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    • 3. 发明专利
    • Method of manufacturing wiring circuit board
    • 制造电路板的方法
    • JP2008243957A
    • 2008-10-09
    • JP2007079623
    • 2007-03-26
    • Nitto Denko Corp日東電工株式会社
    • MIZUTANI MASANORIFUJII HIROFUMI
    • H05K3/28G03F7/004G03F7/20
    • G03F7/2004G03F7/027G03F7/038H05K3/0023H05K3/0082H05K3/28
    • PROBLEM TO BE SOLVED: To provide a method of manufacturing a wiring circuit board for suppressing deposition of additive from a solder resist layer, especially deposition of additive under high temperature/high humidity atmosphere, and for improving curability of the solder resist layer. SOLUTION: A prescribed conductor circuit 2 pattern is formed on a base 1. A photosensitive resin composition layer is formed on a conductor circuit 2 pattern forming face by using a photosensitive resin composition. A photosensitive resin composition layer face is irradiated with an active beam through a photomask of a prescribed pattern so as to expose it. The solder resist layer 3a of the prescribed pattern is formed by using developer. The formed solder resist layer 3a is irradiated with ultraviolet rays by using a low pressure mercury lamp. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种制造布线电路板的方法,用于抑制添加剂从阻焊层沉积,特别是在高温/高湿度气氛下沉积添加剂,并提高阻焊层的固化性 。 解决方案:在基座1上形成规定的导体电路2图案。通过使用感光性树脂组合物,在导体电路2图案形成面上形成感光性树脂组合物层。 通过具有规定图案的光掩模,用活性光束照射感光性树脂组合物层面,使其曝光。 通过使用显影剂形成规定图案的阻焊层3a。 通过使用低压汞灯照射形成的阻焊层3a的紫外线。 版权所有(C)2009,JPO&INPIT
    • 4. 发明专利
    • Reusing method of cleaning member for substrate processing device
    • 衬底加工装置清洗构件的再利用方法
    • JP2007027450A
    • 2007-02-01
    • JP2005208033
    • 2005-07-19
    • Nitto Denko Corp日東電工株式会社
    • NAMIKAWA AKIRATERADA YOSHIOFUJII HIROFUMIISHIZAKA HITOSHI
    • H01L21/304C09J7/02C09J11/00C09J201/00
    • PROBLEM TO BE SOLVED: To enable a substrate processing device cleaning member to be reused by removing a cleaning layer to which foreign objects are attached from a substrate using an adhesive tape, when the substrate processing device cleaning member is reused by replacing a cleaning layer to which foreign objects are attached with a new cleaning layer.
      SOLUTION: A reusing method of the substrate processing device cleaning member comprises processes of pasting the adhesive tape on the cleaning layer, fixing the cleaning layer on the adhesive tape, and then removing off the adhesive tape and the cleaning layer together from the substrate is reused when the substrate processing device cleaning member equipped with the cleaning layer on a substrate. Especially, a material capable of permeating into the cleaning layer or a material capable of improving an affinity for the cleaning layer, is contained in the adhesive agent of the adhesive tape, so as to work as a means of fixing the cleaning layer firmly on the adhesive tape in the reusing method of the substrate processing device cleaning member.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了使基板处理装置清洁部件能够通过使用胶带从基板上去除附着有异物的清洁层而重新使用,当基板处理装置清洁部件通过更换 外部物体附着有新的清洁层的清洁层。 解决方案:基板处理装置清洁部件的再利用方法包括将粘合带粘贴在清洁层上,将清洁层固定在粘合带上,然后将粘合带和清洁层从 当在衬底上配备有清洁层的衬底处理装置清洁构件时,衬底被重新使用。 特别地,粘合剂粘合剂中含有能够渗透到清洁层中的材料或能够改善对清洁层的亲和性的材料,以便将清洁层牢固地固定在粘合剂上 在基板处理装置清洁部件的再利用方法中的胶带。 版权所有(C)2007,JPO&INPIT
    • 9. 发明专利
    • Method for manufacturing resin transfer material
    • 制造树脂转移材料的方法
    • JP2005301072A
    • 2005-10-27
    • JP2004119426
    • 2004-04-14
    • Nitto Denko Corp日東電工株式会社
    • YAMAGUCHI YOSHIOMIZUTANI MASANORIFUJII HIROFUMI
    • G03F7/004
    • PROBLEM TO BE SOLVED: To provide a resin transfer material, free of remaining of a resin layer in unwanted portions and capable of attaining reliable pattern formation, when being patterned after transfer, and capable of improving reliability. SOLUTION: A resin layer 2, comprising a photosensitive polyamic acid resin, is formed on a first release material 1, and the resin layer 2 formed on the first release material 1 is stuck on a second release material 4 and peeled from the first release material 1 to form the objective resin transfer material 5 with the resin layer 2 formed on the second release material 4. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种树脂转移材料,其在不期望的部分中不残留树脂层,并且能够在转印后进行图案化,并且能够获得可靠的图案形成,并且能够提高可靠性。 解决方案:在第一剥离材料1上形成包含光敏聚酰胺酸树脂的树脂层2,将形成在第一剥离材料1上的树脂层2粘贴在第二剥离材料4上并从 第一释放材料1以形成目标树脂转移材料5,树脂层2形成在第二剥离材料4上。版权所有:(C)2006,JPO&NCIPI