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    • 8. 发明申请
    • MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
    • 半导体器件的制造方法
    • US20110092032A1
    • 2011-04-21
    • US12766958
    • 2010-04-26
    • Jae Bon KooSeung Youl Kang
    • Jae Bon KooSeung Youl Kang
    • H01L21/336
    • H01L29/78603H01L21/84
    • Provided is a manufacturing methods of a semiconductor device. The methods includes: forming an active layer on a first substrate; bonding a top surface of the active layer with a second substrate and separating the active layer from the first substrate; forming conductive impurity regions corresponding to source and drain regions of the active layer bonded on the second substrate; bonding a third substrate on a bottom surface of the active layer and removing the second substrate; and forming a gate electrode on a top between the conductive impurity regions of the active layer bonded on the third substrate and forming source and drain electrodes on the conductive impurity regions.
    • 提供半导体器件的制造方法。 所述方法包括:在第一基板上形成有源层; 将有源层的顶表面与第二衬底结合并将有源层与第一衬底分离; 形成对应于结合在所述第二基板上的所述有源层的源区和漏区的导电杂质区; 将第三衬底接合在有源层的底表面上并移除第二衬底; 以及在结合在第三基板上的有源层的导电杂质区之间的顶部上形成栅电极,并在导电杂质区上形成源电极和漏电极。