专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JPH01190977A NATURAL CIRCULATION SYSTEM CRYOPUMP 失效
公开(公告)号：JPH01190977A
公开(公告)日：1989-08-01
申请号：JP1072588
申请日：1988-01-22
申请人： HITACHI LTD , JAPAN ATOMIC ENERGY RES INST
发明人： ONO YOICHI , SHIBANUMA KIYOSHI , SHIBATA TAKEYORI
IPC分类号： F04B37/08 , F25D3/10
摘要： PURPOSE:To ensure good natural circulation of liquid helium by coating a supply pipe with a heat shield brought into thermal contact with a gas vent pipe or a cryopanel. CONSTITUTION:A supply pipe 5 is coated in the adjacent part to a gas vent pipe 6 with a heat shield 11A formed by aluminum or the like brought into thermal contact with the gas vent pipe 6. This supply pipe 5 is coated in a part in the vicinity of a cryopanel 1A with a heat shield 11B formed by aluminum or the like brought into thermal contact with the cryopanel 1A. Thus because the heat shields 11A, 11B are cooled to a temperature of liquid helium, the supply pipe 5 enables its intrusion heat to be decreased as small as neglectable. Accordingly, even in a cryopump applying a measure of reducing the intrusion heat to the cryopanels 1A-1C, good natural circulation of the liquid helium can be ensured.

2. 发明专利

JPH01242777A METHOD FOR INSPECTING ALUMINUM COATING FILM ON CRYOPANEL 失效
公开(公告)号：JPH01242777A
公开(公告)日：1989-09-27
申请号：JP6955788
申请日：1988-03-25
申请人： HITACHI LTD , JAPAN ATOMIC ENERGY RES INST
发明人： OISHI SEITARO , MAEDA HIROSHI , SHIBATA TAKEYORI
IPC分类号： C23C14/34 , C23C14/54
摘要： PURPOSE:To increase the efficiency of inspection of Al coating films on cryopanels and the yield of products by arranging several cryopanels, a dummy panel and panel chips every time sputtering is carried out. CONSTITUTION:When the surfaces of cryopanels 1 are coated with Al by cathode sputtering, the cryopanels 1, a dummy panel 2 having the same size and shape as the cryopanels 1 and plural panel chips 3 arranged around one of the cryopanels 1 are put in a sputtering device 4A, 4B and sputtering is carried out. After the end of sputtering, the dummy panel 2 and the panel chips 3 are inspected to judge whether the thickness and quality of formed Al coating films are satisfactory or not. Thus, the efficiency of inspection of Al coating films and the yield of products can be increased.

3. 发明专利

JPS60169750A INSULATING CAPACITY TESTING APPARATUS OF EXTREMELY LOW TEMPERATURE TRANSFER PIPING 失效
公开(公告)号：JPS60169750A
公开(公告)日：1985-09-03
申请号：JP2508884
申请日：1984-02-15
申请人： JAPAN ATOMIC ENERGY RES INST , HITACHI LTD
发明人： SHIBATA TAKEYORI , MATSUMOTO KOUZOU , HOSOMI NOBUYUKI , TAKEI NOBUYUKI , TAKADA TADASHI , HAYASHI KENJI
IPC分类号： G01N25/18 , G01K17/00 , G01K17/06
摘要： PURPOSE:To determine the invaded heat of a long or shape-complicated transfer pipe with good accuracy, by converting an extremely low temp. liquified cooling medium from a supply source to a gas-liquid separated two-phase stream and providing a dewer for supplying said two-phase stream to the transfer pipe. CONSTITUTION:Liquid nitrogen (LN2) supplied to a feed-out dewer 51 from a tank 10 is converted to a gas-liquid separated two-phase stream which is, in turn, supplied to a transfer pipe 22a through a temporarily constructed pipe 20b. Next, LN2 supplied to the pipe 22a through the pipe 20b absorbs invaded heat which flowed through the pipe 22a and, thereafter, only gaseous nitrogen (GN2) is supplied to a branched pipe 22b and GN2 flowed through the pipe 22b is discharged to the open air through a temporarily constructed pipe 20c, a dewer 55 and a heater 12a. At this time, total invaded heat can be calculated from enthalpy of LN2 calculated from pressure measured by a pressure gauge 31, enthalpy calculated from the temp. measured by a thermometer 32b and the flow amount measured by a flow meter 33a and invaded heat measured beforehand is subtracted from the total invaded heat to calculate the invaded heat of the pipes 22a, 22b. Therefore, the invaded heat of a long or shape-complicated transfer pipe can be determined with good accuracy.

4. 发明专利

JPH01242766A ALUMINUM COATING METHOD FOR CRYOPANEL 失效
公开(公告)号：JPH01242766A
公开(公告)日：1989-09-27
申请号：JP6955688
申请日：1988-03-25
申请人： HITACHI LTD , JAPAN ATOMIC ENERGY RES INST
发明人： OISHI SEITARO , SAWADA TAKAO , SHIBATA TAKEYORI
IPC分类号： H05H1/22 , C23C14/02
摘要： PURPOSE:To uniformize the thickness of a coating and to improve adhesive strength by subjecting the surface of a cryopanel to polishing and cleaning under respectively specified conditions and then coating the above surface with Al by a cathodic sputtering method. CONSTITUTION:The surface of a cryopanel used for a neutral particle incident apparatus is polished to >=400mesh and then mechanically or chemically cleaned. Successively, the above surface is coated with Al by a cathodic sputtering method. As to sputtering conditions, the purity of an Al target material, an ultimate pressure in a vacuum tank, argon-charging pressure, impressed voltage, electric current, sputtering time, and presputtering time are regulated to >=99.9%, Torr, Torr, DC500-600V, 0.7-0.9A, 120-140min, and 10-20min, respectively. Cleaning is carried out by means of washing with neutral detergents, immersion in trichlene, wiping with acetone, cleaning with freon vapor, etc.

5. 发明专利

JPH01159568A METHOD OF CONTROLLING OPERATION OF CRYOGENIC LIQUEFYING REFRIGERATOR 失效
公开(公告)号：JPH01159568A
公开(公告)日：1989-06-22
申请号：JP31628587
申请日：1987-12-16
申请人： JAPAN ATOMIC ENERGY RES INST , HITACHI LTD
发明人： SHIBANUMA KIYOSHI , SHIBATA TAKEYORI , MATSUMOTO KOZO , KAJIWARA HIROTAKE , KAWAMURA SHIGETO
IPC分类号： F25B9/02
摘要： PURPOSE: To ensure smooth and efficient operation by controlling the intermediate pressure of an expander at the inlet valve thereof depending on the load of an object to be cooled and controlling the flow rate of high pressure gas being introduced to a cryogenic liquefaction chiller through a Joule-Thomson valve. CONSTITUTION: A refrigeration load signal 27 is delivered from an object 20a-20n to be cooled to a setter 28 and an intermediate pressure set signal 29 of an expander corresponding to the refrigeration load is delivered to a controller 34 for the inlet valve 12 of the expander. At the same time, a high pressure gas flow rate set signal 30 is delivered to a controller 31 for a Joule-Thomson valve(JT valve). The controller 31 controls a JT valve 13 by producing a control signal 33 from a high pressure gas flow rate signal 32 and the signal 30. The controller 34 controls the inlet valve 12 by producing a control signal 36 from an intermediate pressure signal 35 and the signal 29. Consequently, a cryogenic liquefaction chiller can be held easily in a correct operating state for various load conditions of the object 20a-20n resulting in smooth and efficient operation control.

6. 发明专利

JPH01159474A METHOD FOR PRE-COOLING CRYO-PUMP 失效
公开(公告)号：JPH01159474A
公开(公告)日：1989-06-22
申请号：JP31628687
申请日：1987-12-16
申请人： HITACHI LTD , JAPAN ATOMIC ENERGY RES INST
发明人： ONO YOICHI , SHIBANUMA KIYOSHI , SHIBATA TAKEYORI
IPC分类号： F04B37/08 , F04B37/16
摘要： PURPOSE:To improve cooling efficiency by controlling flow rate regulating valves related with respective pumps by means of functions which make a flow rate constant to the temperature determined by characteristics of the respective valves in a device which is uniformly cooled by feeding refrigerant to plural numbers of cryo-pumps operated in parallel. CONSTITUTION:In a device wherein two pumps 1a and 1b are uniformly pre- cooled by feeding refrigerant from a helium refrigerator 7 to these two cryo- pumps 1a and 1b arranged in parallel, temperature detectors 3a and 3b are provided, which detect the temperature of refrigerant flowing respective flow rate regulating valves 2a and 2b. Functions which make a flow rate constant against temperature determined by characteristics of the respective flow regulating valves 2a and 2b are generated by respective function generators 5a and 5b based on the output of the detectors. In addition, the temperature of the respective pumps 1a and 1b is detected by respective detectors 4a and 4b so that the average value of respective detected temperature is computed, following which, the aforesaid functions are corrected by the deviation between the average values of temperature for the respective pumps 1a and 1b so as to let the respective flow rate regulating valves 2a and 2b be thereby controlled.

7. 发明专利

JPH01150759A METHOD OF CONTROLLING CRYOGENIC LIQUEFYING REFRIGERATOR 失效
公开(公告)号：JPH01150759A
公开(公告)日：1989-06-13
申请号：JP30753287
申请日：1987-12-07
申请人： JAPAN ATOMIC ENERGY RES INST , HITACHI LTD
发明人： SHIBANUMA KIYOSHI , SHIBATA TAKEYORI , MATSUMOTO KOZO , KAJIWARA HIROTAKE
IPC分类号： F25B9/02
摘要： PURPOSE: To ensure smooth and effective operation of a cryogenic temperature liquefying/freezing apparatus by controlling an opening of one of an expander inlet valve and a Joule-Tomson valve under load conditions of an article to be cooled, and further controlling a flow rate of high pressure gas introduced into a cryogenic temperature liquefying/freezing apparatus. CONSTITUTION: Liquefied gas is supplied to articles 20a to 20n through a liquefied gas transfer pipe 16 to absorb a heat load into gas which gas is returned to a cold box 10 and further to a compressor 1 after passage through a low temperature gas return pipe 17. The low temperature gas returning through a return pipe 17 corresponds to freezing loads of the articles 20a to 20n and ordinary temperature gas returning the return pipe 21 corresponds to liquefying loads of the articles 20a to 20n. The freezing loads of the articles 20a to 20n are incorporated into a controller as a freezing load signal 32, whereby a JT valve 13 is adjusted to a corresponding opening with an adjusting signal 33. In contrast, a high pressure gas flow rate introduced into the cold box 10 is incorporated into a controller 35 as a signal 36 and is kept unchanged by controlling an expander inlet valve 12 with an adjusting signal 3.

8. 发明专利

JPH01137162A VERY LOW TEMPERATURE REFRIGERANT RECOVERING DEVICE 失效
公开(公告)号：JPH01137162A
公开(公告)日：1989-05-30
申请号：JP29408387
申请日：1987-11-24
申请人： JAPAN ATOMIC ENERGY RES INST , HITACHI LTD
发明人： SHIBANUMA KIYOSHI , SHIBATA TAKEYORI , MATSUMOTO KOZO , HAYASHI KENJI , KAJIWARA HIROTAKE
IPC分类号： F25B9/02 , F25B9/00 , F25D3/10 , F25D13/00
摘要： PURPOSE:To optimize control of switching of return refrigerant gas, by a method wherein a steady valve is located in a line running from a substance to be cooled through a very low temperature regrigerant carrier piping to a freezer, a precooling valve in a line running from the substance to be cooled to a compressor, the steady valve and the precooling valve are switched and controlled according to the temperature of return refrigerant gas and a valve opening control speed is increased and controlled during control of opening of the steady valve. CONSTITUTION:A control device 11 controls a precooling valve 7 and a steady valve 6 according to the value of an outlet thermometer 10. Namely, when the value of the outlet thermometer 10 exceeds a set value, the steady valve 6 is closed and the precooling valve 7 is fully opened. At a time (a) when the value of the outlet thermometer 10 reduced to a value lower than the set value, the steady valve 6 is opened at a comparatively slow control speed (between (a) and (b)). After a time (b) when the opening of the steady valve 6 is increased to a specified value, a control speed is increased to a relatively high value to open the steady valve 6 (between (b) and (c)). After a time (c) when the opening of the steady valve 6 is increased to a maximum, after the precool valve 7 and the steady valve 6 are held in a fully opened state for a specified time (between (c) and (d)), the precooling valve 7 is rapidly brought into a full opening state, and switching control is completed (at a time (e)).

9. 发明专利

JPS60108573A FEEDING OF FREEZING MIXTURE IN CRYOPUMP 失效
公开(公告)号：JPS60108573A
公开(公告)日：1985-06-14
申请号：JP21484683
申请日：1983-11-15
申请人： JAPAN ATOMIC ENERGY RES INST , HITACHI LTD
发明人： SHIBATA TAKEYORI , SHIBANUMA KIYOSHI , ONO YOUICHI
IPC分类号： G21B1/05 , F04B37/08 , G21B1/00
摘要： PURPOSE:To reduce the number of necessary valves into two by connecting the adcending part of a horizontal pipe to a cryoexhaust part, thus elimimating the necessity of a valve in a pipe for stationary circulation. CONSTITUTION:When a freezing mixture which flows in a precooling pipe 9 is formed of two phases of gas and liquid, and an ascending pipe through which the freezing mixture flows upward after flowing horizontally in the lower part of a cryoexhaust part 1 is arranged in parallel, the freezing mixture flows more in the ascending pipe through which the flow due to the buoyancy due to the gaseous phase in two phases of gas and liquid first flows. Since the ascending pipe with which the precooling pipe 9 meets first after being set horizontally is connected to the cryoexhaust part 1, the cryoexhaust part 1 can be precooled efficiently even if it has a large heat capacity. The freezing mixture in two phases of gas and liquid flows into a gas/liquid separator 2, passing through a freezing-mixture feeding part 3 and a conventional feeding valve 6, and the liquid phase portion is left in the gas/liquid separator 2, and the gaseous phase is discharged.

10. 发明专利

JPH01159567A CRYOGENIC LIQUEFYING REFRIGERATOR 失效
公开(公告)号：JPH01159567A
公开(公告)日：1989-06-22
申请号：JP31628487
申请日：1987-12-16
申请人： JAPAN ATOMIC ENERGY RES INST , HITACHI LTD
发明人： SHIBANUMA KIYOSHI , SHIBATA TAKEYORI , KAJIWARA HIROTAKE , MATSUMOTO KOZO
IPC分类号： F25B9/02
摘要： PURPOSE: To facilitate operation by providing a bypass line for returning the gas from an object to be cooled back to the suction side of a reducing pump during operation thereof while bypassing a heat exchanger at the time of preheating. CONSTITUTION: Valves 47a, 47b are opened while a valve 71 is closed upon starting a reducing pump 20. Return gas from an object 50 flowing through an object 50 to be cooled is thereby fed through a reducing line 34 and a bypass line 70 to a first heat exchanger 41a where the temperature is recovered before the gas is returned back to the suction side of the pump 20 through the line 34. When the temperature of the object 50 is lowered down to a steady temperature, e.g. 4.5 K, precooling operation is finished and a transition is made to steady operation. Since the effect of temperature rise of heat exchangers 41a-41e due to the gas being returned from the object 50 back to the pump 20 during operation thereof can be suppressed at the time of preheating the object 50, trial and error operation of the pump 20 can be eliminated at the time of precooling.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式