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    • 3. 发明授权
    • Electron beam irradiating apparatus
    • 电子束照射装置
    • US07518131B2
    • 2009-04-14
    • US11385483
    • 2006-03-21
    • Tsutomu NanatakiIwao OhwadaYuki BesshoTakayoshi Akao
    • Tsutomu NanatakiIwao OhwadaYuki BesshoTakayoshi Akao
    • A61N5/00
    • G21K5/04H01J37/317H01L21/67005
    • An electron beam irradiating apparatus includes a chamber being kept under vacuum, and housing a planar electron emitting element and a positioning unit and an object to be irradiated is directly irradiated with an electron beam emitted from the element. The planar electron emitting element includes: an emitter portion composed of a dielectric material; and a first electrode and a second electrode applied with a driving voltage for emitting electrons, and the first electrode is formed on a first surface of the emitter portion and has a plurality of through-holes where the emitter portion is exposed, a surface of the first electrode facing to the emitter portion around the through-holes is separated from the emitter portion, and the electron beam is emitted from the first surface of the emitter portion through the through-holes.
    • 电子束照射装置包括保持在真空下的室,并容纳平面电子发射元件和定位单元,并且被照射物体直接用从元件发射的电子束照射。 平面电子发射元件包括:由电介质材料构成的发射极部分; 以及施加有用于发射电子的驱动电压的第一电极和第二电极,并且所述第一电极形成在所述发射极部分的第一表面上,并且具有多个通过所述发射极部分露出的通孔, 面向通孔周围的发射极部分的第一电极与发射极部分分离,并且电子束通过通孔从发射器部分的第一表面发射。
    • 5. 发明授权
    • Electron-emitting apparatus
    • 电子发射装置
    • US07304440B2
    • 2007-12-04
    • US11236422
    • 2005-09-27
    • Iwao OhwadaTakayoshi AkaoTetsuyuki KamejiHirokazu Nakamura
    • Iwao OhwadaTakayoshi AkaoTetsuyuki KamejiHirokazu Nakamura
    • G05F1/00
    • H01J1/30B82Y10/00G09G3/22G09G2320/0238H01J1/312H01J1/32H01J31/127H01L2924/0002H01L2924/00
    • An electron emitting apparatus includes a lower electrode, an emitter section made of a dielectric material, a plurality of upper electrodes having micro through holes, and a collector electrode opposing the upper electrodes. In this electron-emitting apparatus, electrons are accumulated in the emitter section by controlling the potential difference (drive voltage) between the lower and upper electrodes with respect to the potential of the lower electrode to a negative predetermined voltage. At this time, the collector electrode of the electron-emitting apparatus is grounded. Thus, unnecessary electron-emitting is suppressed. Subsequently, the drive voltage is changed to a positive predetermined voltage. As a result, polarization reversal occurs in the emitter section, and accumulated electros are emitted through the micro through holes in the upper electrodes by Coulomb repulsion. At this time, a positive voltage Vc is applied to the collector electrode to give large energy to accelerate the electrons.
    • 电子发射装置包括下电极,由介电材料制成的发射极部分,具有微通孔的多个上电极和与上电极相对的集电极。 在该电子发射装置中,通过将下电极和上电极之间的电位差(驱动电压)相对于下电极的电位控制为负的预定电压,将电子累积在发射极部分。 此时,电子发射设备的集电极接地。 因此,抑制不必要的电子发射。 随后,驱动电压变为正的预定电压。 结果,在发射极部分发生极化反转,并且通过库仑斥力通过上电极中的微通孔发射积聚的电子。 此时,向集电极施加正电压Vc以产生大的能量来加速电子。
    • 8. 发明申请
    • Electron-emitting apparatus
    • 电子发射装置
    • US20060082318A1
    • 2006-04-20
    • US11236423
    • 2005-09-27
    • Iwao OhwadaTakayoshi AkaoTetsuyuki KamejiHirokazu Nakamura
    • Iwao OhwadaTakayoshi AkaoTetsuyuki KamejiHirokazu Nakamura
    • H05B37/00
    • G09G3/22B82Y10/00G09G2310/0275G09G2310/06G09G2320/043G09G2330/025H01J1/312H05B41/2806Y02B20/22
    • An electron-emitting element has an electron emission unit including a lower electrode, an emitter section composed of a dielectric material, and an upper electrode having a plurality of micro through holes; and a power supply for applying a power supply voltage to the electron emission unit. During the period between the point at which emission of electrons accumulated in the emitter section is started and the point at which the electron emission is completed, the power supply generates a first power supply voltage, whose absolute value changes with forming a sinusoidal wave so that the potential of the upper electrode is higher than the potential of the lower electrode. During the period between the point at which the electron accumulation in the emitter section is started and the point at which the electron accumulation is completed, the power supply generates a second power supply voltage whose absolute value increases with forming a sinusoidal wave so that the potential of the lower electrode is higher than the potential of the upper electrode.
    • 电子发射元件具有电子发射单元,其包括下电极,由电介质材料构成的发射极部分和具有多个微通孔的上电极; 以及用于向电子发射单元施加电源电压的电源。 在开始发射部分的电子发射点与电子发射完成点之间的时间段期间,电源产生第一电源电压,其绝对值随着形成正弦波而改变,使得 上电极的电位高于下电极的电位。 在开始发射部分的电子积分点和电子积累完成点之间的时间段期间,电源产生绝对值随形成正弦波而增加的第二电源电压,使得电位 下电极的电位高于上电极的电位。