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    • 1. 发明授权
    • Deposition mask and method of preparing the same
    • 沉积掩模及其制备方法
    • US06861358B2
    • 2005-03-01
    • US09953926
    • 2001-09-18
    • Isao HasegawaYoshio MiyaiNaoya Sotani
    • Isao HasegawaYoshio MiyaiNaoya Sotani
    • H05B33/10C23C14/04C23C14/24H01L51/50H01L41/04
    • C23C14/042
    • A deposition mask capable of relaxing nonuniformity of the thickness of a deposit formed on a substrate and reducing the width of a non-opening part of a mask layer by reducing the thickness of the mask layer is obtained. This deposition mask comprises a mask layer formed by a single silicon thin film and a mask pattern, formed on the mask layer, including a mask opening having an opening width increased toward a deposition source. The mask layer formed by a silicon thin film can be reduced in thickness due to small deflection caused by its own weight. Thus, the width of the non-opening part of the mask layer can be reduced, whereby the width of a part formed with no deposit can be reduced. The mask opening having the opening width increased toward the deposition source reduces the probability of deposit particles, obliquely scattered from the deposition source, hitting an end of the mask opening, whereby the deposit is prevented from being reduced in thickness on an end corresponding to the end of the mask opening as well as from nonuniformity of the thickness.
    • 获得能够减轻形成在基板上的沉积物的厚度不均匀性并通过减小掩模层的厚度来减小掩模层的非开口部分的宽度的沉积掩模。 该沉积掩模包括形成在掩模层上的由单个硅薄膜和掩模图案形成的掩模层,包括具有朝向沉积源增加的开口宽度的掩模开口。 由硅薄膜形成的掩模层由于其自重引起的挠曲小而可以减小厚度。 因此,可以减小掩模层的非开口部分的宽度,从而可以减少不形成沉积物的部分的宽度。 具有朝向沉积源增加的开口宽度的掩模开口减少了沉积颗粒从沉积源倾斜散射的可能性,击中掩模开口的一端,从而防止沉积物在对应于掩模开口的端部上减小厚度 面罩开口的末端以及厚度的不均匀性。
    • 7. 发明授权
    • Cam driven mode selection mechanism for tape recorder
    • 磁带录像机的凸轮驱动模式选择机构
    • US4674001A
    • 1987-06-16
    • US594092
    • 1984-03-28
    • Akira TakahashiIsao Hasegawa
    • Akira TakahashiIsao Hasegawa
    • G11B15/10G11B15/44G11B5/54G11B15/02
    • G11B15/442
    • The mode selection mechanism in a magnetic tape recording and reproducing apparatus is adapted to move a mode plate and a forward/reverse changeover plate to given positions in response to a mode selecting manual operation and to thereafter move a power plate by a predetermined stroke in a direction prependicular to the movements of the mode plate and of the changeover plate, thereby creating any desired tape feeding mode. The mode plate and the changeover plate are independently moved by rotations of a mode cam which is intermittently moved by a tape drive motor through a power transmission means. The power plate is moved by rotation of a power cam which is moved by the same motor and may be interrupted by a power transmission means after the power cam makes a predetermined angular rotation.
    • 磁带记录和再现装置中的模式选择机构适于响应于模式选择手动操作将模板和正/反转换板移动到给定位置,并且此后将动力板以预定行程移动到 方向垂直于模板和转换板的运动,从而产生任何期望的带馈送模式。 模式板和转换板通过由带驱动电动机通过动力传递装置间歇地移动的模式凸轮的旋转而独立地移动。 功率板通过由相同的电动机移动的动力凸轮的旋转而移动,并且在动力凸轮进行预定的角度旋转之后可以被动力传递装置中断。