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    • 1. 发明申请
    • ROTATING SHUTTER FOR LASER-PRODUCED PLASMA DEBRIS MITIGATION
    • 旋转切割机用于激光生产的等离子体减少
    • US20060067476A1
    • 2006-03-30
    • US11161237
    • 2005-07-27
    • Scott BloomHarry RiegerJames Alwan
    • Scott BloomHarry RiegerJames Alwan
    • H05G2/00G21G4/00H01J35/00
    • G03F7/70916
    • A laser produced plasma device comprises a shutter assembly for mitigating the contaminating effects of debris generated by the plasma. In one embodiment, the shutter assembly includes a rotatable shutter having at least one aperture that provides a line-of-sight between a radiation source and an exit of the device during a first period of rotation of the shutter, and obstructs the line-of-sight between the radiation source and the exit during a second period of rotation. The shutter assembly in this embodiment also includes a motor configured to rotate the shutter to permit passage of the X-rays through the at least one aperture during the first period of rotation, and to thereafter rotate the shutter to obstruct passage of the debris through the at least one aperture during the second period of rotation.
    • 激光产生的等离子体装置包括用于减轻由等离子体产生的碎片的污染影响的快门组件。 在一个实施例中,快门组件包括具有至少一个孔的可旋转快门,所述孔在快门的旋转的第一周期期间在辐射源和装置的出口之间提供视线,并且阻挡线 在第二旋转周期期间在辐射源和出口之间。 在该实施例中的快门组件还包括马达,其被配置为旋转快门以允许X射线在旋转的第一周期期间通过至少一个孔,并且此后旋转快门以阻止碎片通过 在第二旋转周期期间的至少一个孔。
    • 6. 发明授权
    • Method and apparatus for laser ablation of a target material
    • 目标材料激光烧蚀的方法和装置
    • US06717101B2
    • 2004-04-06
    • US10264248
    • 2002-10-03
    • James H MorrisMichael PowersHarry Rieger
    • James H MorrisMichael PowersHarry Rieger
    • B23K2638
    • H01L21/67092B23K26/0624B23K26/0736B23K26/38B23K2101/40H01L21/4803Y10S438/94
    • A method and apparatus for laser cutting a target material is disclosed. The method includes the steps of generating laser pulses from a laser system and applying the laser pulses to the target material so that the laser pulses cut through the material. The laser pulses have an approximately ellipse shaped spot, have a temporal pulse width shorter than about 100 nanoseconds, and have an energy density from about 2 to about 20 times the ablation threshold energy of the target material. The laser pulses are applied to the material such that the major axis of the ellipse shaped spot moves parallel to the cutting direction. The spot has a leading edge and a trailing edge on the major axis, and the energy density of each laser pulse increases from zero to a maximum along the leading edge and decreases back to zero along the trailing edge. The apparatus is a laser system for cutting a target material that includes: a seed laser system for producing a first pulse laser beam; a laser amplifier for amplifying the first pulse laser beam to produce an amplified pulse laser beam; a harmonic generation system for converting the amplified pulse laser beam into a second pulse laser beam having a shorter wavelength; a focussing system for focussing the second pulse laser beam to an approximately ellipse shaped third pulse laser beam; and a motion control system for moving a target material contacted by the third pulse laser beam.
    • 公开了一种激光切割目标材料的方法和装置。 该方法包括以下步骤:从激光系统产生激光脉冲并将激光脉冲施加到目标材料,使得激光脉冲切穿材料。 激光脉冲具有近似椭圆形的点,具有短于约100纳秒的时间脉冲宽度,并且具有来自目标材料的消融阈值能量的约2至约20倍的能量密度。 激光脉冲施加到材料上,使得椭圆形点的长轴平行于切割方向移动。 该点在主轴上具有前缘和后缘,并且每个激光脉冲的能量密度沿着前沿从零增加到最大值,并沿着后沿逐渐减小到零。 该装置是用于切割目标材料的激光系统,其包括:种子激光系统,用于产生第一脉冲激光束; 激光放大器,用于放大第一脉冲激光束以产生放大的脉冲激光束; 用于将放大的脉冲激光束转换成具有较短波长的第二脉冲激光束的谐波发生系统; 用于将第二脉冲激光束聚焦到大致椭圆形的第三脉冲激光束的聚焦系统; 以及用于移动与第三脉冲激光束接触的目标材料的运动控制系统。
    • 7. 发明授权
    • X-ray target tape system
    • X射线目标磁带系统
    • US5668848A
    • 1997-09-16
    • US585695
    • 1996-01-16
    • Harry Rieger
    • Harry Rieger
    • H01J35/08H05G2/00H01J35/10
    • H05G2/001H01J35/08
    • A efficient point source x-ray target tape assemble. A tape is wrapped helically around a rotating drum a little more than one complete turn so as to create an overlap section where a section of the tape is positioned parallel and adjacent to a separate section of the tape. The tape advances slowly across the outside surface of the drum at a speed which is a small fraction of the tangential surface speed of said drum. In a preferred embodiment a pulsed laser beam is focused on the tape at a fixed spot in space through which the tape moves in order to create x-rays from plasma generated by very high intensity ablation of the tape material. The combination of the drum rotation and the tape advancement across the surface of the drum permits substantially full utilization of the tape material for generation of x-rays.
    • 高效点源x射线靶磁带组装。 胶带围绕旋转的滚筒缠绕一圈多于一个完整的转动,以便产生一个重叠部分,其中胶带的一部分平行并邻近胶带的单独部分。 胶带以滚筒的切向表面速度的一小部分的速度缓慢地延伸穿过鼓的外表面。 在优选实施例中,脉冲激光束聚焦在空间中的固定点处的磁带上,磁带通过该固定点移动,以便通过带材料的非常高强度的消融产生的等离子体产生X射线。 滚筒旋转和穿过滚筒表面的带前进的组合允许基本上充分利用带材以产生X射线。
    • 8. 发明授权
    • Systems and methods for tape advancement in laser produced plasma equipment
    • 用于激光制造等离子体设备中胶带前进的系统和方法
    • US07424096B2
    • 2008-09-09
    • US11014303
    • 2004-12-16
    • Harry RiegerAndrew Stone
    • Harry RiegerAndrew Stone
    • H01J35/08G21G4/00H01J35/00B65H23/00
    • H05G2/001
    • Disclosed herein are systems and methods for advancing tape/ribbon through a targeting area where laser ablation of the tape occurs in laser produced plasma equipment. Disclosed systems include a first positioning surface perpendicular to further positioning devices, where all of the positioning components work to precisely position the advancing tape in the point source area. After the first positioning device, the remaining positioning surfaces are parallel and provide positioning forces on the tape along a single horizontal axis, but in alternately opposing directions. Such forces assist to precisely position the tape in the desired target location, and to control the rate of advancement of the tape by imparting friction on the tape in alternating, opposing directions. A steady drive roller serves to pull the tape through the system, and works in conjunction with the friction imparted by the positioning surfaces to advance the tape at a substantially constant velocity.
    • 本文公开了用于使胶带/带通过瞄准区域的系统和方法,其中激光烧蚀带在激光产生的等离子体设备中发生。 所公开的系统包括垂直于另外的定位装置的第一定位表面,其中所有的定位部件用于精确地定位前进带在点源区域中。 在第一定位装置之后,剩余的定位表面是平行的,并且沿着单个水平轴线但沿交替地相反的方向在带上提供定位力。 这种力有助于将带精确地定位在期望的目标位置,并且通过在交替的相对方向上在带上施加摩擦来控制带的前进速率。 稳定的驱动辊用于将带拉动通过系统,并且与由定位表面赋予的摩擦力一起工作,以基本恒定的速度推进带。
    • 9. 发明申请
    • Systems and methods for tape advancement in laser produced plasma equipment
    • 用于激光制造等离子体设备中胶带前进的系统和方法
    • US20050180043A1
    • 2005-08-18
    • US11014303
    • 2004-12-16
    • Harry RiegerAndrew Stone
    • Harry RiegerAndrew Stone
    • G11B5/027
    • H05G2/001
    • Disclosed herein are systems and methods for advancing tape/ribbon through a targeting area where laser ablation of the tape occurs in laser produced plasma equipment. Disclosed systems include a first positioning surface perpendicular to further positioning devices, where all of the positioning components work to precisely position the advancing tape in the point source area. After the first positioning device, the remaining positioning surfaces are parallel and provide positioning forces on the tape along a single horizontal axis, but in alternately opposing directions. Such forces assist to precisely position the tape in the desired target location, and to control the rate of advancement of the tape by imparting friction on the tape in alternating, opposing directions. A steady drive roller serves to pull the tape through the system, and works in conjunction with the friction imparted by the positioning surfaces to advance the tape at a substantially constant velocity.
    • 本文公开了用于使胶带/带通过瞄准区域的系统和方法,其中激光烧蚀带在激光产生的等离子体设备中发生。 所公开的系统包括垂直于另外的定位装置的第一定位表面,其中所有的定位部件用于精确地定位前进带在点源区域中。 在第一定位装置之后,剩余的定位表面是平行的,并且沿着单个水平轴线但沿交替地相反的方向在带上提供定位力。 这种力有助于将带精确地定位在期望的目标位置,并且通过在交替的相对方向上在带上施加摩擦来控制带的前进速率。 稳定的驱动辊用于将带拉动通过系统,并且与由定位表面赋予的摩擦力一起工作,以基本恒定的速度推进带。