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    • 1. 发明申请
    • METAL-INSULATOR-METAL CAPACITOR FORMATION TECHNIQUES
    • 金属绝缘体 - 金属电容器形成技术
    • WO2014116496A1
    • 2014-07-31
    • PCT/US2014/011856
    • 2014-01-16
    • INTEL CORPORATIONKOBRINSKY, Mauro J.BRISTOL, Robert L.MAYBERRY, Michael C.
    • KOBRINSKY, Mauro J.BRISTOL, Robert L.MAYBERRY, Michael C.
    • H01L21/8242H01L27/108
    • H01L28/60H01L21/0337H01L27/224H01L28/82
    • Techniques and structure are disclosed for providing a MIM capacitor having a generally corrugated profile. The corrugated topography is provisioned using sacrificial, self-organizing materials that effectively create a pattern in response to treatment (heat or other suitable stimulus), which is transferred to a dielectric material in which the MIM capacitor is formed. The self-organizing material may be, for example, a layer of directed self-assembly material that segregates into two alternating phases in response to heat or other stimulus, wherein one of the phases then can be selectively etched with respect to the other phase to provide the desired pattern. In another example case, the self-organizing material is a layer of material that coalesces into isolated islands when heated. As will be appreciated in light of this disclosure, the disclosed techniques can be used, for example, to increase capacitance per unit area, which can be scaled by etching deeper capacitor trenches/holes.
    • 公开了用于提供具有大体波形轮廓的MIM电容器的技术和结构。 使用牺牲性自组织材料提供波纹形状,其有效地产生响应于被形成MIM电容器的介电材料的处理(热或其它合适的刺激)的图案。 自组织材料可以是例如响应于热或其它刺激而分离成两个交替相的定向自组装材料层,其中相中的一个相可以相对于另一相被选择性地蚀刻到 提供所需的图案。 在另一个例子中,自组织材料是在加热时聚结成孤岛的材料层。 根据本公开将会理解,所公开的技术可以用于例如增加每单位面积的电容,其可以通过蚀刻更深的电容器沟槽/孔来缩放。
    • 5. 发明申请
    • OPTICAL WAVEGUIDE STRUCTURE
    • 光波导结构
    • WO2012135483A2
    • 2012-10-04
    • PCT/US2012/031187
    • 2012-03-29
    • INTEL CORPORATIONKOBRINSKY, Mauro J.BLOCK, Bruce A.CHANG, Peter L.
    • KOBRINSKY, Mauro J.BLOCK, Bruce A.CHANG, Peter L.
    • G02B6/122
    • G02F1/035G02F1/025G02F1/065G02F1/225G02F2201/18
    • Embodiments of the invention describe a multi-segment optical waveguide that enables an optical modulator to be low-power and athermal by decreasing the device length needed for a given waveguide length. Embodiments of the invention describe an optical waveguide that is folded onto itself, and thus includes at least two sections. Thus, embodiments of the invention may decrease the device size of a modulator by at least around a factor of two if the device is folded twofold (device size may be further reduced if the modulator is folded threefold, fourfold, five-fold, etc.). Embodiments of the invention further enable the electrode length required to create the desired electro-optic effect for the multi- segment optical waveguide to be reduced. In embodiments of the invention, certain electrodes may be "shared" amongst the different segments of the waveguide, thereby reducing the power requirement and capacitance of a device having a waveguide of a given length.
    • 本发明的实施例描述了一种多段光波导,其通过减小给定波导长度所需的器件长度,使光调制器能够实现低功率和无热性。 本发明的实施例描述了折叠到其自身上的光波导,因此包括至少两个部分。 因此,如果器件被折叠两倍,则本发明的实施例可以将调制器的器件尺寸减小至少约二分之一(如果调制器被折叠三倍,四倍,五倍等等,则器件尺寸可以进一步降低) )。 本发明的实施例还使得能够减少为多段光波导产生期望的电光效应所需的电极长度。 在本发明的实施例中,某些电极可以在波导的不同部分之间“共享”,由此降低具有给定长度的波导的器件的功率需求和电容。