicon. In some embodiments, images may be obtainable from the substrate by modifying the reflective, diffractive, and/or absorptive features of the substrate or the substrate surface by forming random, periodic, and/or semi-periodic micro-structure features on the substrate (or substrate surface) by an ultrafast laser pulse train. The ultrafast pulse train may be modulated in order to vary, for example, optical exposure time, pulse train intensity, laser polarization, laser wavelength, or a combination of the aforementioned. The ultrafast pulse train and the substrate may be scanned with respect to each other to provide different optical energies to different regions of the substrate (or substrate surface). In some embodiments, the image is provided by making one or more passes of the ultrafast laser pulse train relative to the substrate.

9. 发明授权

US08077749B2 Pulsed laser source with adjustable grating compressor 有权
标题翻译：脉冲激光源与可调光栅压缩机
公开(公告)号：US08077749B2
公开(公告)日：2011-12-13
申请号：US12652168
申请日：2010-01-05
申请人： Lawrence Shah
发明人： Lawrence Shah
IPC分类号： H01S3/10
CPC分类号： H01S3/0057 , B23K26/0624 , G02B6/02138 , G02B6/02142 , G02B6/02147 , G02B6/13
摘要： Various embodiments described herein relate to a laser source for producing a pulsed laser beam comprising a plurality of ultrashort optical pulses having a variable repetition rate. In one embodiment, the laser source comprises a fiber oscillator, which outputs optical pulses and a pulse stretcher disposed to receive the optical pulses. The optical pulses have an optical pulse width. The pulse stretcher has dispersion that increases the optical pulse width yielding stretched optical pulses. The laser source further comprises a fiber amplifier disposed to receive the stretched optical pulses. The fiber optical amplifier has gain so as to amplify the stretched optical pulses. The laser source includes an automatically adjustable grating compressor having dispersion that reduces the optical pulse width. The grating compressor automatically adjusts this dispersion for different repetition rates.
摘要翻译：本文描述的各种实施例涉及用于产生脉冲激光束的激光源，其包括具有可变重复率的多个超短光脉冲。在一个实施例中，激光源包括输出光脉冲的光纤振荡器和布置成接收光脉冲的脉冲展宽器。光脉冲具有光脉冲宽度。脉冲展宽器具有增加产生拉伸光脉冲的光脉冲宽度的色散。激光源还包括光纤放大器，用于接收延伸的光脉冲。光纤放大器具有增益以便放大拉伸的光脉冲。激光源包括具有降低光脉冲宽度的色散的自动调节光栅压缩器。光栅压缩机自动调整不同重复率的色散。

10. 发明申请

US20100111120A1 PULSED LASER SOURCE WITH ADJUSTABLE GRATING COMPRESSOR 有权
标题翻译：脉冲激光源与可调式压光机
公开(公告)号：US20100111120A1
公开(公告)日：2010-05-06
申请号：US12652168
申请日：2010-01-05
申请人： Lawrence Shah
发明人： Lawrence Shah
IPC分类号： H01S3/10
CPC分类号： H01S3/0057 , B23K26/0624 , G02B6/02138 , G02B6/02142 , G02B6/02147 , G02B6/13
摘要： Various embodiments described herein relate to a laser source for producing a pulsed laser beam comprising a plurality of ultrashort optical pulses having a variable repetition rate. In one embodiment, the laser source comprises a fiber oscillator, which outputs optical pulses and a pulse stretcher disposed to receive the optical pulses. The optical pulses have an optical pulse width. The pulse stretcher has dispersion that increases the optical pulse width yielding stretched optical pulses. The laser source further comprises a fiber amplifier disposed to receive the stretched optical pulses. The fiber optical amplifier has gain so as to amplify the stretched optical pulses. The laser source includes an automatically adjustable grating compressor having dispersion that reduces the optical pulse width. The grating compressor automatically adjusts this dispersion for different repetition rates.
摘要翻译：本文描述的各种实施例涉及用于产生脉冲激光束的激光源，其包括具有可变重复率的多个超短光脉冲。在一个实施例中，激光源包括输出光脉冲的光纤振荡器和布置成接收光脉冲的脉冲展宽器。光脉冲具有光脉冲宽度。脉冲展宽器具有增加产生拉伸光脉冲的光脉冲宽度的色散。激光源还包括光纤放大器，用于接收延伸的光脉冲。光纤放大器具有增益以便放大拉伸的光脉冲。激光源包括具有降低光脉冲宽度的色散的自动调节光栅压缩器。光栅压缩机自动调整不同重复率的色散。

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