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    • 1. 发明申请
    • PHASE CHANGE DEVICE
    • WO2021254241A1
    • 2021-12-23
    • PCT/CN2021/099344
    • 2021-06-10
    • INTERNATIONAL BUSINESS MACHINES CORPORATIONIBM (CHINA) CO., LIMITED
    • LI, NingSADANA, Devendra, K.
    • H01L45/00G11C11/5678G11C13/0004G11C13/0069G11C13/0097G11C2013/0092G11C2213/50H01L45/06H01L45/1233H01L45/128H01L45/14H01L45/1608
    • A phase change device (PCD) has a first and second semiconductor layer. The first semiconductor layer made of a first semiconductor material and has a first semiconductor thickness, a first interface surface, and a first electrode surface. The first interface surface and first electrode surface are on opposite sides of the first semiconductor layer. The first semiconductor material can transition between a first amorphous state and a first crystalline state at one or more first conditions. The second semiconductor layer is made of a second semiconductor material and has a second semiconductor thickness, a second interface surface, and a second electrode surface. The second interface surface and second electrode surface are on opposite sides of the second semiconductor layer. The first interface surface and the second interface surface are in electrical, physical, and chemical contact with one another at an interface. The second semiconductor material can transition between a second amorphous state and a second crystalline state at one or more second conditions. A first electrode in physical and electrical contact with the first electrode surface of the first semiconductor layer and a second electrode in physical and electrical contact with the second electrode surface of the second semiconductor layer. The first conditions and second conditions are different. Therefore, the first and second semiconductor materials can be in different amorphous and/or crystalline states. The layers can have split amorphous/crystalline states. By controlling how the layers are split, the PCD can be in different resistive states.
    • 4. 发明申请
    • METHOD OF FORMING STRAINED SILICON MATERIALS WITH IMPROVED THERMAL CONDUCTIVITY
    • 形成具有改善的导热性的应变硅材料的方法
    • WO2006017640A1
    • 2006-02-16
    • PCT/US2005/027691
    • 2005-08-04
    • INTERNATIONAL BUSINESS MACHINES CORPORATIONBEDELL, Stephen, W.CHEN, HuajieFOGEL, KeithMITCHELL, Ryan, M.SADANA, Devendra, K.
    • BEDELL, Stephen, W.CHEN, HuajieFOGEL, KeithMITCHELL, Ryan, M.SADANA, Devendra, K.
    • H01L21/36
    • H01L29/1054H01L21/02381H01L21/0245H01L21/02507H01L21/02532
    • A method is disclosed for forming a strained Si layer on SiGe, where the SiGe layer has improved thermal conductivity. A first layer (41) of Si or Ge is deposited on a substrate (10) in a first depositing step; a second layer (42) of the other element is deposited on the first layer in a second depositing step; and the first and second depositing steps are repeated so as to form a combined SiGe layer (50) having a plurality of Si layers and a plurality of Ge layers (41-44). The respective thicknesses of the Si layers and Ge layers are in accordance with a desired composition ratio of the combined SiGe layer. The combined SiGe layer (50) is characterized as a digital alloy of Si and Ge having a thermal conductivity greater than that of a random alloy of Si and Ge. This method may further include the step of depositing a Si layer (61) on the combined SiGe layer (50); the combined SiGe layer is characterized as a relaxed SiGe layer, and the Si layer (61) is a strained Si layer. For still greater thermal conductivity in the SiGe layer, the first layer and second layer may be deposited so that each layer consists essentially of a single isotope.
    • 公开了一种在SiGe上形成应变Si层的方法,其中SiGe层具有改善的导热性。 在第一沉积步骤中,在衬底(10)上沉积Si或Ge的第一层(41) 另一元件的第二层(42)在第二沉积步骤中沉积在第一层上; 并且重复第一和第二沉积步骤以形成具有多个Si层和多个Ge层(41-44)的组合SiGe层(50)。 Si层和Ge层的各自的厚度根据组合的SiGe层的期望组成比。 组合的SiGe层(50)的特征在于具有大于Si和Ge的随机合金的热导率的Si和Ge的数字合金。 该方法还可以包括在组合SiGe层(50)上沉积Si层(61)的步骤。 组合的SiGe层被表征为弛豫的SiGe层,并且Si层(61)是应变Si层。 对于SiGe层中的更高的热导率,可以沉积第一层和第二层,使得每层基本上由单一同位素组成。