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    • 1. 发明公开
    • Hydraulic manifold for water cooling of multi-chip electric modules
    • Hydraulischer ZusammenbaufürdieWasserkühlungvon elektrischen Mehrchip-Modulen。
    • EP0243793A2
    • 1987-11-04
    • EP87105555.4
    • 1987-04-14
    • International Business Machines Corporation
    • Flint, Ephraim BemisGrebe, Kurt Rudolph
    • H01L23/473
    • H01L23/4332H01L2924/0002H01L2924/00
    • A manifold (30) for conducting coolant to a set of heat exchangers (26) mounted on individual electric circuit chips (22) of a circuit module (20) is formed of a solid body containing fluid passages terminating in apertures, the manifold being provided with a set of hollow flexible appendages (44) connected to the apertures for conducting coolant to ports of the heat exchangers. The body (40) is formed of two sections, one section (54) having channels machined therein to serve as the fluid passages, and a second (56) section having the apertures. The second section also is bounded by sidewalls which define a cavity (60). The appendages are formed by a lost wax molding operation wherein the wax is stored in the cavity, and milled to form a mold for the appendages. A plastic material is deposited on the wax mold and on the second section of the body to form the set of appendages, the plastic material being of a type which can be deposited by the process of chemical vapor deposition, thereby to provide a conformal deposition which imparts a water-tight characteristic to the manifold.
    • 用于将冷却剂引导到安装在电路模块(20)的各个电路芯片(22)上的一组热交换器(26)的歧管(30)由固体体形成,该固体包含终止于孔中的流体通道,所述歧管设置 具有连接到孔的一组中空柔性附件(44),用于将冷却剂引导到热交换器的端口。 主体(40)由两部分形成,一个部分(54)具有加工在其中的通道用作流体通道,以及具有孔的第二部分(56)。 第二部分也由限定空腔(60)的侧壁界定。 附件是通过失蜡模制操作形成的,其中将蜡储存在空腔中,并研磨以形成用于附件的模具。 将塑料材料沉积在蜡模上和主体的第二部分上以形成一组附件,该塑料材料是可以通过化学气相沉积工艺沉积的类型,从而提供一种共形沉积 对歧管施加防水特性。