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1. 发明申请

WO2007075908A3 ATOM PROBE TEST STANDARDS AND ASSOCIATED METHODS 审中-公开
标题翻译： ATOM探测测试标准和相关方法
公开(公告)号：WO2007075908A3
公开(公告)日：2008-04-10
申请号：PCT/US2006048823
申请日：2006-12-21
申请人： IMAGO SCIENT INSTR CORP , ULFIG ROBERT MATTHEW , KELLY THOMAS F , WIENER SCOTT ALBERT , GERSTL STEPHAN SIEGFRIED ALEXA , LARSON DAVID JAMES
发明人： ULFIG ROBERT MATTHEW , KELLY THOMAS F , WIENER SCOTT ALBERT , GERSTL STEPHAN SIEGFRIED ALEXA , LARSON DAVID JAMES
IPC分类号： G01Q10/00
CPC分类号： H01J37/3056 , B82Y35/00 , H01J37/265 , H01J37/285
摘要： The present invention relates to atom probe test standards and associated methods, including methods using the test standard to calibrate an atom probe process. One aspect of the invention is directed toward an atom probe method that includes determining a characteristic associated with (a) an atom probe process, (b) a specimen, or (c) both (a) and (b) based on a comparison of data produced by an evaporation of a portion of a test standard to one or more expected results. Other aspects are directed toward determining whether (a) a characteristic associated with a test standard has changed from a first state to a second state based on a comparison of data produced by an evaporation of a portion of the test standard to one or more expected results, (b) a relative location of the test standard in a specimen has changed, or (c) both (a) and (b).
摘要翻译：本发明涉及原子探针测试标准和相关方法，包括使用测试标准校准原子探针过程的方法。本发明的一个方面涉及一种原子探针方法，其包括根据（a）原子探针过程，（b）样品或（c）（a）和（b））确定与通过将测试标准的一部分蒸发的一个或多个预期结果产生的数据。基于将测试标准的一部分的蒸发产生的数据与一个或多个预期结果的比较来确定（a）与测试标准相关联的特性是否已经从第一状态改变到第二状态，（b）样本中测试标准的相对位置已更改，或（c）（a）和（b）两者。

2. 发明申请

WO2007001321A8 ATOM PROBE ELECTRODE TREATMENTS 审中-公开
标题翻译：原子探针电极处理
公开(公告)号：WO2007001321A8
公开(公告)日：2007-02-08
申请号：PCT/US2005025740
申请日：2005-07-21
申请人： IMAGO SCIENT INSTR CORP , ULFIG ROBERT MATTHEW , BUNTON JOSEPH HALE , KELLY THOMAS F , LARSON DAVID JAMES , MARTENS RICHARD LAWRENCE , THOMPSON KEITH JOSEPH , WIENER SCOTT ALBERT
发明人： ULFIG ROBERT MATTHEW , BUNTON JOSEPH HALE , KELLY THOMAS F , LARSON DAVID JAMES , MARTENS RICHARD LAWRENCE , THOMPSON KEITH JOSEPH , WIENER SCOTT ALBERT
IPC分类号： H01J37/00
CPC分类号： G01Q60/00 , B82Y35/00
摘要： A method for treating an atom probe electrode (120), which comprises the steps of providing an atom electrode (120) having a surface (123) and an aperture (122); and removing material (604) from the surface (123) to reduce a potential of the atom probe electrode creating a non-uniformity in an electric field (502) when the atom probe electrode is used in a atom probe device during specimen analysis.
摘要翻译：一种用于处理原子探针电极（120）的方法，其包括提供具有表面（123）和孔径（122）的原子电极（120）的步骤; 以及当在样本分析期间在原子探针装置中使用原子探针电极时，从表面（123）去除材料（604）以减小原子探针电极在电场（502）中产生不均匀性的电位。

3. 发明申请

WO2007112408A2 ATOM PROBE DATA AND ASSOCIATED SYSTEMS AND METHODS 审中-公开
标题翻译：原子探针数据及相关系统和方法
公开(公告)号：WO2007112408A2
公开(公告)日：2007-10-04
申请号：PCT/US2007065275
申请日：2007-03-27
申请人： IMAGO SCIENT INSTR CORP , WIENER SCOTT ALBERT , KELLY THOMAS F , LARSON DAVID JAMES , THOMPSON KEITH JOSEPH , ULFIG ROBERT MATTHEW , GEISER BRIAN PETER , KUNICKI THOMAS C , O'NEILL RAYMOND W , SCHNEIR JASON
发明人： WIENER SCOTT ALBERT , KELLY THOMAS F , LARSON DAVID JAMES , THOMPSON KEITH JOSEPH , ULFIG ROBERT MATTHEW , GEISER BRIAN PETER , KUNICKI THOMAS C , O'NEILL RAYMOND W , SCHNEIR JASON
IPC分类号： A47C7/56
CPC分类号： H01J37/285 , H01J37/265 , H01J2237/24571 , H01J2237/24592
摘要： The present invention relates to atom probe data and associated systems and methods. Aspects of the invention are directed toward a computing system configured to predict a characteristic associated with an atom probe specimen that includes a data set receiving component configured to receive a three-dimensional data set associated with a portion of the specimen. The system further includes a predicting/calculating component configured to predict the characteristic associated with the specimen based on the data set. Other aspects of the invention are directed toward a method for evaluating a manufacturing process using atom probe data that includes receiving a three-dimensional data set associated with a portion of a microelectronic assembly produced by a manufacturing process. The method further includes determining a variation between the data set and a configuration expected to result from the manufacturing process.
摘要翻译：本发明涉及原子探针数据及相关系统和方法。本发明的方面针对被配置为预测与原子探针样本相关联的特征的计算系统，所述特征包括被配置为接收与样本的一部分相关联的三维数据集的数据集接收部件。该系统还包括预测/计算部件，其被配置为基于数据集预测与样本相关联的特性。本发明的其它方面涉及使用原子探测器数据来评估制造过程的方法，该方法包括接收与由制造过程产生的微电子组件的一部分相关联的三维数据集。该方法还包括确定数据集与期望从制造过程产生的配置之间的变化。

4. 发明申请

WO2006138593A2 ATOM PROBE COMPONENT TREATMENTS 审中-公开
标题翻译：原子探针组分处理
公开(公告)号：WO2006138593A2
公开(公告)日：2006-12-28
申请号：PCT/US2006023532
申请日：2006-06-16
申请人： IMAGO SCIENT INSTR CORP , KELLY THOMAS F , LARSON DAVID JAMES , MARTENS RICHARD LAWRENCE , THOMPSON KEITH JOSEPH , ULFIG ROBERT MATTHEW , WIENER SCOTT ALBERT
发明人： KELLY THOMAS F , LARSON DAVID JAMES , MARTENS RICHARD LAWRENCE , THOMPSON KEITH JOSEPH , ULFIG ROBERT MATTHEW , WIENER SCOTT ALBERT
IPC分类号： G01Q70/16 , G06F19/00 , G01Q60/00
CPC分类号： H01J37/3056 , H01J37/32853 , H01J37/32862
摘要： The present invention relates to treatments for atom probe components. For example, certain aspects are directed toward processes for treating an atom probe component that includes removing material from a surface of the atom probe component (e.g., using an ion beam, a plasma, a chemical etching process, and/or photonic energy). Another aspect of the invention is directed toward a method for treating an atom probe specimen that includes using a computing device to automatically control a voltage used in an ion sputtering process. Still other aspects of the invention are directed toward methods for treating an atom probe component that includes introducing photonic energy proximate to a surface of the atom probe component, annealing at least a portion of a surface of the atom probe component, coating at least a portion of a surface of the atom probe component, and/or cooling at least a portion of the atom probe component.
摘要翻译：本发明涉及原子探针成分的处理。例如，某些方面涉及用于处理原子探针组分的方法，其包括从原子探针组分的表面除去材料（例如，使用离子束，等离子体，化学蚀刻工艺和/或光子能）。本发明的另一方面涉及一种用于处理原子探针试样的方法，其包括使用计算装置自动控制在离子溅射工艺中使用的电压。本发明的其它方面涉及用于处理原子探针组分的方法，所述方法包括将光子能量引入到原子探针组分的表面附近，退火至少部分原子探针组分的表面，涂覆至少一部分的原子探针组分的表面，和/或冷却原子探针组分的至少一部分。

5. 发明申请

WO2007121325A3 ATOM PROBE DATA PROCESSES AND ASSOCIATED SYSTEMS 审中-公开
标题翻译： ATOM探测数据处理和相关系统
公开(公告)号：WO2007121325A3
公开(公告)日：2008-07-10
申请号：PCT/US2007066570
申请日：2007-04-12
申请人： IMAGO SCIENT INSTR CORP , GEISER BRIAN PETER , KELLY THOMAS F , SCHNEIR JASON , ROBERTS JAY PHILLIP , LARSON DAVID JAMES , WIENER SCOTT ALBERT
发明人： GEISER BRIAN PETER , KELLY THOMAS F , SCHNEIR JASON , ROBERTS JAY PHILLIP , LARSON DAVID JAMES , WIENER SCOTT ALBERT
IPC分类号： G06F19/00
CPC分类号： H01J37/285 , H01J37/265 , H01J2237/153 , H01J2237/223 , H01J2237/226 , H01J2237/24571 , H01J2237/24592
摘要： The present invention relates to atom probe data processes and associated systems. Aspects of the invention are directed toward a computing system configured to process atom probe data that includes a data set receiving component configured to receive a first three-dimensional data set. The first three- dimensional data set has a first data element structure and is based on data collected from performing an atom probe process on a portion of an atom probe specimen. The system further includes a data set constructing component configured to create a second three-dimensional data set having a second data element structure different than the first data element structure. In selected embodiments, the system can further include a Fourier Transform component configured to perform a Fourier Transform on a portion of the second three- dimensional data set.
摘要翻译：本发明涉及原子探针数据处理和相关系统。本发明的方面针对被配置为处理原子探测数据的计算系统，该原子探测数据包括被配置为接收第一三维数据集的数据集接收部件。第一三维数据集具有第一数据元素结构，并且基于在原子探针样本的一部分上执行原子探测过程收集的数据。该系统还包括一个数据集构成部件，被配置为创建具有与第一数据元素结构不同的第二数据元素结构的第二三维数据集。在所选择的实施例中，系统还可以包括被配置为对第二三维数据集的一部分执行傅立叶变换的傅里叶变换分量。

6. 发明申请

WO2006042065A2 METHOD TO FORM MICROPTIPS 审中-公开
标题翻译：形成微波的方法
公开(公告)号：WO2006042065A2
公开(公告)日：2006-04-20
申请号：PCT/US2005036075
申请日：2005-10-07
申请人： IMAGO SCIENT INSTR CORP , THOMPSON KEITH JOSEPH , ULFIG ROBERT MATTHEW , WIENER SCOTT ALBERT
发明人： THOMPSON KEITH JOSEPH , ULFIG ROBERT MATTHEW , WIENER SCOTT ALBERT
CPC分类号： G01Q70/16
摘要： A method of farming microtips is described. The method includes forming one or more posts in aauozple, each post having an elongated, acicular body terminating in a tip; and subjecting at least the body of the posts to an etchant, wherein the etchant removes material from the posts.
摘要翻译：描述了一种养殖微型技术的方法。该方法包括在自由体中形成一个或多个柱，每个柱具有终止于尖端的细长针状体; 并且至少使柱的主体经受蚀刻剂，其中所述蚀刻剂从所述柱移除材料。

7. 发明申请

WO2007022265A3 ATOM PROBES, ATOM PROBE SPECIMENS, AND ASSOCIATED METHODS 审中-公开
标题翻译：原子探针，原子探针样品和相关方法
公开(公告)号：WO2007022265A3
公开(公告)日：2007-05-10
申请号：PCT/US2006031982
申请日：2006-08-15
申请人： IMAGO SCIENT INSTR CORP , KELLY THOMAS F , BUNTON JOSEPH HALE , WIENER SCOTT ALBERT
发明人： KELLY THOMAS F , BUNTON JOSEPH HALE , WIENER SCOTT ALBERT
IPC分类号： G01N23/00
CPC分类号： G01N23/22
摘要： The present invention relates generally to atom probes, atom probe specimens, and associated methods. For example, certain aspects are directed toward methods for analyzing a portion of a specimen that includes selecting a region of interest and moving a portion of material in a border region proximate to the region of interest so that at least a portion of the region of interest protrudes relative to at least a portion of the border region. The method further includes analyzing a portion of the region of interest. Other aspects of the invention are directed toward a method for applying photonic energy in an atom probe process by passing photonic energy through a lens system separated from a photonic device and spaced apart from the photonic device. Yet other aspects of the invention are directed toward a method for reflecting photonic energy off an outer surface of an electrode onto a specimen.
摘要翻译：本发明一般涉及原子探针，原子探针试样和相关方法。例如，某些方面涉及用于分析样本的一部分的方法，所述方法包括选择感兴趣区域并移动邻近感兴趣区域的边界区域中的材料的一部分，使得感兴趣区域的至少一部分相对于边界区域的至少一部分突出。该方法还包括分析感兴趣区域的一部分。本发明的其它方面涉及一种通过将光子能量通过与光子器件分离并与光子器件间隔开的透镜系统来在原子探测过程中施加光子能量的方法。本发明的其它方面涉及将光子能量从电极的外表面反射到样本上的方法。

8. 发明申请

WO2006101558A3 LASER ATOM PROBES 审中-公开
标题翻译：激光原子探针
公开(公告)号：WO2006101558A3
公开(公告)日：2007-05-03
申请号：PCT/US2005046842
申请日：2005-12-20
申请人： IMAGO SCIENT INSTR CORP , BUNTON JOSEPH HALE , KELLY THOMAS F , LENZ DANIEL R , WIENER SCOTT ALBERT
发明人： BUNTON JOSEPH HALE , KELLY THOMAS F , LENZ DANIEL R , WIENER SCOTT ALBERT
IPC分类号： H01J37/285 , H01S3/10
CPC分类号： H01J49/164 , B82Y35/00 , H01J37/285 , H01J49/0004 , H01J2237/2812 , H01J2237/2813
摘要： An atom probe includes a specimen mount that holds a specimen to be analyzed. A detector is spaced apart from the specimen mount. A local electrode with an aperture is located between the detector and the specimen mount. A laser is oriented to emit a laser beam toward the specimen mount at a nonzero angle with respect to the aperture plane, the aperture plane being oriented perpendicular to an ion travel path defined through the aperture between the specimen mount and the detector.
摘要翻译：原子探针包括保持要分析的样品的样品座。检测器与样品支架间隔开。具有孔径的局部电极位于检测器和样品座之间。激光器被定向成相对于孔径平面以非零角度向激光束发射激光束，孔径平面垂直于通过样品支架和检测器之间的孔限定的离子行进路径取向。

9. 发明申请

WO2005038874A2 SHORT DURATION VARIABLE AMPLITUDE HIGH VOLTAGE PULSE GENERATOR 审中-公开
标题翻译：短时间可变电平高压脉冲发生器
公开(公告)号：WO2005038874A2
公开(公告)日：2005-04-28
申请号：PCT/US2004033821
申请日：2004-10-14
申请人： IMAGO SCIENT INSTR CORP , WIENER SCOTT ALBERT , LENZ DANIEL ROBERT
发明人： WIENER SCOTT ALBERT , LENZ DANIEL ROBERT
IPC分类号： H01L20060101 , H01L
CPC分类号： H03K3/57 , G06F1/025 , H01J37/285 , H01J2237/2485 , H01J2237/2626 , H01J2237/2852
摘要： An improved electrical pulse generator incorporating MOSFET components, a programmable high voltage power supply, and a shaping network for generating short duration signals having narrow pulse widths and short rise times.
摘要翻译：包含MOSFET组件的改进的电脉冲发生器，可编程高压电源和用于产生具有窄脉冲宽度和短上升时间的短持续时间信号的整形网络。

10. 发明公开

EP1842221A4 LASER ATOM PROBES 审中-公开
标题翻译： LASERATOMSONDEN
公开(公告)号：EP1842221A4
公开(公告)日：2010-11-24
申请号：EP05857198
申请日：2005-12-20
申请人： IMAGO SCIENT INSTR CORP
发明人： BUNTON JOSEPH HALE , KELLY THOMAS F , LENZ DANIEL R , WIENER SCOTT ALBERT
IPC分类号： H01J37/285 , H01S3/10
CPC分类号： H01J49/164 , B82Y35/00 , H01J37/285 , H01J49/0004 , H01J2237/2812 , H01J2237/2813

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