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1. 发明申请

US20120279837A1 METHOD FOR REDUCING SUBSTRATE CHARGING 有权
标题翻译：减少基板充电的方法
公开(公告)号：US20120279837A1
公开(公告)日：2012-11-08
申请号：US12415937
申请日：2009-03-31
申请人： Ingrid De Wolf , Xavier Rottenberg , Piotr Czarnecki , Philippe Soussan
发明人： Ingrid De Wolf , Xavier Rottenberg , Piotr Czarnecki , Philippe Soussan
IPC分类号： H01H57/00 , H01H49/00
CPC分类号： B81B3/0008 , B81B2201/016 , H01G5/16 , H01H59/0009 , H01H2059/0018
摘要： An electrostatically actuatable micro electromechanical device is provided with enhanced reliability and lifetime. The electrostatically actuatable micro electromechanical device comprises: a substrate, a first conductor fixed to the top layer of the substrate, forming a fixed electrode, a second conductor fixed to the top layer of the substrate, and a substrate area. The second conductor is electrically isolated from the first conductor and comprises a moveable portion, suspended at a predetermined distance above the first conductor, the moveable portion forming a moveable electrode which approaches the fixed electrode upon applying an actuation voltage between the first and second conductors. The selected substrate surface area is defined as the orthogonal projection of the moveable portion on the substrate between the first and second conductors. In the substrate surface area at least one recess is provided in at least the top layer of the substrate.
摘要翻译：提供了一种可静电驱动的微机电装置，具有更高的可靠性和寿命。静电致动微机电装置包括：基板，固定到基板的顶层的第一导体，形成固定电极，固定到基板的顶层的第二导体和基板区域。所述第二导体与所述第一导体电隔离并且包括悬挂在所述第一导体上方预定距离处的可移动部分，所述可移动部分形成在所述第一和第二导体之间施加致动电压时接近所述固定电极的可移动电极。所选择的基板表面积被定义为在第一和第二导体之间的基板上的可移动部分的正交投影。在基板表面区域中，至少一个凹部设置在基板的至少顶层中。

2. 发明授权

US08294976B1 Method for reducing substrate charging 有权
标题翻译：减少基板充电的方法
公开(公告)号：US08294976B1
公开(公告)日：2012-10-23
申请号：US12415937
申请日：2009-03-31
申请人： Ingrid De Wolf , Xavier Rottenberg , Piotr Czarnecki , Philippe Soussan
发明人： Ingrid De Wolf , Xavier Rottenberg , Piotr Czarnecki , Philippe Soussan
IPC分类号： G02B26/00
CPC分类号： B81B3/0008 , B81B2201/016 , H01G5/16 , H01H59/0009 , H01H2059/0018
摘要： An electrostatically actuatable micro electromechanical device is provided with enhanced reliability and lifetime. The electrostatically actuatable micro electromechanical device comprises: a substrate, a first conductor fixed to the top layer of the substrate, forming a fixed electrode, a second conductor fixed to the top layer of the substrate, and a substrate area. The second conductor is electrically isolated from the first conductor and comprises a moveable portion, suspended at a predetermined distance above the first conductor, the moveable portion forming a moveable electrode which approaches the fixed electrode upon applying an actuation voltage between the first and second conductors. The selected substrate surface area is defined as the orthogonal projection of the moveable portion on the substrate between the first and second conductors. In the substrate surface area at least one recess is provided in at least the top layer of the substrate.
摘要翻译：提供了一种可静电驱动的微机电装置，具有更高的可靠性和寿命。静电致动微机电装置包括：基板，固定到基板的顶层的第一导体，形成固定电极，固定到基板的顶层的第二导体和基板区域。所述第二导体与所述第一导体电隔离并且包括悬挂在所述第一导体上方预定距离处的可移动部分，所述可移动部分形成在所述第一和第二导体之间施加致动电压时接近所述固定电极的可移动电极。所选择的基板表面积被定义为在第一和第二导体之间的基板上的可移动部分的正交投影。在基板表面区域中，至少一个凹部设置在基板的至少顶层中。

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