会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明申请
    • METHOD OF FABRICATING A SEMICONDUCTOR DEVICE HAVING SELF-ALIGNED FLOATING GATE AND RELATED DEVICE
    • 制备具有自对准浮选门的半导体器件及其相关器件的方法
    • US20070090443A1
    • 2007-04-26
    • US11425205
    • 2006-06-20
    • Byung-Yong CHOIChoong-Ho LEETae-Yong KIMDong-Gun PARK
    • Byung-Yong CHOIChoong-Ho LEETae-Yong KIMDong-Gun PARK
    • H01L21/336
    • H01L27/1203H01L21/84H01L27/115H01L27/11521H01L29/66795H01L29/7851
    • A semiconductor device such as a flash memory device having a self-aligned floating gate and a method of fabricating the same is provided. An embodiment of the device includes an isolation layer defining a fin body is formed in a semiconductor substrate. The fin body has a portion protruding above the isolation layer. A sacrificial pattern is formed on the isolation layer. The sacrificial pattern has an opening self-aligned with the protruding portion of the fin body. The protruding fin body is exposed in the opening. An insulated floating gate pattern is formed to fill the opening. The sacrificial pattern is then removed. An inter-gate dielectric layer covering the floating gate pattern is formed. A control gate conductive layer is formed over the inter-gate dielectric layer. The control gate conductive layer, the inter-gate dielectric layer, and the floating gate pattern are patterned to form a control gate electrode crossing the fin body as well as the insulated floating gate interposed between the control gate electrode and the fin body.
    • 提供了诸如具有自对准浮动栅极的闪速存储器件及其制造方法的半导体器件。 该器件的一个实施例包括在半导体衬底中形成限定翅片体的隔离层。 翅片本体具有突出于隔离层上方的部分。 在隔离层上形成牺牲图案。 牺牲图案具有与翅片体的突出部分自对准的开口。 突出的翅片体露出开口。 形成绝缘浮栅图形以填充开口。 然后去除牺牲图案。 形成覆盖浮栅图案的栅极间介电层。 在栅极间电介质层上形成控制栅极导电层。 对控制栅极导电层,栅极间电介质层和浮置栅极图案进行图案化以形成跨越鳍体的控制栅电极以及插在控制栅电极和鳍体之间的绝缘浮栅。