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1. 发明申请

WO2006127256A3 MICROFABRICATED CROSS FLOW FILTER AND METHOD OF MANUFACTURE 审中-公开
标题翻译：微波交错流过滤器及其制造方法
公开(公告)号：WO2006127256A3
公开(公告)日：2009-04-16
申请号：PCT/US2006017743
申请日：2006-05-05
申请人： INNOVATIVE MICRO TECHNOLOGY , FOSTER JOHN S , HOVEY STEVEN H , MARTIN RICHARD T , RUBEL PAUL J , NGUYEN HUNG D , HARLEY JOHN C
发明人： FOSTER JOHN S , HOVEY STEVEN H , MARTIN RICHARD T , RUBEL PAUL J , NGUYEN HUNG D , HARLEY JOHN C
IPC分类号： B01D63/00
CPC分类号： B01D61/14 , B01D63/00 , B01D65/08 , B01D67/0062 , B01D69/02 , B01D2321/2058 , G01N1/4077
摘要： A microfabricated cross flow filter may have multiple filtration stages. The filtration stages may include microfabricated filter barriers and gaps created in a substrate, thereby allowing very tight tolerances in the filter barrier and gap dimensions to be maintained. Using the microfabrication techniques, the filter barriers can be made having arbitrary shapes, and arranged at an angle or curved with respect to the flow direction, making the pressure drop across the filtration stage more uniform in the cross flow direction.
摘要翻译：微制造的交叉流过滤器可以具有多个过滤阶段。过滤阶段可以包括微制造的过滤器屏障和在衬底中产生的间隙，从而允许保持过滤器屏障和间隙尺寸的非常严格的公差。使用微细加工技术，过滤器屏障可以制成具有任意形状，并且以相对于流动方向成一定角度或弯曲的方式布置，使跨越过滤台的压降在横向方向上更均匀。

2. 发明申请

WO2007019103A3 METHOD AND APPARATUS FOR SORTING PARTICLES WITH A MEMS DEVICE 审中-公开
标题翻译：用于与MEMS器件分离颗粒的方法和装置
公开(公告)号：WO2007019103A3
公开(公告)日：2007-07-05
申请号：PCT/US2006029661
申请日：2006-07-31
申请人： INNOVATIVE MICRO TECHNOLOGY , FOSTER JOHN S , HARLEY JOHN C , HOVEY STEVEN H , MARTIN RICHARD T , NGUYEN HUNG , RUBEL PAUL J
发明人： FOSTER JOHN S , HARLEY JOHN C , HOVEY STEVEN H , MARTIN RICHARD T , NGUYEN HUNG , RUBEL PAUL J
IPC分类号： G01N1/10 , A61M1/36 , B01L3/00 , C12M1/34 , C12Q1/00 , G01N15/02 , G01N21/05 , G01N21/64 , H01L21/00
CPC分类号： C12M47/04 , A61M1/36 , A61M1/3633 , A61M1/3678 , A61M2202/0437 , B01L3/5027 , G01N21/6428 , G01N2015/0288 , G01N2015/149 , Y10T436/11 , Y10T436/112499 , Y10T436/2575
摘要： A micromechanical particle sorting chip (300) uses laser light (305) directed through at least one of a reflective (360) and refractive (310) surface to come to a focus (320) in an optically transparent layer. The laser light (305) impinges on a particle of interest, causing it to fluoresce. Upon detecting the fluorescence, a micromechanical actuator (400) is activated, which directs the particle of interest into one of a plurality of possible exit paths.
摘要翻译：微机械粒子分选芯片（300）使用穿过反射（360）和折射（310）表面中的至少一个的激光（305）到达光学透明层中的聚焦（320）。激光（305）撞击感兴趣的颗粒，使其发荧光。在检测到荧光时，微机械致动器（400）被激活，其将感兴趣的颗粒引导到多个可能的出口路径中的一个。

3. 发明申请

WO2007053281A3 MEMS ACTUATOR AND METHOD OF MANUFACTURE FOR MEMS PARTICLE SORTING DEVICE 审中-公开
标题翻译： MEMS致动器及其制造方法用于MEMS颗粒分选器件
公开(公告)号：WO2007053281A3
公开(公告)日：2007-06-28
申请号：PCT/US2006040015
申请日：2006-10-12
申请人： INNOVATIVE MICRO TECHNOLOGY , FOSTER JOHN S , HARLEY JOHN C , MARTIN RICHARD T , NGUYEN HUNG , RUBEL PAUL J
发明人： FOSTER JOHN S , HARLEY JOHN C , MARTIN RICHARD T , NGUYEN HUNG , RUBEL PAUL J
IPC分类号： G01N1/10 , A61M1/36 , B01L3/00 , C12M1/34 , C12Q1/00 , G01N15/02 , G01N21/05 , G01N21/64 , H01L21/00
CPC分类号： B01L3/502707 , A61M1/3633 , A61M1/3678 , B01L3/5027 , B01L3/50273 , B01L3/502761 , B01L2200/0647 , B01L2300/0864 , B01L2400/0484 , C12M47/04 , G01N21/6428 , G01N2015/0288 , G01N2015/149 , Y10T436/11 , Y10T436/112499 , Y10T436/2575
摘要： A micromechanical particle sorting chip uses an actuator divided into two parts to direct a component of interest into one of a plurality of possible exit paths, based on detection of a fluorescent signal emanating from the component of interest. The two-part actuator may include a force-generating portion (350) and a microactuator portion (330). The microactuator portion (330) may be disposable, whereas the force-generating portion (350) may be reuseable. By bringing the force-generating portion (350) into proximity to the microactuator portion (330), the microactuator (300) is induced to move, thereby separating the component of interest from the rest of the fluid stream. The force-generating portion (350) and the microactuator portion (330) may be optimized and fabricated separately, thereby leading to faster, more reliable and less expensive particle sorting.
摘要翻译：微机械粒子分选芯片基于从感兴趣的部件发出的荧光信号的检测，使用被分成两部分的致动器将感兴趣的部件引导到多个可能的出口路径中的一个。两部分致动器可以包括力产生部分（350）和微致动器部分（330）。微致动器部分（330）可以是一次性的，而力产生部分（350）可以是可再利用的。通过使力产生部分（350）接近微致动器部分（330），微致动器（300）被诱导移动，从而将感兴趣的部件与其余的流体流分离。力产生部分（350）和微致动器部分（330）可以被分开地优化和制造，从而导致更快，更可靠和更便宜的颗粒分选。

4. 发明公开

EP1910800A4 METHOD AND APPARATUS FOR SORTING PARTICLES WITH A MEMS DEVICE 有权
标题翻译：方法和装置用于分拣粒子与微机电器件
公开(公告)号：EP1910800A4
公开(公告)日：2013-03-06
申请号：EP06800528
申请日：2006-07-31
申请人： INNOVATIVE MICRO TECHNOLOGY , FOSTER JOHN S , HARLEY JOHN C , HOVEY STEVEN H , MARTIN RICHARD T , NGUYEN HUNG D , RUBEL PAUL JOHN
发明人： FOSTER JOHN S , HARLEY JOHN C , HOVEY STEVEN H , MARTIN RICHARD T , NGUYEN HUNG , RUBEL PAUL J
IPC分类号： G01N1/10 , A61M1/36 , B01L3/00 , C12M1/34 , C12Q1/00 , G01N15/02 , G01N21/05 , G01N21/64 , H01L21/00
CPC分类号： C12M47/04 , A61M1/36 , A61M1/3633 , A61M1/3678 , A61M2202/0437 , B01L3/5027 , G01N21/6428 , G01N2015/0288 , G01N2015/149 , Y10T436/11 , Y10T436/112499 , Y10T436/2575

5. 发明公开

EP1941254A4 MEMS ACTUATOR AND METHOD OF MANUFACTURE FOR MEMS PARTICLE SORTING DEVICE 有权转让
标题翻译： MEMS执行器和一种用于生产MEMS粒子分选机
公开(公告)号：EP1941254A4
公开(公告)日：2010-09-15
申请号：EP06816837
申请日：2006-10-12
申请人： INNOVATIVE MICRO TECHNOLOGY , FOSTER JOHN S , HARLEY JOHN C , MARTIN RICHARD T , NGUYEN HUNG D , RUBEL PAUL JOHN
发明人： FOSTER JOHN S , HARLEY JOHN C , MARTIN RICHARD T , NGUYEN HUNG , RUBEL PAUL J
IPC分类号： G01N1/10 , A61M1/36 , B01L3/00 , C12M1/34 , C12Q1/00 , G01N15/02 , G01N21/05 , G01N21/64 , H01L21/00
CPC分类号： B01L3/502707 , A61M1/3633 , A61M1/3678 , B01L3/5027 , B01L3/50273 , B01L3/502761 , B01L2200/0647 , B01L2300/0864 , B01L2400/0484 , C12M47/04 , G01N21/6428 , G01N2015/0288 , G01N2015/149 , Y10T436/11 , Y10T436/112499 , Y10T436/2575

6. 发明申请

WO2008042304A2 INTERCONNECT STRUCTURE USING THROUGH WAFER VIAS AND METHOD OF FABRICATION 审中-公开
标题翻译：采用晶圆VIAS的互连结构及制造方法
公开(公告)号：WO2008042304A2
公开(公告)日：2008-04-10
申请号：PCT/US2007021014
申请日：2007-10-01
申请人： INNOVATIVE MICRO TECHNOLOGY , FOSTER JOHN S , HOVEY STEVEN H , RUBEL PAUL J , RYBNICEK KIMON
发明人： FOSTER JOHN S , HOVEY STEVEN H , RUBEL PAUL J , RYBNICEK KIMON
IPC分类号： H01L29/06 , H01L21/30
CPC分类号： B81B7/007 , B81B2201/014 , B81B2207/092
摘要： A device and a method are described which hermetically seals at least one microstructure within a cavity. Electrical access to the at least one microstructure is provided by through wafer vias formed through a via substrate which supports the at least one microstructure on its front side. The via substrate and a lid wafer may form a hermetic cavity which encloses the at least one microstructure. The through wafer vias are connected to bond pads located outside the cavity by an interconnect structure formed on the back side of the via substrate. Because they are outside the cavity, the bond pads may be placed inside the perimeter of the bond line forming the cavity, thereby greatly reducing the area occupied by the device. The through wafer vias also shorten the circuit length between the microstructure and the interconnect, thus improving heat transfer and signal loss in the device.
摘要翻译：描述了一种装置和方法，其密封腔体内的至少一个微结构。至少一个微结构的电通路由穿过通孔衬底形成的穿透晶片通孔提供，该通孔衬底在其前侧支撑至少一个微结构。通孔基板和盖晶片可以形成封闭至少一个微结构的气密空腔。贯通晶片通孔通过形成在通孔衬底的背侧上的互连结构连接到位于空腔外部的接合焊盘。因为它们在空腔外部，所以可以将键合焊盘放置在形成空腔的键合线的周边内，由此大大减小了器件占用的面积。晶圆通孔还缩短了微结构和互连之间的电路长度，从而改善了器件中的传热和信号损耗。

7. 发明申请

WO2007055862A2 COMPACT MEMS THERMAL DEVICE AND METHOD OF MANUFACTURE 审中-公开
标题翻译：紧凑型MEMS热电偶装置及其制造方法
公开(公告)号：WO2007055862A2
公开(公告)日：2007-05-18
申请号：PCT/US2006040016
申请日：2006-10-12
申请人： INNOVATIVE MICRO TECHNOLOGY , FOSTER JOHN S , RUBEL PAUL J
发明人： FOSTER JOHN S , RUBEL PAUL J
IPC分类号： H01H61/00
CPC分类号： H01H61/04 , H01H1/0036 , H01H2001/0047 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A MEMS thermal device is made in a smaller size by decreasing the distance that the two cantilevered portions, a spring cantilever and a latch cantilever, of the device must travel. The smaller distance is accomplished by positioning the two contact surfaces of the spring cantilever and the latch cantilever adjacent to each other in the quiescent state of the switch. When the switch is closed, the spring cantilever moves laterally to clear the contact surface of the latch cantilever, and then the latch cantilever moves its contact surface into position. To close the switch, the spring cantilever is allowed to relax and return to nearly its original position, except for the presence of the latch contact surface. When the spring cantilever is allowed to relax, it stays in the closed position because of friction or because of an angled shape of the contact surfaces.
摘要翻译：通过减小装置的两个悬臂部分（弹簧悬臂和闩锁悬臂）必须行进的距离来制造更小尺寸的MEMS热装置。通过在开关的静止状态下将弹簧悬臂和闩锁悬臂的两个接触表面彼此相邻地定位，实现较小的距离。当开关关闭时，弹簧悬臂横向移动以清除闩锁悬臂的接触表面，然后闩锁悬臂将其接触表面移动到位。为了闭合开关，除了存在闩锁接触面之外，弹簧悬臂可以松弛并返回到其初始位置。当弹簧悬臂被允许松弛时，由于摩擦或由于接触表面的成角度，它停留在关闭位置。

8. 发明申请

WO2008130537A3 MICROMECHANICAL DEVICE WITH GOLD ALLOY CONTACTS AND METHOD OF MANUFACTURE 审中-公开
标题翻译：具有金合金接头的微机械及其制造方法
公开(公告)号：WO2008130537A3
公开(公告)日：2009-12-30
申请号：PCT/US2008004844
申请日：2008-04-15
申请人： INNOVATIVE MICRO TECHNOLOGY , CARLSON GREGORY A , FEIERABEND PATRICK E , FOSTER JOHN S , GRUMMIT DARYL W , PARANJPYE ALOK , RUBEL PAUL J , SUMMERS JEFFERY F , THOMPSON DOUGLAS L
发明人： CARLSON GREGORY A , FEIERABEND PATRICK E , FOSTER JOHN S , GRUMMIT DARYL W , PARANJPYE ALOK , RUBEL PAUL J , SUMMERS JEFFERY F , THOMPSON DOUGLAS L
IPC分类号： F01B29/10
CPC分类号： H01H1/0036 , H01H1/023 , H01H1/04 , H01H2001/0052 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A MEMS switch device is made using a gold alloy as the switch contact material. The increased mechanical hardness of the alloy compared to the pure gold prevents the contacts of the switch from welding together. A scrubbing action which occurs when the switch closes may allow the contact surfaces to come to rest where their surfaces are complementary, thus resulting in higher contact area and low contact resistance, despite the higher sheet resistance of the gold alloy material relative to the pure gold material.
摘要翻译：使用金合金作为开关触点材料制造MEMS开关装置。与纯金相比，合金的增加的机械硬度防止开关的接触焊接在一起。当开关闭合时发生的擦洗动作可允许接触表面在其表面互补的情况下停止，因此导致更高的接触面积和低的接触电阻，尽管金合金材料相对于纯金的较高的薄层电阻材料。

9. 发明申请

WO2007084341A3 HYSTERETIC MEMS THERMAL DEVICE AND METHOD OF MANUFACTURE 审中-公开
标题翻译： HYSTERETIC MEMS THERMAL DEVICE AND METHODS MANUFACTURE
公开(公告)号：WO2007084341A3
公开(公告)日：2009-05-07
申请号：PCT/US2007000765
申请日：2007-01-12
申请人： INNOVATIVE MICRO TECHNOLOGY , RUBEL PAUL J
发明人： RUBEL PAUL J
IPC分类号： B81B3/00
CPC分类号： H02N10/00 , F03G7/06 , H01H61/02 , H01H61/04 , H01H2001/0047 , H01H2001/0068 , H01H2061/006 , H01H2061/008 , Y10T29/42 , Y10T29/49155 , Y10T29/49204
摘要： A MEMS hysteretic thermal device may have a cantilevered beam which bends about one or more points in at least two substantially different directions. In one exemplary embodiment, the MEMS hysteretic thermal device is made from a first segment coupled to an anchor point, and also coupled to a second segment by a joint. Heating two respective drive beams causes the first segment to bend in a direction substantially about th& anchor point and the second segment to bend in a direction substantially about the joint. By cooling the first drive beam faster than the second drive beam, the motion of the MEMS thermal device may be hysteretic. The MEMS hysteretic thermal device may be used for example, as an electrical switch or as a valve or piston.
摘要翻译： MEMS迟滞热装置可以具有悬臂梁，其在至少两个基本上不同的方向上围绕一个或多个点弯曲。在一个示例性实施例中，MEMS滞后热装置由耦合到锚定点的第一段制成，并且还通过接头耦合到第二段。加热两个相应的驱动梁使得第一段在基本上约th和锚点的方向上弯曲，而第二段在基本上围绕接头的方向上弯曲。通过比第二驱动光束更快地冷却第一驱动光束，MEMS热装置的运动可能是滞后的。 MEMS迟滞热装置可以例如用作电开关或阀或活塞。

10. 发明申请

WO2006138126A2 ANTISTICTION MEMS SUBSTRATE AND METHOD OF MANUFACTURE 审中-公开
标题翻译：防伪MEMS基板及其制造方法
公开(公告)号：WO2006138126A2
公开(公告)日：2006-12-28
申请号：PCT/US2006022076
申请日：2006-06-07
申请人： INNOVATIVE MICRO TECHNOLOGY , RUBEL PAUL J
发明人： RUBEL PAUL J
IPC分类号： H01L29/84 , C23C16/00 , H01L21/00
CPC分类号： C23C16/56 , B81B3/0005 , B81B3/001 , B81C2201/112 , C23C16/345
摘要： A composite wafer for fabricating MEMS devices is provided with a plurality of antistiction bumps, buried under a device layer of the composite wafer. The antistiction bumps are prepared lithographically, by patterning an antistiction material prior to the assembly of the composite wafer.
摘要翻译：用于制造MEMS器件的复合晶片设置有埋在复合晶片的器件层下方的多个抗静电凸块。通过在复合晶片的组装之前图案化抗静电材料，制备抗静电凸块。

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