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1. 发明公开

EP1384253A1 MEASUREMENT ARRANGEMENT 审中-公开
标题翻译：测量安排
公开(公告)号：EP1384253A1
公开(公告)日：2004-01-28
申请号：EP01989620.8
申请日：2001-12-27
申请人： Infineon Technologies AG , NanoPhotonics AG
发明人： ABRAHAM, Michael , MARX, Eckhard
IPC分类号： H01L21/00
CPC分类号： H01L21/67253 , H01L21/67772
摘要： A measurement device (1), i.e. a metrology tool, and a vehicle (2) are combined to provide a mobile metrology in a fabrication facility. Peripheral equipment such as a device transfer unit (3), for, e.g., FOUPs in semiconductor manufacturing, an electronic control system (5) with, e.g., a PC, monitor and keyboard and optionally a vacuum pump (9) is also provided in module frames of the vehicle (2). The measurement arrangement particularly reduces bottleneck situations in equipment qualifying of processing tools (40) during fast ramp-up phases of, e.g., semiconductor manufacturing facilities, thereby saving costs. The construction is based on PGVs or AGVs and allows a fast operation directly at the location of a processing tool (40). With the possible exception of power supply or operator control, the measurement arrangement can operate fully autonomous.
摘要翻译：测量装置（1）即计量工具和车辆（2）组合在一起以在制造设施中提供移动计量。还提供了用于例如半导体制造中的FOUP的装置传送单元（3），具有例如PC，监视器和键盘以及可选的真空泵（9）的电子控制系统（5）的外围设备（2）的模块框架。该测量装置特别地减少了在例如半导体制造设施的快速上升阶段期间处理工具（40）的设备合格性中的瓶颈情况，由此节约了成本。该结构基于PGV或AGV，并且允许在加工工具（40）的位置处直接快速操作。除电源或操作员控制可能的情况外，测量装置可以完全自主操作。

2. 发明申请

WO2006072422A1 GREIFER ZUM HALTEN POSITIONIEREN EINES SCHEIBEN-ODER PLATTENFÖRMIGEN OBJEKTS UND VERFAHREN ZUM HALTEN UND POSITIONIEREN EINES SCHEIBEN-ODER PLATTENFÖRMIGEN OBJEKTS 审中-公开
标题翻译：抢HOLDING定位磁盘或磁盘状物体AND METHOD FOR HOLDING和定位磁盘或磁盘状物体
公开(公告)号：WO2006072422A1
公开(公告)日：2006-07-13
申请号：PCT/EP2005/014013
申请日：2005-12-23
申请人： NANOPHOTONICS AG , SIEBERT, Sönke , LANG, Andreas , BINDER, Alfred , ABRAHAM, Michael
发明人： SIEBERT, Sönke , LANG, Andreas , BINDER, Alfred , ABRAHAM, Michael
IPC分类号： H01L21/683 , B65G47/91 , H01L21/68
CPC分类号： H01L21/6838 , H01L21/68
摘要： Es wird ein Greifer (20) zum berührungsfreien Halten und präzisen Positionieren eines scheiben- oder plattenförmigen Objekts (31, 32) vorgeschlagen, der eine Haltevorrichtung (21) zur Erzeugung einer im Wesentlichen senkrecht zur Haupterstreckungsebene des Objekts (31, 32) wirkenden Haltekraft aufweist, wobei der Greifer (20) von der Haltevorrichtung (21) getrennte Positionierungsdüsen (22) aufweist, die zur Erzeugung einer im Wesentlichen parallel zur Haupterstreckungsebene des Objekts (31, 32) wirkenden Positionierungskraft mittels eines aus den Positionierungsdüsen (22) austretenden Fluids vorgesehen sind.
摘要翻译：它是用于非接触保持和一个圆盘或板状物体的精确定位（31，32），提出了一种夹持器（20），具有保持力，保持装置（21），用于产生一个基本垂直于所述物体的主延伸平面（31，32）作用其中，所述保持装置的夹具（20）（21）单独的定位的喷嘴（22），作用以产生一个基本上平行于通过定位喷嘴中的一个出现的对象（31，32）的主延伸平面上的定位力被提供（22）流体，

3. 发明公开

EP1273031A1 MODULAR SUBSTRATE MEASUREMENT SYSTEM 有权
标题翻译：模块化测量系统用于衬底
公开(公告)号：EP1273031A1
公开(公告)日：2003-01-08
申请号：EP01923985.4
申请日：2001-04-12
申请人： NanoPhotonics AG , RECIF SA
发明人： ABRAHAM, Michael , RAAIJMAKERS, Ivo, J., M., M. , GAUDON, Alain , ASTEGNO, Pierre
IPC分类号： H01L21/00
CPC分类号： H01L21/67178 , H01L21/67167 , H01L21/67173 , H01L21/67259 , H01L21/681 , Y10T29/49004 , Y10T29/53187
摘要： Substrate measurement system including a measurement chamber (30), and a substrate handling chamber (7) possessing substrate transfer means (10) and a substrate container interface (1) arranged to receive a substrate container (8), the handling chamber (7) containing a first interface (50) to connect the measurement chamber (30), the measurement chamber (30) containing a second interface (51) to connect to the handling chamber (7), and the transfer means (10) being arranged to transfer substrates between the container (8) and the measurement chamber (30) through the handling chamber (7), in which system a second measurement chamber (39) is provided, having the same second interface (51) as the first measurement chamber (30) to replace the latter chamber (30).

4. 发明授权

EP1273031B1 MODULAR SUBSTRATE MEASUREMENT SYSTEM 有权
标题翻译：模块化测量系统用于衬底
公开(公告)号：EP1273031B1
公开(公告)日：2005-08-10
申请号：EP01923985.4
申请日：2001-04-12
申请人： NanoPhotonics AG , RECIF SA
发明人： ABRAHAM, Michael , RAAIJMAKERS, Ivo, J., M., M. , GAUDON, Alain , ASTEGNO, Pierre
IPC分类号： H01L21/00
CPC分类号： H01L21/67178 , H01L21/67167 , H01L21/67173 , H01L21/67259 , H01L21/681 , Y10T29/49004 , Y10T29/53187
摘要： Substrate measurement system including a measurement chamber (30), and a substrate handling chamber (7) possessing substrate transfer means (10) and a substrate container interface (1) arranged to receive a substrate container (8), the handling chamber (7) containing a first interface (50) to connect the measurement chamber (30), the measurement chamber (30) containing a second interface (51) to connect to the handling chamber (7), and the transfer means (10) being arranged to transfer substrates between the container (8) and the measurement chamber (30) through the handling chamber (7), in which system a second measurement chamber (39) is provided, having the same second interface (51) as the first measurement chamber (30) to replace the latter chamber (30).

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