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    • 2. 发明申请
    • ROTATING SHUTTER FOR LASER-PRODUCED PLASMA DEBRIS MITIGATION
    • 旋转切割机用于激光生产的等离子体减少
    • US20060067476A1
    • 2006-03-30
    • US11161237
    • 2005-07-27
    • Scott BloomHarry RiegerJames Alwan
    • Scott BloomHarry RiegerJames Alwan
    • H05G2/00G21G4/00H01J35/00
    • G03F7/70916
    • A laser produced plasma device comprises a shutter assembly for mitigating the contaminating effects of debris generated by the plasma. In one embodiment, the shutter assembly includes a rotatable shutter having at least one aperture that provides a line-of-sight between a radiation source and an exit of the device during a first period of rotation of the shutter, and obstructs the line-of-sight between the radiation source and the exit during a second period of rotation. The shutter assembly in this embodiment also includes a motor configured to rotate the shutter to permit passage of the X-rays through the at least one aperture during the first period of rotation, and to thereafter rotate the shutter to obstruct passage of the debris through the at least one aperture during the second period of rotation.
    • 激光产生的等离子体装置包括用于减轻由等离子体产生的碎片的污染影响的快门组件。 在一个实施例中,快门组件包括具有至少一个孔的可旋转快门,所述孔在快门的旋转的第一周期期间在辐射源和装置的出口之间提供视线,并且阻挡线 在第二旋转周期期间在辐射源和出口之间。 在该实施例中的快门组件还包括马达,其被配置为旋转快门以允许X射线在旋转的第一周期期间通过至少一个孔,并且此后旋转快门以阻止碎片通过 在第二旋转周期期间的至少一个孔。