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1. 发明申请

WO1994024937A1 DEVICE FOR IDENTIFYING FINGERPRINTS USING ULTRASONICS 审中-公开
标题翻译：设备技术识别使用超声波指纹图谱
公开(公告)号：WO1994024937A1
公开(公告)日：1994-11-10
申请号：PCT/EP1994001194
申请日：1994-04-18
申请人： JENOPTIK GMBH , KERSTEN, Ralf, Thomas , OEHMKE, Volker , THORWIRTH, Günter
发明人： JENOPTIK GMBH
IPC分类号： A61B05/117
CPC分类号： G06K9/0002 , A61B5/1172 , G10K11/004
摘要： The invention concerns a device for the identification of fingerprints by means of ultrasonics, the device consisting of an electronic analysis circuit, a hollow liquid-filled cylinder (1) of length L with a lid (2) and a baseplate (3), the speed of the ultrasonic waves through the liquid being c' and the lid (2) being made of a material through which the speed of the ultrasonic waves is c". The outside of the lid (2) is flat for use as the contact surface for the fingerprint. The inside is either convex (c'

2. 发明申请

WO1994023443A1 DEVICE FOR HANDLING WAFER-SHAPED OBJECTS IN A HANDLING PLANE OF A LOCAL CLEAN ROOM 审中-公开
标题翻译：设备技术，进行光盘形状的物体在局部洁净室的平面搬运
公开(公告)号：WO1994023443A1
公开(公告)日：1994-10-13
申请号：PCT/EP1994000959
申请日：1994-03-25
申请人： JENOPTIK GMBH , LAHNE, Berndt , SCHULTZ, Klaus , SCHELER, Werner , HEITMANN, Michael , GAGLIN, Axel
发明人： JENOPTIK GMBH
IPC分类号： H01L21/00
CPC分类号： H01L21/67265 , H01L21/67017 , H01L21/67766
摘要： In a device for handling wafer-shaped objects in a handling plane of a local clean room, the aim is to ensure the process stages preceding and succeeding the processing and inspection of the wafer-shaped objects in the conditions of a local clean room using SMIF boxes. According to the invention, the structure of the handling plane (H-H) is in a fixed relationship to a reference plane (E-E) of at least one magazine-indexing device (42) comprising the magazine feed (33) according to their magazine compartments (43) and the wafer-shaped objects therein and is arranged above an intermediate floor (9) which divides the clean room into two superimposed parts (10, 11) in which one component of an airstream from the part (10) above the intermediate floor (9) is directed into the part (11) beneath the intermediate floor (9). The invention is applicable in the manufacture of integrated circuits, especially for handling purposes.

3. 发明申请

WO1995013739A1 METHOD AND DEVICE FOR THE NON-INVASIVE TRANSCUTANEAN DETERMINATION OF THE CONCENTRATIONS OF SUBSTANCES IN HUMAN BODY FLUIDS OR TISSUES 审中-公开
标题翻译：方法和设备，用于体液或人的组织燃料浓度变化无创，经皮测定
公开(公告)号：WO1995013739A1
公开(公告)日：1995-05-26
申请号：PCT/EP1994003316
申请日：1994-10-07
申请人： JENOPTIK GMBH , FISCHBACHER, Christoph , JAGEMANN, Kay-Uwe , DANZER, Klaus , MÜLLER, Ulrich, Alfons , PAPENKORDT, Lutz , SCHÜLER, Jost
发明人： JENOPTIK GMBH
IPC分类号： A61B05/00
CPC分类号： A61B5/1455 , A61B5/14532 , A61B5/14546 , A61B5/7264 , G01N21/359
摘要： The aim of the invention is to provide a method and device for the non-invasive transcutaneous determination of the concentrations of substances in the human body, the method being unaffected by person-dependent interference variables, and the dominance of water absorption, as well as the effect of blood circulation through the tissues, being reduced. This aim is achieved by irradiating (1, 2) a suitable area of the skin with broad-band radiation, by recording the transmission or reflection spectrum (3, 4, 6), by making a series of intensity measurements at suitably spaced intervals (12) over this spectrum and by processing the series of intensity measurements using an artificial neuronal network (13). The neuronal network (13) is taught, in a teaching phase, with a multiplicity of intensity-measurement series and simultaneously invasively obtained concentration values in order to generate weight matrices. The invention is suitable for use in the non-invasive determination of the concentrations of substances in human blood, e.g. haemoglobin, bilirubin, glucose, albumin, urea, cholesterol and other metabolic products.
摘要翻译：本发明涉及一种方法和用于体液或人的组织的非侵入性经皮确定物质浓度的布置。找到抑制在两个人依赖性干扰变量在人体内提供的非侵入性经皮确定物质浓度的可能性的目的和吸水率的主导地位和组织血流量的影响减少，根据本发明通过皮肤的合适的部分来实现被照射的宽带（1 ，2），一个传输或反射光谱（3,4，6）中的溶液，（从适当安排光谱间隔12）的该频谱确定了一系列强度测量值和通过人工神经网络（13），其中，所述的装置评估的系列强度测量值的与多个强度测量值的序列的学习阶段的神经网络（13），并在同一时间进行加权矩阵的生成创测量浓度值被训练。本发明是用于非侵入性测定物质浓度的人血中，例如，血红蛋白，胆红素，葡萄糖，白蛋白，尿素，胆固醇和其他代谢产物。

4. 发明申请

WO1993005382A1 DEVICE FOR TESTING UNSET CONCRETE AND MORTAR 审中-公开
标题翻译：用于测试非固化混凝土和碎屑的装置
公开(公告)号：WO1993005382A1
公开(公告)日：1993-03-18
申请号：PCT/CH1992000174
申请日：1992-08-28
申请人： ATROF BAUPHYSIK AG , JENOPTIK GMBH , ENZLER, Ruedi , LEMBKE, Elfrun , LÜTH, Gunter , ZIMMERMANN, Peter , SCHMIDT, Eberhard
发明人： ATROF BAUPHYSIK AG , JENOPTIK GMBH
IPC分类号： G01N11/14
CPC分类号： G01N33/383 , G01N11/14
摘要： A rotary testing device can be connected to a base unit. A temperature sensor may also be connected to the base unit. The testing device has probe heads that are submerged and rotated in the fluid concrete, and the force required to rotate them is measured by the base unit. Various concrete recipes are stored in a memory of the base unit. Data concerning the concrete to be tested are calculated by comparison of the force required to rotate the testing device with the force derived from a respective characteristic curve and the calculated data are read from a display field. A concrete recipe and its specific measurements are selected by depressing keys by means of which are selected the respective electronic processes in the base unit for measurement and comparison with stored characteristic data.
摘要翻译：旋转测试装置可以连接到基本单元。温度传感器也可以连接到基座单元。测试装置具有在流体混凝土中浸没和旋转的探针头，并且旋转它们所需的力由基座单元测量。各种具体配方存储在基本单元的存储器中。通过将测试装置与从各个特性曲线导出的力进行旋转所需的力的比较来计算关于要测试的混凝土的数据，并且从显示区域读取计算的数据。通过按下键来选择具体的配方及其特定的测量，所述键通过它们选择基本单元中的各个电子处理，以用于测量并与存储的特征数据进行比较。

5. 发明申请

WO1995000773A1 ANTI-DAMAGE PROTECTING SYSTEM FOR A BODY DRIVEN IN A PLANE 审中-公开
标题翻译： HAVARIE设备技术驱动一种平面BODY
公开(公告)号：WO1995000773A1
公开(公告)日：1995-01-05
申请号：PCT/EP1994002024
申请日：1994-06-21
申请人： JENOPTIK GMBH , HÜBNER, Gerd , NESTLER, Klaus , MICHL, Uwe
发明人： JENOPTIK GMBH
IPC分类号： F16F15/04
CPC分类号： G01H9/00 , F16F15/02 , F16P7/02
摘要： An anti-damage system for a body driven in a plane additionally delimits its working area determined by measurement systems and end position sensors on a base plate. The object of the invention is to prevent the driven body from leaving the working area in clean-room conditions when the impact possibilities of the driven body are multiple as far as its position and direction of impact are concerned, and to exclude inadmissible accleration values during braking even at the maximum speed of the driven body. The body (2) is enclosed in the plane by a frame (3) whose mass corresponds to that of the body (2) and which has a sliding path delimited in the plane. In addition, the body (2) or the frame (3) is provided with dampening means (8) at its impact surface. The invention is particularly suitable for positioning tables driven by planar motors for use in clean-room conditions.
摘要翻译：在平面主体从动用于附加地限制了其通过测量系统指定和限位开关在底板上，对象工作区域中，无尘室条件下，在各种被驱动体的冲击的可能性相对于所述位置和方向，以防止其出口从工作区域为一个事故设备和避免制动期间超过不允许的加速度值，即使在主体的最大速度。根据本发明，所述主体（2）中在其质量相应于所述主体（2）框架（3）的平面被封闭，其具有在平面内的有限滑动行程。此外，本体（2）或框架（3）的阻尼元件（8）在其撞击表面具有。本发明发现了在定位台，这是由平面马达驱动，并且它们的使用是在洁净室条件下的特定应用。

6. 发明申请

WO1994020979A1 DEVICE FOR INDEXING MAGAZINE COMPARTMENTS AND WAFER-SHAPED OBJECTS IN THE COMPARTMENTS 审中-公开
标题翻译：装置，用于包含在其中的杂志的索引杂志隔室和盘形物体
公开(公告)号：WO1994020979A1
公开(公告)日：1994-09-15
申请号：PCT/EP1994000620
申请日：1994-03-03
申请人： JENOPTIK GMBH , BIRKNER, Andreas , LAHNE, Berndt , SCHULTZ, Klaus
发明人： JENOPTIK GMBH
IPC分类号： H01L21/00
CPC分类号： H01L21/67265 , H01L23/544 , H01L2223/54453 , H01L2924/0002 , Y10S414/137 , H01L2924/00
摘要： Described is an indexing device for indexing magazine compartments and wafer-shaped objects in the compartments. The aim of the invention is to ensure that a removal and insertion device has precise access to the magazine in any given plane, independent of dimensional tolerances. The invention calls for the measurement beam (10) of an optoelectronic sensor consisting of an emitter (7) and a receiver (8) to be used to determine not only the locations of the objects (13) but also the locations of the compartments (12) relative to a reference plane (E-E) whose location is defined with respect to a handling plane (H-H) for removal and feed. The height of the magazine (11) can be altered by measured amounts by means of a support platform (2) and a lift to permit removal and insertion of objects. The invention is intended for use in the manufacture of integrated circuits, and in particular for handling wafer-shaped objects.

7. 发明申请

WO1994002834A1 PROCESS AND DEVICE FOR PHOTO-THERMAL SPECTROSCOPY 审中-公开
标题翻译：方法和系统热PHOTO光谱
公开(公告)号：WO1994002834A1
公开(公告)日：1994-02-03
申请号：PCT/EP1993001852
申请日：1993-07-14
申请人： JENOPTIK GMBH , GEILER, Hans-Dieter , WAGNER, Matthias
发明人： JENOPTIK GMBH
IPC分类号： G01N21/17
CPC分类号： G01N21/8422 , G01N21/17
摘要： The invention relates to a process and device for photo-thermal spectroscopy (thermal wave analysis) of the single-beam process with double modulation type. The aim of developing a single-beam process which makes use of the advantages of the double modulation system in detecting the photo-thermally generated differential frequency without requiring partial beams and attains a high degree of intermodulation freedom, is achieved by the invention in that the intensity of the laser beam is modulated before impinging on the object in such a way that there are in the modulation spectrum essentially a carrier frequency (f1) and two side-band frequencies (f1-f2), where f2 is the basic pulse frequency of the modulation, a regulating detector and a regulating loop entering into the modulation process are used to suppress the component of the basic pulse frequency (f2) which is of the same phase as the mixed frequency consisting of the carrier and side-band frequencies, and, after interaction with the object, a measuring detector and a frequency and phase-selective device are used to measure the optical response of the object as an amplitude of the component of the basic pulse frequency (f2) which as a photo-thermal mixed product is of the same phase as the mixed frequency of the carrier frequency (f1) and the side-band frequencies (f1-f2). The invention is applicable to the interference-free and contactless analysis of the material parameters of regions of solid bodies close to the surface.

8. 发明申请

WO1995005003A1 DEVICE FOR TRANSPORTING WAFER MAGAZINES 审中-公开
标题翻译：设备运输WAFER杂志
公开(公告)号：WO1995005003A1
公开(公告)日：1995-02-16
申请号：PCT/EP1994002447
申请日：1994-07-25
申请人： JENOPTIK GMBH , ADLER, Erich , MAGES, Marlies
发明人： JENOPTIK GMBH
IPC分类号： H01L21/00
CPC分类号： H01L21/67772 , Y10S414/14
摘要： In a device for transporting wafer magazines, one must exclude to a large extent any generation of particles caused by handling and any disturbances of the laminar flow in the clean room caused by the handling device, even if the handling device must work through two areas that may be separated or selectively joind together. In order to transfer the magazine from a storage position to a processing station, a linear drive for a fixed gripper arm that may be vertically adjusted in the direction of displacement of a lift is secured to a bearing column spaced away from the lift drive so as to form an air passage. The action range of the fixed gripper arm lies above the magazine located in the storage position and is perpendicular to the travelling direction of the lift. All parts of the drive are separated from the clean room by a dust-proof cladding and suction arrangements are arranged next to the openings through which the transport elements project into the clean room. The invention allows semiconductor manufacturing plants to be equipped or retrofitted with a SMIF-system.
摘要翻译：在用于传输晶片杂志，对象，即使是溶液，设备，其中大约两个彼此分开，或任选组合的扇区必须采取行动主要是通过颗粒的产生和洁净室的层流的扰动通过所述操作装置的操作排除可能一个操纵装置。是根据本发明的用于从存储位置移动到加工站到支撑柱的杂志的实施，涉及一种电梯驱动的距离是一个空气通道开口，固定在用于刚性的夹紧臂，位于其作用区域的上方在所述存储位置的电梯可调整的线性驱动器的行进方向该杂志位于并且被垂直引导到电梯的行进方向。所有驱动部件从洁净室通过防尘外壳分离，并且通过孔在洁净室中的传送元件，相邻的抽吸延伸。本发明能够除去和半导体制造设备的改造与SMIF系统。

9. 发明申请

WO1995005002A1 CONVEYOR FOR MAGAZINES RECEIVING DISK-SHAPED OBJECTS 审中-公开
标题翻译：转运FOR杂志记录圆盘状物体
公开(公告)号：WO1995005002A1
公开(公告)日：1995-02-16
申请号：PCT/EP1994002446
申请日：1994-07-25
申请人： JENOPTIK GMBH , LUDWIG, Joachim
发明人： JENOPTIK GMBH
IPC分类号： H01L21/00
CPC分类号： H01L21/67393 , Y10S414/14
摘要： In a conveyor for magazines receiving disk-shaped objects, the problem must be solved of ensuring by simple technical means a timely and sufficient gas exchange within a SMIF box adapted to the working regime of a SMIF system. For that purpose, a gas supply channel (4, 31, 54) opens from closable channels shaped into the wall (2, 29, 56) into gas distributing means. A gas draining channel (5, 37, 55) is in communication with a gas outlet adjacent to the gas magazine (3), opposite to the gas distributing means. The invention is preferably suitable for the manufacture of semiconductor chips.
摘要翻译：在用于杂志，用于接收盘形的对象，该对象，很少的技术努力，以确保一个SMIF盒子内，以符合该连接与SMIF系统工作机制所需的程度的时有效的气体交换的传输设备。根据本发明，在壁（2，29，56）被并入闭通道的引线，在用于气体分配剂的气体供应通道（4，31，54）。甲气体排放通道（5,37，55）连接，相对的盒（3）相邻于与气体出口的气体分布的装置。本发明是在制造半导体芯片适用优选。

10. 发明申请

WO1995001590A1 ANTI-TOPPLING ARRANGEMENT FOR DRIVES WITH GAS BEARINGS 审中-公开
标题翻译：装置脱除倾斜，特别是在天然气存储驱动器
公开(公告)号：WO1995001590A1
公开(公告)日：1995-01-12
申请号：PCT/EP1994002047
申请日：1994-06-22
申请人： JENOPTIK GMBH , HÜBNER, Gerd
发明人： JENOPTIK GMBH
IPC分类号： G05D03/12
CPC分类号： F16C32/0662 , B23Q1/385 , F16C2322/39 , G01B7/14
摘要： The object of the invention is to create an anti-toppling arrangement for drives with gas bearings which excludes any contact between both gas bearing parts caused by toppling without increasing the inner and outer stiffness of the bearing. For that purpose, the movable gas bearing part of a drive consists of adjacent bearing elements (1, 2) with pairs of parallel edges on which an object to be moved (4) is secured in some sections by regulating means and in other sections by hinges (7, 8). The hinges (7, 8) have axes of rotation perpendicular to the direction of motion of the object and parallel to the fixed gas bearing part (3) of the drive. The extent of the deviation of a bearing element (1, 2) from the parallel orientation in relation to the fixed gas bearing part (3) is used as regulating variable for the regulating means. The invention is suitable for objects moved on gas bearings, in particular table systems moved by means of linear or planar motors.
摘要翻译：在用于消除倾斜与气体轴承致动器的装置，所述对象中排除由所述倾斜的诱发，在不增加内和外刚性，气体轴承零件的相互接触是。根据本发明，从另一相邻载体部件（1，2）与对互相平行的边，在其上要被移动的物体（4），这两个部分通过调节装置的驱动的可移动气体轴承部，以及在节通过铰链（7,8）被安装。关节（7，8）具有旋转轴线，它们垂直于所述对象的运动方向和平行于所述驱动器的固定气体轴承部件（3）。载体部分的位置偏离的（1，2）从平行的位置，以固定气体轴承部件（3）的范围内用作调整装置的控制变量。本发明适用于存储的运动物体，特别是与线性或平面马达移动Tischysteme气体。

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