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    • 1. 发明申请
    • A METHOD FOR FABRICATING THIN FILMS
    • 一种制作薄膜的方法
    • WO2009148674A1
    • 2009-12-10
    • PCT/US2009/036789
    • 2009-03-11
    • IMRA AMERICA, INC.MURAKAMI, MakotoHU, ZhendongLIU, BingCHE, YongLIU, ZhenlinUEHARA, Yuzuru
    • MURAKAMI, MakotoHU, ZhendongLIU, BingCHE, YongLIU, ZhenlinUEHARA, Yuzuru
    • H01L21/44
    • C23C14/28C23C14/08C23C14/564H01S3/0057H01S3/0085H01S3/2308
    • A method of pulsed laser deposition (PLD) capable of continuously tuning formed-film morphology from that of a nanoparticle aggregate to a smooth thin film free of particles and droplets. The materials that can be synthesized using various embodiments of the invention include, but are not limited to, metals, alloys, metal oxides, and semiconductors. In various embodiments a 'burst' mode of ultrashort pulsed laser ablation and deposition is provided. Tuning of the film morphology is achieved by controlling the burst-mode parameters such as the number of pulses and the time-spacing between the pulses within each burst, the burst repetition rate, and the laser fluence. The system includes an ultrashort pulsed laser, an optical system for delivering a focused onto the target surface with an appropriate energy density, and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted.
    • 脉冲激光沉积(PLD)的方法,其能够将形成膜的形态从纳米颗粒聚集体的形态连续调节到没有颗粒和液滴的平滑薄膜。 可以使用本发明的各种实施方案合成的材料包括但不限于金属,合金,金属氧化物和半导体。 在各种实施例中,提供了超短脉冲激光烧蚀和沉积的“突发”模式。 通过控制脉冲串模式参数,例如脉冲数和每个脉冲串内的脉冲之间的时间间隔,脉冲串重复频率和激光能量密度来实现电影形态的调整。 该系统包括超短脉冲激光器,用于以适当的能量密度传递聚焦到目标表面上的光学系统,以及真空室,其中靶和基底被安装在其中,背景气体及其压力被适当调节。
    • 3. 发明申请
    • PRODUCTION OF NANOPARTICLES WITH HIGH REPETITION RATE ULTRASHORT PULSED LASER ABLATION IN LIQUIDS
    • 生产具有高重复率超声波的纳米颗粒脉冲激光在液体中的吸收
    • WO2010087869A1
    • 2010-08-05
    • PCT/US2009/037643
    • 2009-03-19
    • IMRA AMERICA, INC.LIU, BingHU, ZhendongMURAKAMI, MakotoCHE, Yong
    • LIU, BingHU, ZhendongMURAKAMI, MakotoCHE, Yong
    • B02C19/00
    • B02C19/18B01J13/0043B01J19/121B22F1/0022B22F9/04B22F2999/00B82Y30/00B22F2202/11
    • Various embodiments include a method of producing chemically pure and stably dispersed metal and metal-alloy nanoparticle colloids with ultrafast pulsed laser ablation. A method comprises irradiating a metal or metal alloy target submerged in a liquid with ultrashort laser pulses at a high repetition rate, cooling a portion of the liquid that includes an irradiated region, and collecting nanoparticles produced with the laser irradiation and liquid cooling. The method may be implemented with a high repetition rate ultrafast pulsed laser source, an optical system for focusing and moving the pulsed laser beams, a metal or metal alloy target submerged in a liquid, and a liquid circulating system to cool the laser focal volume and collect the nanoparticle products. By controlling various laser parameters, and with optional liquid flow movement, the method provides stable colloids of dispersed metal and metal-alloy nanoparticles. In various embodiments additional stabilizing chemical agents are not required.
    • 各种实施方案包括用超快速脉冲激光烧蚀制备化学纯的和稳定分散的金属和金属合金纳米颗粒胶体的方法。 一种方法包括以高重复率以超短激光脉冲辐射淹没在液体中的金属或金属合金靶,冷却包括辐射区域的液体的一部分,以及收集通过激光照射和液体冷却产生的纳米颗粒。 该方法可以用高重复率超快脉冲激光源,用于聚焦和移动脉冲激光束的光学系统,浸没在液体中的金属或金属合金靶和液体循环系统来实现,以冷却激光聚焦体积, 收集纳米颗粒产品。 通过控制各种激光参数,并具有可选的液流运动,该方法提供分散金属和金属合金纳米粒子的稳定胶体。 在各种实施方案中,不需要另外的稳定化学试剂。